{"id":612,"date":"2019-09-19T11:38:48","date_gmt":"2019-09-19T09:38:48","guid":{"rendered":"https:\/\/www.fabsurplus.com\/blog\/?p=612"},"modified":"2022-04-01T16:33:27","modified_gmt":"2022-04-01T14:33:27","slug":"september-2019-used-semiconductor-equipment-sale","status":"publish","type":"post","link":"https:\/\/www.fabsurplus.com\/blog\/september-2019-used-semiconductor-equipment-sale\/","title":{"rendered":"Used Semiconductor Equipment for Sale 18th September 2019"},"content":{"rendered":"\n<p> Dear Customers,&nbsp;<br>This month we are featuring for sale the following items of semiconductor manufacturing equipment.<br>By clicking the links shown below, you will be able to see the details about each item of equipment via our website.<\/p>\n\n\n\n<p>Applied Materials Centura DPS2 Advantedge Poly etcher, 4 CH , 300 mm, for sale @fabsurplus.com:-<\/p>\n\n\n\n<p><a href=\"https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=95926\">https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=95926<\/a><\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" width=\"761\" height=\"683\" src=\"https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/image-1.png\" alt=\"\" class=\"wp-image-634\" srcset=\"https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/image-1.png 761w, https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/image-1-300x269.png 300w\" sizes=\"(max-width: 761px) 100vw, 761px\" \/><\/figure>\n\n\n\n<p>Applied Materials Centura DPS2 Advantedge Poly etcher, 4 CH, 300 mm,&nbsp;for sale @fabsurplus.com:-<\/p>\n\n\n\n<p><a href=\"https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=95927\">https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=95927<\/a><\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" width=\"347\" height=\"519\" src=\"https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/image-2.png\" alt=\"\" class=\"wp-image-635\" srcset=\"https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/image-2.png 347w, https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/image-2-201x300.png 201w\" sizes=\"(max-width: 347px) 100vw, 347px\" \/><\/figure>\n\n\n\n<p><\/p>\n\n\n\n<p>Applied Materials Centura Advantedge Carina Mesa, 2 CH, 300 mm, for sale @fabsurplus.com:-<\/p>\n\n\n\n<p><a href=\"https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=95928\">https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=95928<\/a><\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" width=\"341\" height=\"536\" src=\"https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/image-3.png\" alt=\"\" class=\"wp-image-636\" srcset=\"https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/image-3.png 341w, https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/image-3-191x300.png 191w\" sizes=\"(max-width: 341px) 100vw, 341px\" \/><\/figure>\n\n\n\n<p><\/p>\n\n\n\n<p>Applied Materials Mirra Ontrak, Refurbished, 200 mm, &nbsp;for sale @fabsurplus.com:-<\/p>\n\n\n\n<p><a href=\"https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=96537\">https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=96537<\/a><\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" width=\"561\" height=\"351\" src=\"https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/image-4.png\" alt=\"\" class=\"wp-image-637\" srcset=\"https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/image-4.png 561w, https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/image-4-300x188.png 300w\" sizes=\"(max-width: 561px) 100vw, 561px\" \/><\/figure>\n\n\n\n<p><\/p>\n\n\n\n<p>AKT \/ Applied Materials NAR 1200 Twin TFB G5 Vertical PVD system for sale @fabsurplus.com:-<\/p>\n\n\n\n<p><a href=\"https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=95632\">https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=95632<\/a><\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" width=\"960\" height=\"757\" src=\"https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/image-5.png\" alt=\"\" class=\"wp-image-638\" srcset=\"https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/image-5.png 960w, https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/image-5-300x237.png 300w, https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/image-5-768x606.png 768w\" sizes=\"(max-width: 960px) 100vw, 960px\" \/><\/figure>\n\n\n\n<p><\/p>\n\n\n\n<p>AKT \/ Applied Materials G5 15K PECVD System for FPD amorphous Silicon for sale @fabsurplus.com:-<\/p>\n\n\n\n<p><a href=\"https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=95119\">https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=95119<\/a><\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" width=\"998\" height=\"480\" src=\"https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/image-6.png\" alt=\"\" class=\"wp-image-639\" srcset=\"https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/image-6.png 998w, https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/image-6-300x144.png 300w, https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/image-6-768x369.png 768w\" sizes=\"(max-width: 998px) 100vw, 998px\" \/><\/figure>\n\n\n\n<p><\/p>\n\n\n\n<p>ASML XT1700Fi Immersion ArF scanner for sale @fabsurplus.com:-<\/p>\n\n\n\n<p><a href=\"https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=95949\">https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=95949<\/a><\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" width=\"624\" height=\"569\" src=\"https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/image-7.png\" alt=\"\" class=\"wp-image-640\" srcset=\"https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/image-7.png 624w, https:\/\/www.fabsurplus.com\/blog\/wp-content\/uploads\/image-7-300x274.png 300w\" sizes=\"(max-width: 624px) 100vw, 624px\" \/><\/figure>\n\n\n\n<p><\/p>\n\n\n\n<p>ASM AD 830 Die Bonder for sale @fabsurplus.com:-<\/p>\n\n\n\n<p><a href=\"https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=95633\">https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=95633<\/a><\/p>\n\n\n\n<p>Canon MPA 600 Super Mask Aligner for sale @fabsurplus.com:-<\/p>\n\n\n\n<p><a href=\"https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=50438\">https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=50438<\/a><\/p>\n\n\n\n<p>FEI Helios Nanolab 450S Dual-Beam FIB-SEM, 300 mm, for sale @fabsurplus.com:-<\/p>\n\n\n\n<p><a href=\"https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=96385\">https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=96385<\/a><\/p>\n\n\n\n<p>Hitachi S9380ii CD-SEM, 300 mm, &nbsp;for sale @fabsurplus.com:-<\/p>\n\n\n\n<p><a href=\"https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=96377\">https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=96377<\/a><\/p>\n\n\n\n<p>KLA-Tencor AIT UV Darkfield Wafer Inspection System, 200 mm, for sale @fabsurplus.com:-<\/p>\n\n\n\n<p><a href=\"https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=76682\">https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=76682<\/a><\/p>\n\n\n\n<p>Karl Suss MA6 Mask Aligner for sale @fabsurplus.com:-<\/p>\n\n\n\n<p><a href=\"https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=96389\">https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=96389<\/a><\/p>\n\n\n\n<p>Neutronix \/ Quintel 7000 Mask Aligner, 150 mm, &nbsp;for sale @fabsurplus.com:-<\/p>\n\n\n\n<p><a href=\"https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=87509\">https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=87509<\/a><\/p>\n\n\n\n<p>Phoenix Nanomex 160 X-ray PCB inspection system for sale @fabsurplus.com:-<\/p>\n\n\n\n<p><a href=\"https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=86340\">https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=86340<\/a><\/p>\n\n\n\n<p>Rigaku MFM 65 Energy Dispersive X-ray Fluorescence Wafer Inspection System for sale @fabsurplus.com:-<\/p>\n\n\n\n<p><a href=\"https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=92691\">https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=92691<\/a><\/p>\n\n\n\n<p>Veeco K465i Turbodisc GaN MOCVD Reactors , 2-6 inch, for sale @fabsurplus.com:-<\/p>\n\n\n\n<p><a href=\"https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=93402\">https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=93402<\/a><\/p>\n\n\n\n<p>Veeco D9000 AFM , 200 mm, &nbsp;for sale @fabsurplus.com:-<\/p>\n\n\n\n<p><a href=\"https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=96383\" target=\"_blank\" rel=\"noreferrer noopener\">https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=96383<\/a>&nbsp;Next, please find attached a short-notice bidding list of top-of-the-range 300 mm and 200 mm Semiconductor Wafer Fab Equipment.This equipment will be sold to the highest bidder via a process of closed bidding:-&nbsp;\n\n<\/p>\n\n\n\n<table border=\"0\" cellspacing=\"0\">\n<tbody>\n<tr>\n<td style=\"border-bottom-width:1px;border-bottom-style:hidden;border-bottom-color:#000000\" align=\"left\" bgcolor=\"#969696\" height=\"20\"><strong><span style=\"font-size:xx-small\">SDI ID<\/span><\/strong><\/td>\n<td style=\"border-bottom-width:1px;border-bottom-style:hidden;border-bottom-color:#000000\" align=\"left\" bgcolor=\"#969696\"><strong><span style=\"font-size:xx-small\">Manufacturer<\/span><\/strong><\/td>\n<td style=\"border-bottom-width:1px;border-bottom-style:hidden;border-bottom-color:#000000\" align=\"left\" bgcolor=\"#969696\"><strong><span style=\"font-size:xx-small\">Model<\/span><\/strong><\/td>\n<td style=\"border-bottom-width:1px;border-bottom-style:hidden;border-bottom-color:#000000\" align=\"left\" bgcolor=\"#969696\"><strong><span style=\"font-size:xx-small\">Description<\/span><\/strong><\/td>\n<td style=\"border-bottom-width:1px;border-bottom-style:hidden;border-bottom-color:#000000\" align=\"left\" bgcolor=\"#969696\"><strong><span style=\"font-size:xx-small\">Quantity<\/span><\/strong><\/td>\n<td style=\"border-bottom-width:1px;border-bottom-style:hidden;border-bottom-color:#000000\" align=\"left\" bgcolor=\"#969696\"><strong><span style=\"font-size:xx-small\">Version<\/span><\/strong><\/td>\n<td style=\"border-bottom-width:1px;border-bottom-style:hidden;border-bottom-color:#000000\" align=\"left\" bgcolor=\"#969696\"><strong><span style=\"font-size:xx-small\">Vintage<\/span><\/strong><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96408<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ACCRETECH<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">SA2400<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">METRO<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.12.2006<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96409<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ACCRETECH<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">SA2500<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">METRO<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.03.2008<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96410<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ADVANTEST<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">T5371<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Memory Tester<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2001<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96411<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ADVANTEST<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">T5371<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Tester<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.04.2000<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96412<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Applied Materials<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">DPS<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Polysilicon Etch<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.05.2005<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96413<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Applied Materials<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">DPS G5<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Polysilicon Etch<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.05.2005<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96414<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Applied Materials<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">DPS G5<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Polysilicon Etch<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2010<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96415<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Applied Materials<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">DPS G5<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Polysilicon Etch<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.07.2006<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96416<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Applied Materials<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">DPS G5 MESA<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Polysilicon Etch<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.02.2013<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96417<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Applied Materials<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ENABLER E2<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Dielectric Etch Process<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.11.2009<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96418<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Applied Materials<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ENABLER E5<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Oxide Etcher<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.11.2010<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96419<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Applied Materials<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ENDURA2<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">PVD Sputter<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.10.2010<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96420<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Applied Materials<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">P5000<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Multi Chamber CVD and Etch System<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.10.1995<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96421<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Applied Materials<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">PRODUCER SE<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">PECVD<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.08.2006<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96422<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Applied Materials<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">PRODUCER SE<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">PECVD<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.08.2006<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96423<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Applied Materials<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">PRODUCER