Please find below a list of Used ashing and stripping Equipment for sale by fabsurplus.com - Click on any listed item of Ashing and Stripping Equipment to see further data. In modern semiconductor device production, following the polysilicon etch process, the substrate typically undergoes a plasma ashing step to remove the photoresist (light sensitive coating) from the etched wafer. Using a plasma source, a monatomic (single atom) substance known as a reactive species is generated. Oxygen or fluorine are the most common reactive species. Other gases used can be N2/H2 where the H2 portion is 2%. The reactive species combine with the photoresist making ash which is then removed with a vacuum pump.
| SDI ID | Manufacturer | Model | Description | Version | Vintage | Q. ty | Sales Conditions | Lead Time |
|---|---|---|---|---|---|---|---|---|
| 108724 | Alcan Tech/Canon | MAS-8000 | Microwave Ashing System | 200 mm | 1 | as is where is | immediately | |
| 91345 | AXCELIS | INTEGRA | ES plasma dry strip system | 300 mm | 1 | as is where is | ||
| 103517 | AXCELIS | ES3 | Plasma Asher | 300 mm | 1 | as is where is | ||
| 106639 | AXCELIS | INTEGRA-RS | DRY STRIP | 300 mm | 01.06.2012 | 1 | as is where is | |
| 108700 | Axcelis | Fusion ES3 | Asher | 300 MM | 01.02.2001 | 1 | as is where is | immediately |
| 108905 | Axcelis | RapidCure 320FC | RPC | 300 mm | 01.12.2005 | 1 | as is where is | immediately |
| 91348 | Gasonics | IRIDIA 4800 DL | Stripper / Asher | 31.05.1998 | 1 | as is where is | ||
| 91349 | Gasonics | IRIDIA 4800 DL | Stripper / Asher | 1 | as is where is | |||
| 91351 | Gasonics | IRIDIA 4800 DL | Stripper / Asher | 31.05.1998 | 1 | as is where is | ||
| 98277 | LAM Research | 2300 MWAVE STRPR | Asher/Stripper | 300 mm | 31.05.2012 | 1 | as is where is | |
| 98283 | MATTSON | PARADIGME SI | Dry Strip | 300 mm | 31.05.2011 | 1 | as is where is | |
| 90146 | NOVELLUS | GAMMA 2100 | asher / PR STRIP | 30.11.2002 | 1 | as is where is | immediately | |
| 91356 | PSC | DES-220-456AVL | ASHER | 200 mm | 1 | as is where is | immediately | |
| 94477 | PSK | TERA21 | Asher | 300 mm | 31.05.2002 | 1 | as is where is | |
| 98833 | PSK | SUPRA3 | Asher Dry Strip | 300 mm | 31.10.2006 | 1 | as is where is | |
| 100927 | PSK | TERA21 | Asher/Stripper | 300 mm | 31.05.2006 | 1 | as is where is | |
| 103548 | PSK | SUPRA3 | Dry Strip | 300 mm | 31.05.2006 | 1 | as is where is | |
| 103549 | PSK | TERA21 | PR Ashing | 300 mm | 1 | as is where is | ||
| 103550 | PSK | TERA21 | PR Ashing | 300 mm | 1 | as is where is | ||
| 103551 | PSK | TERA21 | PR Ashing | 300 mm | 1 | as is where is | ||
| 108193 | PSK | TERA21 | PR Ashing | 300 mm | 01.06.2003 | 1 | as is where is | |
| 108584 | PSK | TERA21 | Asher | 300 mm | 01.05.2006 | 1 | as is where is | immediately |
| 108586 | PSK | DAS 2000 | Asher | 200 mm | 01.05.2004 | 1 | as is where is | immediately |
| 109225 | PSK | Supra IV | Stripper/Asher | 300mm | 1 | as is where is | ||
| 109226 | PSK | Supra IV | Stripper/Asher | 300mm | 1 | as is where is | ||
| 109227 | PSK | Supra IV | Stripper/Asher | 300mm | 1 | as is where is | ||
| 109228 | PSK | Supra IV | Stripper/Asher | 300mm | 1 | as is where is | ||
| 109564 | PSK | SUPRA III | PHOTORESIST STRIP | 300 mm | 01.05.2006 | 1 | as is where is | immediately |
| 109604 | Ulvac | Enviro | Downstream Microwave Asher | 1 | inquire |