LAM Research TCP 9400 SE ENVision Dry poly etching system for Sale

fabsurplus.com is pleased to announce the availability of the following listed used LAM Research TCP 9400 SE ENVision Dry poly etching system . This LAM Research TCP 9400 SE ENVision Dry poly etching system is available for immediate sale. Please click on the "Enquire" button if you'd like to get more details, photos and specifications of this Dry poly etching system and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.

LAM Research TCP 9400 SE ENVision
SDI ID: 21475
Manufacturer: LAM Research
Model: TCP 9400 SE ENVision
Description: Dry poly etching system
Version: 200 mm
Vintage: 01.06.1996
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Comments:
Controller Type VME Software Revision Level E1.6-011 SECS End Point Detection Cassette to Cassette RF Generator Model AE Number of Gas Inputs Eight Gas Process Gases Cl2 100, HCl 200, O2 500, NF3 20, NF3 200, HeO2 .. Accessories Chiller service box, external gas box, coolant line Power Requirements 208 V 80.0 A 50/60 Hz 3 Phase CE Marked
Attachments: 4 Files


Filename: Lam_9400.JPG     [Download]
Size: 127721
Preview:
Filename: lam_94004.JPG     [Download]
Size: 44331
Preview:
Filename: lam_94003.JPG     [Download]
Size: 85812
Preview:
Filename: lam_94002.JPG     [Download]
Size: 102137
Preview:


Not the item you were looking for?

click here to Search again for used semiconductor equipment

Ask SDI fabsurplus.com!

If you can't find what you need, or are looking for a specific piece of semiconductor equipment let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.