SE<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">PECVD<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.07.2004<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96424<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Applied Materials<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">PRODUCER GT<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">PECVD<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.01.2009<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96425<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Applied Materials<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">RADIANCE<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">RTP System<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.05.2003<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96426<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Applied Materials<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">RADIANCE<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">RTP System<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.05.2003<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96427<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Applied Materials<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ULTIMA X<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">HDP CVD Oxide Deposition<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.09.2005<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96428<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Applied Materials<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ULTIMA X<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">HDP CVD Oxide Deposition<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.08.2006<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96429<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Applied Materials<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ULTIMA X<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">HDP CVD Oxide Deposition<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.07.2004<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96430<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Applied Materials<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">UVISION7<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Brightfield Inspection<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.09.2011<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96431<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Applied Materials<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">P5000<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Multi Chamber CVD and Etch System<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">200mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.11.1995<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96432<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ASM<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">MIR3000<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ALD Oxide<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.02.2013<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96433<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ASM<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">MIR3000<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ALD Oxide<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.03.2011<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96434<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ASM<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">MIR3000<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ALD Oxide<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2013<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96435<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ASM<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">MIR3000<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ALD Oxide<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2013<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96436<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ASML<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">AT850C<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Twin Scan Lithography System<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.07.2004<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96437<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ASML<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">AT850C<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Twin Scan Lithography System<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.07.2004<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96438<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ASML<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">AT850C<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Twin Scan Lithography System<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2003<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96439<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">AXCELIS<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">OPTIMA HD<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Medium Current Implanter<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.07.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96440<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">AXCELIS<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">PARADIGM XE<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">High Energy Implanter<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.03.2005<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96441<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">AXCELIS<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">PARADIGM XE<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">High Energy Implanter<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.09.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96442<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">AXCELIS<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">PS3<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">UV Cure<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.07.2004<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96443<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">BRUKER<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">JVX6200<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">X-Ray Reflectometer<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.11.2010<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96444<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">CANON<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">5500 IZ<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">I-Line Stepper<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.10.2003<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96445<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">CANON<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ES6A<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">KrF Scanner<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.04.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96446<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">DNS<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">80B<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Coater\/Developer System<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.10.1995<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96447<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">EBARA<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">FREX200<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Oxide CMP System<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">200mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.07.2003<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96448<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">GENUS<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">LYNX3<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">CVD<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.11.2012<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96449<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">GSI<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">INM300<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Laser Metrology System<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">200mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.03.2005<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96450<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">HIKE<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">DJ1206VN<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Diffusion Furnace<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.09.2004<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96451<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">HIKE<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">DJ1223VN CX3<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Diffusion Furnace<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.08.2004<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96452<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">HIKE<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">DJ1223VN CX3<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Diffusion Furnace<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.10.2003<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96453<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">HIKE<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">DJ1223VN CX3<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Diffusion Furnace<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.09.2003<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96454<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">HITACHI<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">I6300<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Defect Inspection and Review System<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.02.2006<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96455<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">HITACHI<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">S9380-2<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">CD SEM<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.05.2013<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96456<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">KLA-Tencor<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ARCHER10XT<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Overlay Measurement<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.11.2003<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96457<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">KLA-Tencor<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ARCHER10XT-PLUS<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Overlay Measurement<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.09.2006<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96458<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">KLA-Tencor<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">DISCOVERY3<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Defect Inspection and Review System<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.07.2011<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96459<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">KLA-Tencor<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">SFX100<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Surface film measurement system<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.07.2004<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96460<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">KLA-Tencor<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">P2H<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Profileometer<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.05.1992<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96461<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">LAM Research<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">2300FLEX45<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Dielectric Etch Process<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.07.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96462<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">LAM Research<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">2300FLEX45<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Dry Etch<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.11.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96463<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">LAM Research<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">2300FLEX45<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Dry Etch<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.12.