fabsurplus.com

This item has been sold - Applied Materials Producer BPSG BPSG SACVD (Standard Body) System (3 X Twin Chambers) for Sale

Applied Materials Producer BPSG
SDI ID: 19372
Manufacturer: Applied Materials
Model: Producer BPSG
Description: BPSG SACVD (Standard Body) System (3 X Twin Chambers)
Version: 200 mm
Vintage: 01.06.1999
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Comments:
• Tool Model: PRODUCER-STANDARD
• Process: BPSG
• Software Version: B 2.3.16
• System Power Rating: 208 VAC 3-Phase
• Loading Configuration: Dual front cassette loader (Manual)
• Chambers:
• Chm Position A: SACVD 200mm Twin Chamber.
Chem/Gases Used: TEOS, TEB, TEPO, He, O2, NF3, N2, Ar, O3

• Chm Position B: SACVD 200mm Twin Chamber.
Chem/Gases Used: TEOS, TEB, TEPO, He, O2, NF3, N2, Ar, O3

 • Chm Position C: SACVD 200mm Twin Chamber.
Chem/Gases Used: TEOS, TEB, TEPO, He, O2, NF3, N2, Ar, O3

• System Configuration:
• Main Unit
• AMAT PRODUCER standard mainframe body x1
• Transfer chamber x1
• SACVD twin process chamber x3
• Buffer VHP Robot x1
• PRI Front end robot x1
• AC Power Box x1
• CRT Monitor x2
• Easy on easy off heater jacket x3
• Foreline (2") heater jacket x3
• IPX pump for load lock and Transfer chamber x1
• Remote AC panel x1

• Remote Components:
• Ebara Dry Pump (AAS100WN) x3. Not sold with tool.
• Ozone generator x3
• Ozone monitoring system x1
• Heat Exchanger Neslab Steel head "0" x1.
Chemicals used: 50 % Glycol + 50 % DI

• Chiller (Neslab Steel head HX-300) x1.
Chemicals used: 50 % Glycol + 50 % DI

• ATMI Cabinet (TEOS, TEB and TEPO) x3.
Chemicals used: TEOS / TEB / TEPO

• Degaser Pump (AAS10w) x1. Not sold with tool.
• BOC TCS scrubber x1. Not sold with tool.
Attachments: 4 Files

About SDI

sdi logo

Established in 1998, SDI has now built up an international network of sales agents and offices.

SDI has evolved into one of the largest semiconductor equipment brokerages by concentrating on professionalism, customer service and value for money.


Read more about us

Search

Can't find what you need?

Ask SDI fabsurplus.com! If you can't find what you need, or are looking for a specific piece of semiconductor equipment let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.


Inquiry

Contacts

sdi logoClick here for all contact information.
SDI-Fabsurplus Srl Italy, SDI-Fabsurplus Ireland ltd. and SDI-FABSURPLUS LLC. N. America

Feedback

We'd love to get your feedback about our website and our services!
Fill in the Feedback Form



Not the item you were looking for?

Ask SDI fabsurplus.com!

If you can't find what you need, or are looking for a specific piece of semiconductor equipment let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.

Inquiry

The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.