TEL Alpha 8-SE-E Small Footprint Oxidation Furnace for Sale

fabsurplus.com is pleased to announce the availability of the following listed used TEL Alpha 8-SE-E Small Footprint Oxidation Furnace . This TEL Alpha 8-SE-E Small Footprint Oxidation Furnace is available for immediate sale. Please click on the "Enquire" button if you'd like to get more details, photos and specifications of this Small Footprint Oxidation Furnace and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.

TEL Alpha 8-SE-E
SDI ID: 11076
Manufacturer: TEL
Model: Alpha 8-SE-E
Description: Small Footprint Oxidation Furnace
Version: 200 mm Wafers
Vintage: 01.10.1999
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Comments:
* Configured for Oxidation Process for 200mm Wafers * Load/Control Station * WAVES Control Unit * Gas Flow Chart Panel # 2109-322087-12 * Dual Cassette I/O Station with Cassette Tilt * 18 Cassette Stocker System * Cassette Transfer Robot * SECS Interface * Vertical Furnace Cabinet * FTP 4 Zone Heater Chamber * Quartz Process Chamber & Boat * Wafer Transfer Robot * N2 Purge Box with O2 Density & N2 Leakage Detection * Boat Elevator with Boat Rotation Mechanism * Auto Door / Auto Tube Shutter * Gas Box * Process Gas Jungle * 2ea STEC SEC-7350 MFC: N2 @ 30 SLM * STEC SEC-7340 MFC: N2 @ 3 SLM * STEC SEC-7330 MFC: O2 @ 500 SCCM * STEC SEC-7340 MFC: O2 @ 10 SLM * STEC SEC-7340 MFC: H2 @ 10 SLM * STEC SEC-7340 MFC: NO @ 10 SLM * STEC SEC-7350 MFC: NO2 @ 10 SLM * STEC SEC-7350 MFC: Ar @ 30 SLM * Gas Flow Chart Panel * 2ea Riken Keiki GP-581H H2 Monitors * 2ea Riken Keiki GP-582 NO Monitors * Riken Keiki GP-582 NO2 Monitor * Riken Keiki TAN-580 Alarm Unit * 3ea OMRON E5GN Process Controllers * CKD Pressure Controller * RKC CB100 Temperature Controller * Auxiliary Cabinet: * STEC SEC-900 N2 MFM * Nitrogen Pass-Thru Gas Jungle * 2ea STEC SEC-7340 MFC: N2 @ 10 SLM * 2ea STEC SEC-7330 MFC: N2 @ 500 SCCM * Toray LC-750 O2 Analyzer * Riken Keiki OX-571A O2 Densimeter * ULVAC GP-1000 Pirani Gauges * 2ea SCHUMACHER ATCS15-TLC Absolute Temperature Controllers * 1ea for Trans-LC * 1ea for MeCl2 * Main Power Control Box AC Distribution Boxes * WAVES Control Computer * AC and DC Distribution * Uninterruptable Power Control Box * Model 560A 4 Zone Temperature Controller * DC Distribution * PAC Control Box * RKC REX-F900 Temperature Controller * Rapid Cooling Unit * Quartz Tube Trolley * External Pyrogenic Torch * Ebara AA10V1-H Dry Vacuum Pump Following are the TEL Alpha 8SE-E furnace dimensions (packing list): Furnace Unit - 36" x 52" x 87" Tall Gas Cabinet System - 18" x 38" x 110" Tall Control System - 39" x 8" x 110" Tall Automation System (Cassette Load & Unload) - 38" x 27" x 110" Tall Main Power Supply System - 36" x 36" x 76" Tall Main Power Control Box - 36" x 36" x 76" Tall PAC Control Box - 24" x 14" x 46" Tall Rapid Cooling Unit - 36" x 20" x 90" Tall Quartz Tube Trolley - 30" x 19" x 40" Tall Auxilary Cabinet - 38" x 26" x 62" Tall Ebara AA10V Vacuum Pump - 15" x 32" x 19" Tall 1 Misc Crate - 72" x 48" x 55" Tall Connection Items
Attachments: 11 Files


Filename: TEL Alpha 8SE a.jpg     [Download]
Size: 69653
Preview:
Filename: TEL Alpha 8SE b.jpg     [Download]
Size: 97326
Preview:
Filename: TEL Alpha 8SE c.jpg     [Download]
Size: 37856
Preview:
Filename: TEL Alpha 8SE d.jpg     [Download]
Size: 57385
Preview:
Filename: TEL Alpha 8SE e.jpg     [Download]
Size: 28237
Preview:
Filename: TEL Alpha 8SE f.jpg     [Download]
Size: 61352
Preview:
Filename: TEL Alpha 8SE g.jpg     [Download]
Size: 37584
Preview:
Filename: TEL Alpha 8SE h.jpg     [Download]
Size: 26992
Preview:
Filename: TEL HCT.2.jpg     [Download]
Size: 185352
Preview:
Filename: TEL HCT.3.jpg     [Download]
Size: 246794
Preview:
Filename: TEL HCT.4.jpg     [Download]
Size: 229912
Preview:


Not the item you were looking for?

click here to Search again for used semiconductor equipment

Ask SDI fabsurplus.com!

If you can't find what you need, or are looking for a specific piece of semiconductor equipment let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.