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96464<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">LAM Research<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">2300FLEX45<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Dry Etch<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.12.2008<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96465<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">LAM Research<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">2300FLEX45<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Dry Etch<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.08.2013<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96466<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">LAM Research<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">2300FLEX45<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Dry Etch<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.09.2013<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96467<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">LAM Research<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">2300KIYO45<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Dry Etch<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.01.2011<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96468<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">LAM Research<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">2300KIYO45<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Dry Etch<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.01.2011<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96469<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">LAM Research<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">2300KIYO45<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Dry Etch<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.09.2010<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96470<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">LAM Research<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">2300KIYO45<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Dry Etch<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.05.2013<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96471<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">LAM Research<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ALTUS<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Tungsten CVD<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.09.2001<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96472<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">LAM Research<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">FLEX GX E6<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Dielectric Etch Process<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.11.2008<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96473<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">LAM Research<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">FLEX GX E6<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Dielectric Etch Process<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.11.2008<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96474<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">LAM Research<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">TORUS300S<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Plasma etcher<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.10.2010<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96475<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">LAM Research<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">VECTOR-EXTREME<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">PECVD<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.07.2010<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96476<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">MATTSON<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">HELIOS<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">RTP System<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2006<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96477<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">MATTSON<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">HELIOS<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">RTP System<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.12.2006<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96478<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">MATTSON<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">HELIOS<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">RTP System<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.10.2006<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96479<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">MATTSON<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">HELIOS<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">RTP System<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.07.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96480<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">MATTSON<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">PARADIGME SI<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Light Etch<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.05.2011<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96481<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">MATTSON<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">PARADIGME SI<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Light Etch<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.03.2011<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96482<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">MATTSON<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">SUPREMA<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Plasma Dry Strip<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.10.2011<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96483<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">MATTSON<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">SUPREMA IM<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Plasma Dry Strip<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.05.2012<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96484<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">MATTSON<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">SUPREMA IM<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Plasma Dry Strip<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.09.2011<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96485<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">MATTSON<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">SUPREMA IM<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Plasma Dry Strip<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.12.2011<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96486<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">MATTSON<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">SUPREMA IM<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Plasma Dry Strip<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2012<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96487<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">MATTSON<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">SUPREMA IM<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Plasma Dry Strip<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2012<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96488<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">MATTSON<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">SUPREMA IM<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Plasma Dry Strip<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2012<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96489<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">NANOMETRICS<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ATLAS<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Overlay Measurement<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">200mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.03.2005<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96490<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">NANOMETRICS<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ATLAS<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Overlay Measurement<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.10.2004<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96491<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">NANOMETRICS<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">CALIPER-ELAN ULTRA<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Overlay Measurement<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.08.2006<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96492<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">NANOMETRICS<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">CALIPER-ELAN<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Overlay Measurement<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2005<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96493<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">NANOMETRICS<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">CALIPER-ELAN<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Overlay Measurement<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2005<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96494<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">NGR<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">NGR2150<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">E-beam Wafer Inspection System<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.03.2010<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96495<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">NIKON<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">2205I11D<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">I-Line Stepper<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">200mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.10.1995<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96496<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">NIKON<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">SF100<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">I-line wafer scanner<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.05.2001<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96497<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">NIKON<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">SF120<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">I-line wafer scanner<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96498<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">NOVELLUS<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">GAMMA EXPRESS<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Asher\/Stripper<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.07.2004<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96499<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">NOVELLUS<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">L3500<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Asher\/Stripper<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">200mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.10.1995<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96500<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">NOVELLUS<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">L3500<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Asher\/Stripper<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.02.1996<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96501<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">NOVELLUS<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">VECTOR<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">PECVD<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.09.2012<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96502<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">PSK<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">SUPRA3<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Asher\/Stripper<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.11.2006<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96503<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">PSK<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">TERA21<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Asher\/Stripper<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2004<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96504<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">PSK<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">TERA21<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Asher\/Stripper<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.11.2004<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96505<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">PSK<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">TERA21<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Asher\/Stripper<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.07.2005<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96512<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">RUDOLPH<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">WS2500<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Wafer Inspection System<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.09.2003<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96513<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">RUDOLPH<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">WS2500<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Wafer Inspection System<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">200mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2003<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96506<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">RUDOLPH<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">AXI-S<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Macro Wafer Inspection<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.03.2004<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96507<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">RUDOLPH<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">MP1-300<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Film thickness measurement<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.01.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96508<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">RUDOLPH<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">S3000A<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Ellipsometer<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.05.2012<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96509<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">RUDOLPH<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">S3000A<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Ellipsometer<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2012<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96510<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">RUDOLPH<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">WS2500<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Wafer Inspection System<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.08.2002<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96511<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">RUDOLPH<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">WS2500<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Wafer Inspection System<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">200mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.03.2006<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96514<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">TEL Tokyo Electron<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">A303I<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Diffusion Furnace<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.10.2003<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96515<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">TEL Tokyo Electron<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ACT12<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Photoresist coater and developer track<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.03.2004<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96516<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">TEL Tokyo Electron<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">CERTAS<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Single wafer Dry Cleaning System<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.11.2008<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96517<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">TEL Tokyo Electron<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">INDY<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Diffusion Furnace<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.11.2004<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96518<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">TEL Tokyo Electron<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">INDY<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Diffusion Furnace<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.02.2010<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96519<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">TEL Tokyo Electron<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">INDY<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Diffusion Furnace<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.10.2006<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96520<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">TEL Tokyo Electron<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">INDY<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Diffusion Furnace<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.03.2010<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96521<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">TEL Tokyo Electron<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">LITHIUS<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Lithography Coater\/Developer<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.07.2008<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96522<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">TEL Tokyo Electron<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">SCCM SHIN<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Oxide Etcher<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.03.