Applied Materials Producer BPSG BPSG SACVD (Standard Body) System (3 X Twin Chambers) for Sale

fabsurplus.com is pleased to announce the availability of the following listed used Applied Materials Producer BPSG BPSG SACVD (Standard Body) System (3 X Twin Chambers) . This Applied Materials Producer BPSG BPSG SACVD (Standard Body) System (3 X Twin Chambers) is available for immediate sale. Please click on the "Enquire" button if you'd like to get more details, photos and specifications of this BPSG SACVD (Standard Body) System (3 X Twin Chambers) and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.

Applied Materials Producer BPSG
SDI ID: 19372
Manufacturer: Applied Materials
Model: Producer BPSG
Description: BPSG SACVD (Standard Body) System (3 X Twin Chambers)
Version: 200 mm
Vintage: 01.06.1999
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Comments:
• Tool Model: PRODUCER-STANDARD
• Process: BPSG
• Software Version: B 2.3.16
• System Power Rating: 208 VAC 3-Phase
• Loading Configuration: Dual front cassette loader (Manual)
• Chambers:
• Chm Position A: SACVD 200mm Twin Chamber.
Chem/Gases Used: TEOS, TEB, TEPO, He, O2, NF3, N2, Ar, O3

• Chm Position B: SACVD 200mm Twin Chamber.
Chem/Gases Used: TEOS, TEB, TEPO, He, O2, NF3, N2, Ar, O3

 • Chm Position C: SACVD 200mm Twin Chamber.
Chem/Gases Used: TEOS, TEB, TEPO, He, O2, NF3, N2, Ar, O3

• System Configuration:
• Main Unit
• AMAT PRODUCER standard mainframe body x1
• Transfer chamber x1
• SACVD twin process chamber x3
• Buffer VHP Robot x1
• PRI Front end robot x1
• AC Power Box x1
• CRT Monitor x2
• Easy on easy off heater jacket x3
• Foreline (2") heater jacket x3
• IPX pump for load lock and Transfer chamber x1
• Remote AC panel x1

• Remote Components:
• Ebara Dry Pump (AAS100WN) x3. Not sold with tool.
• Ozone generator x3
• Ozone monitoring system x1
• Heat Exchanger Neslab Steel head "0" x1.
Chemicals used: 50 % Glycol + 50 % DI

• Chiller (Neslab Steel head HX-300) x1.
Chemicals used: 50 % Glycol + 50 % DI

• ATMI Cabinet (TEOS, TEB and TEPO) x3.
Chemicals used: TEOS / TEB / TEPO

• Degaser Pump (AAS10w) x1. Not sold with tool.
• BOC TCS scrubber x1. Not sold with tool.
Attachments: 4 Files


Filename: 30000428a.jpg     [Download]
Size: 20999
Preview:
Filename: 30000428b.jpg     [Download]
Size: 22667
Preview:
Filename: 30000428c.jpg     [Download]
Size: 27759
Preview:
Filename: 30000428d.jpg     [Download]
Size: 24613
Preview:


Not the item you were looking for?

click here to Search again for used semiconductor equipment

Ask SDI fabsurplus.com!

If you can't find what you need, or are looking for a specific piece of semiconductor equipment let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.