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This item has been sold - LAM Research TCP 9400 SE ENVision Dry poly etching system for Sale

LAM Research TCP 9400 SE ENVision
SDI ID: 21475
Manufacturer: LAM Research
Model: TCP 9400 SE ENVision
Description: Dry poly etching system
Version: 200 mm
Vintage: 01.06.1996
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Comments:
Controller Type VME Software Revision Level E1.6-011 SECS End Point Detection Cassette to Cassette RF Generator Model AE Number of Gas Inputs Eight Gas Process Gases Cl2 100, HCl 200, O2 500, NF3 20, NF3 200, HeO2 .. Accessories Chiller service box, external gas box, coolant line Power Requirements 208 V 80.0 A 50/60 Hz 3 Phase CE Marked
Attachments: 4 Files

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