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96523<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">TEL Tokyo Electron<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">TACTRAS VIGUS0<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Deep Etch Cluster Tool<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2010<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96524<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">TEL Tokyo Electron<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">TRIAS HIGH K<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Diffusion Furnace<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.05.2011<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96525<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">TEL Tokyo Electron<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">TRIAS-EX2<\/span><\/td>\n<td style=\"outline:red dotted 1px\" align=\"left\"><span style=\"font-size:xx-small\">Metal CVD<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.03.2014<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96526<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">TEL Tokyo Electron<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">VESTA<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Plasma Etch System<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.02.2011<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96527<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">TERA SEMICON<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">TERA300CA<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Diffusion Furnace<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.05.2012<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96528<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">TES<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">CHALLENGER HT PLUS<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">CVD<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.12.2013<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96529<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">WONIK IPS<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">MAHA<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">CVD<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.07.2013<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96530<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">WONIK IPS<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">AKRA<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Metal CVD<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.01.2014<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96531<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">WONIK IPS<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">AKRA<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Metal CVD<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.09.2010<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">96532<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">WONIK IPS<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">AKRA<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Metal CVD<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.10.2010<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">96533<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">WONIK IPS<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">MAHA SP<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">CVD<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">300mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.09.2011<br><br><\/span><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n\n\n\n<p> Finally for this month, here follows the list of all the equipment owned by SDI_Fabsurplus which we currently have for sale:- <\/p>\n\n\n\n<table border=\"0\" cellspacing=\"0\"><colgroup width=\"44\"><\/colgroup><colgroup width=\"136\"><\/colgroup><colgroup width=\"200\"><\/colgroup><colgroup width=\"316\"><\/colgroup><colgroup width=\"36\"><\/colgroup><colgroup width=\"94\"><\/colgroup><colgroup width=\"88\"><\/colgroup>\n<tbody>\n<tr>\n<td style=\"border-bottom-width:1px;border-bottom-style:hidden;border-bottom-color:#000000\" align=\"left\" bgcolor=\"#969696\" height=\"20\"><strong><span style=\"font-size:xx-small\">SDI ID<\/span><\/strong><\/td>\n<td style=\"border-bottom-width:1px;border-bottom-style:hidden;border-bottom-color:#000000\" align=\"left\" bgcolor=\"#969696\"><strong><span style=\"font-size:xx-small\">Manufacturer<\/span><\/strong><\/td>\n<td style=\"border-bottom-width:1px;border-bottom-style:hidden;border-bottom-color:#000000\" align=\"left\" bgcolor=\"#969696\"><strong><span style=\"font-size:xx-small\">Model<\/span><\/strong><\/td>\n<td style=\"border-bottom-width:1px;border-bottom-style:hidden;border-bottom-color:#000000\" align=\"left\" bgcolor=\"#969696\"><strong><span style=\"font-size:xx-small\">Description<\/span><\/strong><\/td>\n<td style=\"border-bottom-width:1px;border-bottom-style:hidden;border-bottom-color:#000000\" align=\"left\" bgcolor=\"#969696\"><strong><span style=\"font-size:xx-small\">Qty.<\/span><\/strong><\/td>\n<td style=\"border-bottom-width:1px;border-bottom-style:hidden;border-bottom-color:#000000\" align=\"left\" bgcolor=\"#969696\"><strong><span style=\"font-size:xx-small\">Version<\/span><\/strong><\/td>\n<td style=\"border-bottom-width:1px;border-bottom-style:hidden;border-bottom-color:#000000\" align=\"left\" bgcolor=\"#969696\"><strong><span style=\"font-size:xx-small\">Vintage<\/span><\/strong><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">54226<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Accretech TSK<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">MHF300L<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Test head manipulators<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.1999<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">95398<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Accretech TSK<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">MHF300L<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Test head manipulators<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.1999<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">95399<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Accretech TSK<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">MHF300L<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Test head manipulators<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.1999<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">95400<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Accretech TSK<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">MHF300L<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Test head manipulators<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.1999<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">95401<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Accretech TSK<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">MHF300L<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Test head manipulators<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.1999<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">95402<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Accretech TSK<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">MHF300L<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Test head manipulators<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.1999<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">95403<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Accretech TSK<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">MHF300L<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Test head manipulators<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.1999<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">76604<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ADVANTEST<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">TR6846<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Digital Multimeter<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">78639<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Advantest<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">T5335P (Spares)<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Spare Boards from test system (See attached list for details)<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">TEST<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.12.1997<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">87652<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Advantest<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">T5371<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Test system (With a single test head )<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Test<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">89909<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Advantest<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Hifix for PQFP80 (14 x 20)<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Hi-fix for Advantest T5371 package type PQFP80 (14 x 20)<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Spares<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2005<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">92009<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Advantest<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">T5335P<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Boards from an Advantest T5335P Test system<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">18<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">spares<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">76605<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Agilent<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">41501B<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">SMU and PGU 2 units<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2001<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">79588<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Agilent<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1671G<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Logic Analyzer<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">test<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.10.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">79589<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Agilent<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1671G<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Logic Analyzer<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">test<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.10.2008<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">2669<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ANGELANTONI<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">T600 TU5<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">BAKE OVEN<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">FACILITIES<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.08.1995<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">10637<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Angelantoni<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">T600 TUS<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Clean Room Oven<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">FACILITIES<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.1995<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">34740<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">AP &amp; S<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">TwinStep-B H3P04<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Semi-Automatic H3PO4 2 stage Megasonic QDR<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.11.2005<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">3419<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Applied Materials<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">P5000<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">CVD System, 2 Chamber TEOS Oxide CVD<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200 MM<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.01.1994<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">11568<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Applied Materials<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">0020-0323 REV H<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Heat Exchanger<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">FACILITIES<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">83514<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Applied Materials<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Opal 7830i Enhanced<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">CD-SEM<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.1997<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">84765<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Asyst<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1150-V1315S<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">SMIF Load port 150mm<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">150 MM<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">95404<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Asyst<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1150-V1315S<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">SMIF Load port 150mm<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">150 MM<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">54859<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Baccini<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">35MW