This item has been sold - Applied Materials Producer BPSG BPSG SACVD (Standard Body) System (3 X Twin Chambers) for Sale

Applied Materials Producer BPSG
SDI ID: 19372
Manufacturer: Applied Materials
Model: Producer BPSG
Description: BPSG SACVD (Standard Body) System (3 X Twin Chambers)
Version: 200 mm
Vintage: 01.06.1999
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Comments:
• Tool Model: PRODUCER-STANDARD
• Process: BPSG
• Software Version: B 2.3.16
• System Power Rating: 208 VAC 3-Phase
• Loading Configuration: Dual front cassette loader (Manual)
• Chambers:
• Chm Position A: SACVD 200mm Twin Chamber.
Chem/Gases Used: TEOS, TEB, TEPO, He, O2, NF3, N2, Ar, O3

• Chm Position B: SACVD 200mm Twin Chamber.
Chem/Gases Used: TEOS, TEB, TEPO, He, O2, NF3, N2, Ar, O3

 • Chm Position C: SACVD 200mm Twin Chamber.
Chem/Gases Used: TEOS, TEB, TEPO, He, O2, NF3, N2, Ar, O3

• System Configuration:
• Main Unit
• AMAT PRODUCER standard mainframe body x1
• Transfer chamber x1
• SACVD twin process chamber x3
• Buffer VHP Robot x1
• PRI Front end robot x1
• AC Power Box x1
• CRT Monitor x2
• Easy on easy off heater jacket x3
• Foreline (2") heater jacket x3
• IPX pump for load lock and Transfer chamber x1
• Remote AC panel x1

• Remote Components:
• Ebara Dry Pump (AAS100WN) x3. Not sold with tool.
• Ozone generator x3
• Ozone monitoring system x1
• Heat Exchanger Neslab Steel head "0" x1.
Chemicals used: 50 % Glycol + 50 % DI

• Chiller (Neslab Steel head HX-300) x1.
Chemicals used: 50 % Glycol + 50 % DI

• ATMI Cabinet (TEOS, TEB and TEPO) x3.
Chemicals used: TEOS / TEB / TEPO

• Degaser Pump (AAS10w) x1. Not sold with tool.
• BOC TCS scrubber x1. Not sold with tool.
Attachments: 4 Files


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