RENA
Machine Type:
Laboratory Etching System: Inline Etching Machine

2.4 Connection Data
2.4.1 Electrical Energy
Electrical operating voltage: 480V 3Ph+N+PE
Frequency: 60Hz
Control Voltage: 24V DC
Full power vurrent: 19 A
Add. suply-voltage: 110V/6A 60Hz 1PH+N+PE

2.4.2 Medias
DI-Water supply - cold
 - From Central Supply System
 - Connection: 32DN25, PP grey led to the back of the machine
 - Pressure: 4 bar
 - Temperature: 20 deg C
 - Max Flow: 0.7 Nm3/h
 - Aver Flow: 0.6 Nm3/h
 
 HF Supply
 - From central supply system into pump tank of the machine
 - Connection: 1/2" / 40DN32, PPgrey led to the back of the machine
 - Temperature: 20 deg C
 
 HNO3 supply
  - From central supply system into pump tank of the machine
  - Connection: 1/2" / 40DN32, PFA / PPgrey led to the back of the machine
  - Temperature: 20 deg C
  
  H2SO4 supply
  - From central supply system into pump tank of the machine
  - Connection: 1/2" / 40DN32, PFA /PPgrey led to the back of the machine
  - Temperature: 20 deg C
  
  2.4.3 Cooling water supply/return
  City water supply to Alkaline Clean (cooling water)
  - Connection: 20DN15, Pgrey led to the back of the machine
  - Temperature: 10 deg C
  - Max Flow: 0.6 Nm3/h
  
  City water return from Alkaline Clean (cooling water)
  - Connection: 20DN15, PPgrey led to the back of the machine
  - Temperature: >10 deg C
  
  2.4.4 Chiller supply/return
  City water supply for chiller (Cooling water)
  - Connection: 1/2" PVC, fabric tube led to the back side of chiller
  - Temperature: 10 deg C
  - Max Flow: 0.3 NM3/h
  
  City Water return for chiller (Cooling water)
  - Connection: 1/2" PVC, fabric tube led to the back side of the chiller
  - Temperature: approx. 35 deg C
  - Max Flow: 0.3 Nm3/h
  
  2.4.5 CDA (Clean Dry Air)
  Clean dry air for air knife and air pipes
  - Connection: 25DN20, PPgrey led to the back of the machine
  - Pressure: 6 bar
  - Temperature: 20 deg C
  - Max Flow: 108 Nm3/h
  - Aver. Flow: 81 NM3/h
  
  Clean Dry Air for valves and diaphgarm pumps
  - Connection: 1/2" SS Swagelok led to the back of the machine
  - Pressure: 6 bar
  - Temperature: 20 deg C
  - Max Flow: 50 NM3/h
  
  2.4.6 Exhaust
  Lead Exhause acidic from process area (NOx)
  - Connection: 3x ~90mm, PP grey
                1x ~63mm, PP grey
                led to the top of the machine
  - Max Flow: 390 Nm3/h
  
  Lead Exhause caustic from alkaline area (KOH)
  - Connection: 1 x ~90mm, PP grey
  led to the top of the machine
  - Max Flow: 178 Nm3/h
  
  Lead Exhaust acidic from HF/HCI area
  - Connection: 1x ~90mm, PPgrey led to the top of the machine
  - Max Flow: 189 NM3/h
  
  2.4.7 Drain
  Drain Acidic
  - Connection: 2x 1/2" / 40DN32, PFA / PP grey
    1 X from process bach (HF/HNO3/H2SO4)
    1 X from acidic bath (HF/HCL)
    each led to the back side of the machine
Drain Alkaline
- Connection: 1/2" / 40DN32, PFA /PPgrey
              From alkaline bath (KOH)
              led to the back side of the machine
              
Drain Rinse Water
- Connection: 32DN25, PPgrey
              from process bath (HF/HNO3/H2SO4 bath; diluted)
              from acidic bath (HF/HCL; diluted)
              from alkaline bath (KOH; diluted)
              led to the back side of the machine
              
2.5 Wafers and roller transport
Designed for square silicon wafers with the following dimensions:
- 210 mm X 210 mm +/- 0,5mm
2 transport lanes
- Working direction from the left to the right from the operator's point of view
- Transport rollers transport the wafers
- Downholder rollers hold down the wafers to avoid buoying upwards
- Distance between 2 rollers: 48mm
- With a gap of 15 mm between two wafers in transport direction
- transport velocity adjustable between 0.2 and 1.5 m/min
- Nominal speed 0.8 m/min for isotexturing and 0.4 m/min for edge isolation

2.6 Main measurement and weight
Dimensions (W x D x H)
Machine:
- Approx. 4752 mm x 1100 mm x 1800 mm (2055 mm including electrical cabinet)
- overall length with input and output station approx. 5336 mm
- transport height: 1000 mm +/- 15 mm
- grab height: approx 1120 mm
Electrical cabinet: 800 mm x 800 mm x 210 mm
- Integrated in the machine
Chiller UC060Tw-H: 550 mm x 1100 mm x 1265 mm

Weight
Machine(empty): approx. 1200 kg
Chiller: approx 180 kg net

2.7 availability
According to Semi E10,92
Up Time: >92%
MTBF: > 700h
MTTR: < 3 h
Telephone support:
Phone support < 12h 365 d/a
Service on site < 24h 365 d/a
Spare parts ex works <24h 365 d/a

2.8 Noise Level
Noise emission on working place: max 70DB (A)