Solar Cell Line<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Solar Cell Print line for Mono or Poly Crystalline Solar Cells<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">156 mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.12.2005<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">77009<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Baccini<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Screen Printer 2<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">screen printer<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">156 mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2001<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">77010<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Baccini<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Screen Printer 3<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">screen printer<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">156 mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.11.2001<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">77013<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Baccini<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">CHIP AND CRACK CAMERA<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Chip and Crack camera<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">156 mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">77017<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Baccini<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Cell electrical tester<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Electrical Cell tester<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">156 mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2006<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">77021<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Baccini<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Dryer 1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Dryer 1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">156 mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.11.2001<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">77022<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Baccini<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Dryer 2<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Dryer 1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">156 mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.11.2001<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">52164<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Canon<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">FPA 3000 (Spares)<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ALS System for FPA 3000 series<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">spares<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.07.1999<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">68025<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Canon<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">FPA 5000 ES2+<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">248 nm lithography exposure system<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">200 mm (300 mm also possible with conversion kit)<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2000<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">56140<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">CentroTherm<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">DO 12.000-200-FF-HTO-CAN-NT4.0<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Fast Firing Funace with Dryer<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">156mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2001<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">56144<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Centrotherm<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Centronic E2000<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Horizontal diffusion furnace for POCl3 doping<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">156 mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2003<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">80083<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">COLUSSI<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">UG 50 E<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">AUTOCLAVE FOR STERILIZATION<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Laboratory<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2000<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">78638<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Credence<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Duo SX (Spare Parts)<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">SPARE PARTS FROM AUTOMATED TEST SYSTEM<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">test<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">87089<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Credence<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Personal Kalos I<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Test system<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">TEST<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.11.2002<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">79586<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">DATA IO<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">UNISITE 68<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">EPROM PROGRAMMER WITH USPIN 84<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">test<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2005<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">77666<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Digital Analysis<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">PH10 Adjustment system<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">PH Adjustment system<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">79394<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Ebara<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">A30W<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Vacuum Pump<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Pump<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">79395<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Ebara<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">A30W<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Vacuum Pump<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Pump<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">89967<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Ebara<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ET300WS<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Turbo pump<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Pump<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.1997<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">95410<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Ebara<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">305W<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Turbo pump controller<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Pump<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.1996<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">95411<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Ebara<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">305W<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Turbo pump controller<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Pump<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.1996<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">95413<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Ebara<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ET300WS<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Turbo pump<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Pump<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.1997<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">95414<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Ebara<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ET300WS<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Turbo pump<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Pump<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.1997<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">95415<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Ebara<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ET300WS<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Turbo pump<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Pump<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.1997<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">95416<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Ebara<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ET300WS<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Turbo pump<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Pump<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.1997<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">95417<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Ebara<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ET300WS<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Turbo pump<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Pump<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.1997<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">95418<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Ebara<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ET300WS<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Turbo pump<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Pump<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.1997<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">95419<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Ebara<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">306W<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Turbo pump controller<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Pump<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.1997<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">95420<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Ebara<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">306W<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Turbo pump controller<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Pump<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.1997<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">95421<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Ebara<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">305W<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Turbo pump controller<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Pump<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.1997<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">80052<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">EDA Industries<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">PCBA 05568 REV 1.3<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Pattern test Driver module for BIB oven with 3 x PSU<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Reliability<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">54214<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Edwards<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">iQDP80 \/ QMB1200<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Dry Vacuum Pump combo<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">pump<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2000<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">54216<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Edwards<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">iQDP80 \/ QMB1200<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Dry Vacuum Pump combo<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">pump<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2000<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">54217<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Edwards<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">iQDP80 \/ QMB1200<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Dry Vacuum Pump combo<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">pump<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.04.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">54218<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Edwards<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">iQDP80 \/ QMB1200<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Dry Vacuum Pump combo<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">pump<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.04.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">54219<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Edwards<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">iQDP80 \/ QMB1200<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Dry Vacuum Pump combo<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">pump<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.04.