{"id":350,"date":"2018-02-20T16:40:49","date_gmt":"2018-02-20T14:40:49","guid":{"rendered":"https:\/\/www.fabsurplus.com\/blog\/?p=350"},"modified":"2022-04-01T16:29:58","modified_gmt":"2022-04-01T14:29:58","slug":"making-47-nm-lines-spaces-immersion-lithography","status":"publish","type":"post","link":"https:\/\/www.fabsurplus.com\/blog\/making-47-nm-lines-spaces-immersion-lithography\/","title":{"rendered":"Making 47 nm lines and spaces with immersion lithography"},"content":{"rendered":"<p>If you need to make 47nm lines and spaces, we&#8217;ve got the hardware you need:&nbsp;<\/p>\n<p><a href=\"https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=89012\">https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=89012<\/a><\/p>\n<p><img loading=\"lazy\" class=\"alignnone size-medium wp-image-351\" src=\"https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/47nm_lines_and_spaces-300x201.jpg\" alt=\"47nm lines and spaces\" width=\"300\" height=\"201\" srcset=\"https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/47nm_lines_and_spaces-300x201.jpg 300w, https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/47nm_lines_and_spaces.jpg 353w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/p>\n<p>With a&nbsp;<a href=\"https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=89012\" target=\"_blank\" rel=\"noopener\"><strong>193nm immersion scanner<\/strong><\/a>, developed by <strong>Nikon<\/strong>, the world&#8217;s first to break the barrier for an NA of 1.0 reaching an NA of 1.07, enabling the mass production of devices with a resolution of 55nm.<\/p>\n<p><em>Immersion Lithography technology allowed a step forward in resolution in the semiconductor industry. The challenge of this technology is how to deal with a purified medium (like water or oil) filling the space between the projection lens and the substrate.&nbsp;<\/em><\/p>\n<figure id=\"attachment_352\" aria-describedby=\"caption-attachment-352\" style=\"width: 716px\" class=\"wp-caption alignnone\"><img loading=\"lazy\" class=\"wp-image-352 size-full\" src=\"https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/lithography.png\" alt=\"immersion lithography process\" width=\"716\" height=\"542\" srcset=\"https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/lithography.png 716w, https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/lithography-300x227.png 300w\" sizes=\"(max-width: 716px) 100vw, 716px\" \/><figcaption id=\"caption-attachment-352\" class=\"wp-caption-text\">immersion lithography process<\/figcaption><\/figure>\n<p><strong>(a)<\/strong>: Air gap and water-filled gap between lens and substrate. Liquid between objective lens and image plane reduces the angle of the light exiting the lens<\/p>\n<p><strong>(b)<\/strong>: Immersion lithography lens\/wafer arrangement<\/p>\n<p style=\"text-align: left;\">(source: Micro and Nano Fabrication: Tools and Processes, by <span class=\"addmd\">Hans H. Gatzen,Volker Saile,J\u00fcrg Leuthold)<\/span><\/p>\n","protected":false},"excerpt":{"rendered":"<p>If you need to make 47nm lines and spaces, we&#8217;ve got the hardware you need:&nbsp; https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=89012 With a&nbsp;193nm immersion scanner, developed by Nikon, the world&#8217;s first to break the barrier for an NA of 1.0 reaching an NA of 1.07, enabling the mass production of devices with a resolution of 55nm. Immersion Lithography technology allowed [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":351,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"ngg_post_thumbnail":0},"categories":[1],"tags":[12],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v19.13 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Making 47 nm lines and spaces with immersion lithography - SDI Fabsurplus News<\/title>\n<meta name=\"description\" content=\"If you need to make 47nm lines and spaces, we&#039;ve got the hardware you need:\u00a0a\u00a0193nm immersion scanner, developed by Nikon\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.fabsurplus.com\/blog\/making-47-nm-lines-spaces-immersion-lithography\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Making 47 nm lines and spaces with immersion lithography - SDI Fabsurplus News\" \/>\n<meta property=\"og:description\" content=\"If you need to make 47nm lines and spaces, we&#039;ve got the hardware you need:\u00a0a\u00a0193nm immersion scanner, developed by Nikon\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.fabsurplus.com\/blog\/making-47-nm-lines-spaces-immersion-lithography\/\" \/>\n<meta property=\"og:site_name\" content=\"SDI Fabsurplus News\" \/>\n<meta property=\"article:publisher\" content=\"https:\/\/www.facebook.com\/fabsurplus\" \/>\n<meta property=\"article:author\" content=\"https:\/\/www.facebook.com\/fabsurplus\" \/>\n<meta property=\"article:published_time\" content=\"2018-02-20T14:40:49+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2022-04-01T14:29:58+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/47nm_lines_and_spaces.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"353\" \/>\n\t<meta property=\"og:image:height\" content=\"236\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"author\" content=\"fabsurplus\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:creator\" content=\"@fabsurplus\" \/>\n<meta name=\"twitter:site\" content=\"@fabsurplus\" \/>\n<meta name=\"twitter:label1\" content=\"Written by\" \/>\n\t<meta name=\"twitter:data1\" content=\"fabsurplus\" \/>\n\t<meta name=\"twitter:label2\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data2\" content=\"2 minutes\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\/\/www.fabsurplus.com\/blog\/making-47-nm-lines-spaces-immersion-lithography\/#article\",\"isPartOf\":{\"@id\":\"https:\/\/www.fabsurplus.com\/blog\/making-47-nm-lines-spaces-immersion-lithography\/\"},\"author\":{\"name\":\"fabsurplus\",\"@id\":\"https:\/\/www.fabsurplus.com\/blog\/#\/schema\/person\/f5b033e476d2cfeb9ba71f1983999434\"},\"headline\":\"Making 47 nm lines and spaces with immersion lithography\",\"datePublished\":\"2018-02-20T14:40:49+00:00\",\"dateModified\":\"2022-04-01T14:29:58+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\/\/www.fabsurplus.com\/blog\/making-47-nm-lines-spaces-immersion-lithography\/\"},\"wordCount\":170,\"publisher\":{\"@id\":\"https:\/\/www.fabsurplus.com\/blog\/#organization\"},\"keywords\":[\"lithography\"],\"articleSection\":[\"News\"],\"inLanguage\":\"en-US\"},{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.fabsurplus.com\/blog\/making-47-nm-lines-spaces-immersion-lithography\/\",\"url\":\"https:\/\/www.fabsurplus.com\/blog\/making-47-nm-lines-spaces-immersion-lithography\/\",\"name\":\"Making 47 nm lines and spaces with immersion lithography - 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