Applied Materials Producer BPSG BPSG SACVD (Standard Body) System (3 X Twin Chambers) for Sale

• Tool Model: PRODUCER-STANDARD • Process: BPSG • Software Version: B 2.3.16 • System Power Rating: 208 VAC 3-Phase • Loading Configuration: Dual front cassette loader (Manual) • Chambers: • Chm Position A: SACVD 200mm Twin Chamber. Chem/Gases Used: TEOS, TEB, TEPO, He, O2, NF3, N2, Ar, O3 • Chm Position B: SACVD 200mm Twin Chamber. Chem/Gases Used: TEOS, TEB, TEPO, He, O2, NF3, N2, Ar, O3 • Chm Position C: SACVD 200mm Twin Chamber. Chem/Gases Used: TEOS, TEB, TEPO, He, O2, NF3, N2, Ar, O3 • System Configuration: • Main Unit • AMAT PRODUCER standard mainframe body x1 • Transfer chamber x1 • SACVD twin process chamber x3 • Buffer VHP Robot x1 • PRI Front end robot x1 • AC Power Box x1 • CRT Monitor x2 • Easy on easy off heater jacket x3 • Foreline (2") heater jacket x3 • IPX pump for load lock and Transfer chamber x1 • Remote AC panel x1 • Remote Components: • Ebara Dry Pump (AAS100WN) x3. Not sold with tool. • Ozone generator x3 • Ozone monitoring system x1 • Heat Exchanger Neslab Steel head "0" x1. Chemicals used: 50 % Glycol + 50 % DI • Chiller (Neslab Steel head HX-300) x1. Chemicals used: 50 % Glycol + 50 % DI • ATMI Cabinet (TEOS, TEB and TEPO) x3. Chemicals used: TEOS / TEB / TEPO • Degaser Pump (AAS10w) x1. Not sold with tool. • BOC TCS scrubber x1. Not sold with tool.