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">54220<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Edwards<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">QDP80 + QMB 250F<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Dry Vacuum Pump combo<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">pump<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2000<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">54221<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Edwards<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">QDP80 + QMB 250F<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Dry Vacuum Pump combo<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">pump<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2000<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">54222<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Edwards<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">QDP80<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Dry Vacuum Pump<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">pump<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2000<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">54524<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Edwards<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">iQDP80<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Dry Vacuum Pump<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">pump<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.01.2000<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">81822<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Edwards<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">E2M40 FSPX<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Rotary Vacuum Pump with oil filter<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Pump<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.1989<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">89969<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Edwards<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">D150<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Dual GRC unit<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Facilities<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.1996<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">95412<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Edwards<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">D150<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Dual GRC unit<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Facilities<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.1996<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">95559<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Edwards<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">iQDP40<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Dry Mechanical Pump<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Pump<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2000<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">95560<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Edwards<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">iQDP80<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Dry Mechanical Pump<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Pump<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2000<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">78132<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Electroglas<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Horizon 4085X<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Prober with an inker<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.02.1998<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">92047<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ELES<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ART 200<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Burn In Board testing system<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Reliability<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2011<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">79596<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Elind<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">KL 1200W<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Laboratory Power supply<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">8<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Electronics Test and Measurement<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2000<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">79885<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Elind<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">3232<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">power supply 0-3,2A current adj &#8211; 0 &#8211; 32 V voltage adj<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Electronics Test and Measurement<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">79887<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">elind<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">328<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">power supply 0-0,8A current adj &#8211; 0 &#8211; 32 V voltage adj<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Lab Equipment<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.1995<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">83513<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Entegris<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">RSPX-EUV-036<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">EUV Reticle stocker<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Facilities<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.08.2010<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">83739<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ESI<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">44<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">LASER TRIMMER SPARE PARTS<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">SPARES<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">83515<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Extraction Systems<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">TMB 150<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Photoresist Contamination Monitor System \/ Total Amine Analyzer<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Facilities<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2004<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">1557<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">FORTREND<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">F6000QS<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">6 INCH WAFER TRANSFER<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">6 INCH<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.1992<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">95405<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Fortrend<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">F6000QS<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">6 INCH WAFER TRANSFER<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">6 INCH<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.1992<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">83516<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">FSI<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Polaris 3500 (Spares)<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Spares for DUV photoresist coater \/ developer track<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">spares<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2000<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">79600<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Gigi Molina Brevetti Plastici SpA<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Custom<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Manual wet hood<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">UP TO 200 mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2000<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">95406<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Gigi Molina Brevetti Plastici SpA<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Custom<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Manual wet hood<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">UP TO 200 mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2000<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">95407<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Gigi Molina Brevetti Plastici SpA<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Custom<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Manual wet bench<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">UP TO 200 mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2000<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">76735<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">GL Automation<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">IDSCOPE<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Wafer bar code reader<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.07.2004<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">76736<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">GL Automation<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">IDSCOPE<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Wafer bar code reader<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.07.2004<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">76737<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">GL Automation<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">IDSCOPE<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Wafer bar code reader<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.07.2004<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">76738<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">GL Automation<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">IDSCOPE<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Wafer bar code reader<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.07.2004<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">76739<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">GL Automation<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">IDSCOPE<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Wafer bar code reader<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.09.2004<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">79892<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Gossen Konstanter<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">IEC625<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Power supply Gossen Konstanter UOP<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Electronics Test and Measurement<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">71907<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Hamamatsu<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">C7103<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">PC Controlled IC Back-side Lapping and Wafer Grinding System<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200 mm and packages<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.10.2001<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">36259<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">HITACHI<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">S-9300<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">SEM &#8211; CD (CRITICAL DIMENSION)<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2005<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">95722<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">HITACHI<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">S9300<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">SEM &#8211; CD (CRITICAL DIMENSION)<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">300 mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2005<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">56141<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Innolas<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ILS 700P<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Laser Edge Isolation<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">156mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2005<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">56310<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Jonas and Redmann<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Q2 WHD A<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Loader for Centrotherm E2000 furnace<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">156 mm and 125 mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2003<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">79595<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">K Tech Engineering<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">BK04A<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Blister tape applicator for microelectronic components<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Assembly<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2010<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">76802<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">KEITHLEY<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">487<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">PICO AMMETER<span>&nbsp;<\/span><\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Electronics Test and Measurement<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">90664<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">KLA-TENCOR <\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Candela CS20<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Wafer Inspection System<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.12.2006<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">1680<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">KLA-TENCOR<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">2132<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">bright-field WAFER INSPECTION<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.08.1995<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">71632<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">KLA-TENCOR<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">2122<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">WAFER DEFECT INSPECTION<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">76682<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">KLA-TENCOR<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">AIT UV<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Dark field wafer particle inspection system<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.10.2003<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">2873<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">LAM RESEARCH<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">4520 (spares)<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">REMOTE CART<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">FACILITIES<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.01.1995<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">95408<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">LAM RESEARCH \/ONTRACK<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">4520 (spares)<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">REMOTE CART<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">FACILITIES<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.01.1995<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">15066<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">LAMBDA PHYSIK<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Novaline K2005<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">EXCIMER LASER<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">facilities<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.07.2002<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">33542<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Liebherr<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">FKV 3610<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Fridge for photoresist<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">facilities<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">79571<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Mazzali<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Climatest C320G5<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Temperature and humidity testing chamber<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Reliability<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.1993<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">79572<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Mazzali<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Climatest C320G5<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Temperature and humidity testing chamber<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Reliability<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.1993<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">80038<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">MDA Scientific<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">System 16<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Toxic Gas Monitor<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.07.2001<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">4007<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">MDC (Materials Development Corp.)<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">DUO CHUCK CSM16<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">CV Measurement system<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">150 mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.1995<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">71902<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Microcontrol<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">MWE Plus<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">UV Wafer Eraser with cassette loading<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">200 mm , 150 mm, 125 mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2000<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">79592<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Minato Electronics<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1940<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">EPROM Programmer with additional memory<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Electronics Test and Measurement<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">79593<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Minato Electronics<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1940<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">EPROM Programmer<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Electronics Test and Measurement<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2005<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">72156<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">MRL<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Black Max<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Black max heater element, 850 celcius<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Spares<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.12.2006<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">77665<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Neslab<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">HX-2000<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">75 KW Recirculating Chiller<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">chiller<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.09.2001<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">71760<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Oxford Plasma Technology<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">DP80<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">PE CVD<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.12.1989<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">31246<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">PMS<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Liquitrack 776200<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Non volatile residual Monitor<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">facilities<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.11.1999<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">54210<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Poly Design Inc.<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Custom<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Heated Quartz Boat storage \/ drying system<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2005<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">77670<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Rasco<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">BCU-750<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Brine Chiller<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">57773<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Rena<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Etcher<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">In-Line Etching System<span>&nbsp;<\/span><\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Solar<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2005<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">53053<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Rorze<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">RR04L90<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Robot<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">spares<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.07.1995<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">56813<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Roth &amp; Rau<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">SiNA Plus<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">PECVD &#8211; Deposition of Silicon Nitride<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">156 mm SQUARE\/125 MM<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2005<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">76973<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Roth &amp; Rau<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Chiller<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Chiller<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2005<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">79602<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Salon Teknopaja OY<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">PWB<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Printed Wire Board Level Drop Tester with Solder Joint Reliability tester<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">SMT<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2004<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">79889<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Sanitas EG<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Multilevel<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">EPROM Programmer<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Electronics Test and Measurement<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">86303<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Sankei Giken<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">TCW-12000 CV<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Process Module Chiller<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Facilities<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.08.1996<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">69878<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">SEIKO SEIKI<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">STP 1000C<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">TURBO PUMP TMP 100C 250 ISO-K\/KF40<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">VACUUM PUMP<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.11.1999<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">20268<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">SEKISUI<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">VANTEC SIGMA 200 K1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Antistatic 200 MM Wafer shipping box<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">9500<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.07.2006<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">54208<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Seminet<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Infinity SACS 251216-120-CE<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Semi-Automatic Carousel Boxed Reticle Stocker<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">facilities<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.11.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">84342<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Semitool<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ST-921R-AA<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Spin Rinse Dryer<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">84351<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Semitool<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ST-240<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Spin Rinse Dryer<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">84364<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Semitool<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">PA7230M<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">SRD Rotor<span>&nbsp;<\/span><\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\">&nbsp;<\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">84365<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Semitool<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">A72-20M<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">SRD Rotor<span>&nbsp;<\/span><\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\">&nbsp;<\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">76610<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">SHOWA<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">341<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Laboratory Power Supply &#8211; 4 channel<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.1998<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">76611<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">SHOWA ELECTRONICS<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">511-16<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">REGURATED DC POWER SUPPLY<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">laboratory<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">87607<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">SMC<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">INR-341-59A<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">DUAL CHILLER<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Facilities<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.05.1996<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">89968<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">SMC<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">INR-341-61A<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Triple Loop Chiller<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Facilities<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">73208<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Solitec<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">5110<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Spin Coater<span>&nbsp;<\/span><\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">3 to 6 inch<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.10.1998<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">83505<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">SORENSEN<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">220 VOLTS<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">POWER SUPPLY<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">3<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">220 VOLTS<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.12.1994<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">71904<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ST Automation<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">test head<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">test head for Eprom U 1835<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">71908<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ST Automation<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">PTM1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Flash Memory Tester<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">3<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Test<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">71910<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ST Automation<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">MT32<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Flash Memory Test System<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">TEST<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2008<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">78133<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ST Automation<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">QT200<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Test System<span>&nbsp;<\/span><\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">test<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">78137<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ST Automation<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">QT200<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Tester System with monitor<span>&nbsp;<\/span><\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">test<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">78138<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ST Automation<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">R.S.V.<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ST Memory Test System Electronic Automation<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">test<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.04.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">80177<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ST Automation<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">QT200<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Automated Tester System with monitor<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">test<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.10.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">80178<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ST Automation<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">QT200<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Automated Tester System with monitor<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">test<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.10.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">80179<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ST Automation<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">QT200<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Automated Tester System with monitor<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">test<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.10.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">80180<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ST Automation<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">QT200<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Automated Tester System with monitor<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">test<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.10.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">80181<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ST Automation<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">QT200<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Automated Tester System with monitor<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">test<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.10.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">80182<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ST Automation<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">QT200<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Automated Tester System with monitor<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">test<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.10.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">80183<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ST Automation<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">QT200<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Automated Tester System with monitor<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">test<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.10.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">80184<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ST Automation<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">QT200<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Automated Tester System with monitor<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">test<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.10.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">86281<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ST Automation<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">QT200 (spares)<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">boards from qt 200 test system &#8211; see attached list<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Spare Parts<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">95233<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ST Automation<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">MT 32 SX<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Fully Automated Memory Test System for BIST and NAND Memories<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">TEST<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.12.2005<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">79584<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">STS<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">320 PC<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Reactive Ion Etcher<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.1995<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">33413<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">SYNAX<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">SX3100<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Handler Ambient\/Hot<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">test<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2006<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">33414<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">SYNAX<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">SX3100<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Handler<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">test<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2006<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">79888<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">System General<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">T9600<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Universal Device Programmer<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Electronics Test and Measurement<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2003<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">78136<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Sytrama<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">MTM 32 V01<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">ST Test Head Manipulator QT 124<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.12.2005<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">80089<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Sytrama<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">MTM 32 V01<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">ST Test Head Manipulator QT 124<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.12.2005<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">76613<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Tektronix<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">TDS694C<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Digital 3 GHz real-time oscilloscope<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Electronics Test and Measurement<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.08.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">79590<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Tektronix<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">TDS 544A<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Color 4 channel digitizing oscilloscope<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Electronics Test and Measurement<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.2006<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">79597<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Tektronix<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">PS 280<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">DC Power supply<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Electronics Test and Measurement<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2007<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">79599<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Tektronix<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">11801C<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Digital Sampling Oscilloscope<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Electronics Test and Measurement<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.02.2001<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">79601<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Tektronix<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">2432A<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Digital Oscilloscope, 2 channel, with GPIB<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Electronics Test and Measurement<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">&nbsp;<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">2181<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">TEL TOKYO ELECTRON<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">TE 5480<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Nitride Plasma Reactive Ion Etch<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">150 mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.12.1992<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">21064<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">TEL TOKYO ELECTRON<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">MB2 730 HT HT<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">CVD SYSTEM, 2 CHAMBER WSi Process<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.09.1996<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">21270<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">TEL TOKYO ELECTRON<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">MB2 730HT<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">CVD SYSTEM, 3 CHAMBER WSi Process<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">200 mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.09.1996<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">78124<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">TEL TOKYO ELECTRON<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">P8<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Wafer Prober<span>&nbsp;<\/span><\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">200 MM<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.09.1996<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">78131<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">TEL TOKYO ELECTRON<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">P8XL<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Fully Automatic Wafer Prober (Gold Chuck)<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">200 MM<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.09.2000<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">54232<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Teradyne<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">J994<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Memory Tester<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">test<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2000<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">78361<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Teradyne<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">J971SP (Spares)<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Boards from VLSI test system<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Test<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.02.1997<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">87615<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">United Detector Technology, Inc.<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">40X<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Laser Power Meter<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Test<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.1992<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">84082<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Varian<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Turbo-V 250 MacroTorr<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Turbo Pump DN ISO 100 Type<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Pump<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.1999<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">92468<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Varian<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">E11040440 Rev 7<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Secondary workstation for implanter<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Spares<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.08.1995<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">95409<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Varian<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Turbo-V 250 MacroTorr<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Turbo Pump DN ISO 100 Type<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Pump<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.1999<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">87651<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Verigy \/ Agilent<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">V6000e<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Test system<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Test<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.2008<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">15619<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">VERTEQ<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">FLUOROCARBON RD4500 CLASSIC<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">SRD<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">2<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">100 mm<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.05.1986<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" bgcolor=\"#C0C0C0\" height=\"20\"><span style=\"font-size:xx-small\">79594<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Vision Engineering<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Dynascope<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Inspection Microscope<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">Assembly<\/span><\/td>\n<td align=\"right\" bgcolor=\"#C0C0C0\"><span style=\"font-size:xx-small\">01.06.1995<\/span><\/td>\n<\/tr>\n<tr>\n<td align=\"left\" height=\"20\"><span style=\"font-size:xx-small\">80238<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Weiss<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">TS130<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Thermal shock testing chamber<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">1<\/span><\/td>\n<td align=\"left\"><span style=\"font-size:xx-small\">Reliability<\/span><\/td>\n<td align=\"right\"><span style=\"font-size:xx-small\">01.06.1995<\/span><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n\n\n\n<h3 class=\"wp-block-heading\"> Wanted Items:-&nbsp;<\/h3>\n\n\n\n<p>-ASML 1900i immersion scanner<\/p>\n\n\n\n<p>-Biorad QS 500<\/p>\n\n\n\n<p>-KLA-Tencor RS 75<\/p>\n\n\n\n<p>-Whole TFT line for Glass Size 1100 x 1250 mm&nbsp;<\/p>\n\n\n\n<p>Yours sincerely,&nbsp;<\/p>\n\n\n\n<p>SDI Fabsurplus Group&nbsp;<\/p>\n\n\n\n<p>Stephen Howe<\/p>\n\n\n\n<p>Company Owner<\/p>\n\n\n\n<p>email:&nbsp;<a rel=\"noreferrer noopener\" href=\"mailto:info@fabsurplus.com\" target=\"_blank\">info@fabsurplus.com<\/a><\/p>\n\n\n\n<p>Mobile (USA) : +1 830-388-1071<\/p>\n\n\n\n<p>Mobile (Italy) : +39 335-710-7756<\/p>\n\n\n\n<p><a rel=\"noreferrer noopener\" href=\"http:\/\/www.fabsurplus.com\/\" target=\"_blank\">WWW.FABSURPLUS.COM<\/a>&nbsp;<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">FRAUD ALERT !<\/h3>\n\n\n\n<p>The strategically important semiconductor equipment sector is currently under attack by fraudsters.Many false and mis-spelled versions of common websites are being registered for use in&#8221;Business E-mail Compromise&#8221; schemes. False companies have been set up in all partsof the world, including the USA, to do wire fraud. Avoid e-mail fraud by defining an I.T.&nbsp;security policy and carefully monitoring any bank transfers for false information. Check any&nbsp;e-mails sent to you are legitimate by looking at the e-mail headers, and scan any attachments&nbsp;for viruses before opening them. <\/p>\n","protected":false},"excerpt":{"rendered":"<p>Dear Customers,&nbsp;This month we are featuring for sale the following items of semiconductor manufacturing equipment.By clicking the links shown below, you will be able to see the details about each item of equipment via our website. Applied Materials Centura DPS2 Advantedge Poly etcher, 4 CH , 300 mm, for sale @fabsurplus.com:- https:\/\/www.fabsurplus.com\/sdi_catalog\/salesItemDetails.do?id=95926 Applied Materials Centura [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":630,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"ngg_post_thumbnail":0},"categories":[1,16],"tags":[6,35],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v19.13 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Used Semiconductor Equipment for Sale 18th September 2019 - SDI Fabsurplus News<\/title>\n<meta name=\"description\" content=\"September 2019 featured list of used semiconductor equipment items for sale, including an updated list of items owned by SDI.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.fabsurplus.com\/blog\/september-2019-used-semiconductor-equipment-sale\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Used Semiconductor Equipment for Sale 18th September 2019 - 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