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Applied Materials Reflexion LK Multi-Process CMP for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Applied Materials Reflexion LK Multi-Process CMP.
Please click on the "Send More Details" button at the end of the Reflexion LK description, if you'd like to get more details, photos and specifications of this Multi-Process CMP, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Applied Materials Reflexion LK Multi-Process CMP is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Applied Materials Reflexion LK Equipment Details

SDI ID: 100092
Manufacturer: Applied Materials
Model: Reflexion LK
Description: Multi-Process CMP
Version: 300mm
Vintage: 01.06.2004
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: 250,000 USD
Comments:

Configuration
Reflexion LK: 4 head, 3 platen polishing system. Dry in Dry out.
Polisher Skins: Clear P1, P2, P3, and P4: Non-4910 compliant.
Gap Wash: None
Load Cup Wafer Exchanger: Enhanced counter balance springs
Nova 3090 Ready: None
Monitor 1 Location: Cart
Monitor 2 Location: Integration in FI P4
Light Tower: Factory Interface and Polisher Sides

Factory Interface
E99 Carrier ID: Barcode reader
Frame Configuration: 4 wide
Load Ports: TDK
Load Port Operator Interface: STANDARD
Load Port Types: ENHANCED 25 WAFER FOUP
Operator Access Switch: Yes

Platen 1 & Platen 2 & Platen 3
Platen Type: STANDARD (<= 200 RPM)
Endpoint: Full Scan
Endpoint: Yes
High Pressure Rinse Flow Meter: 0-5 L/min
Rinse Arms: High Pressure/Flow
Flow Meter: 50-500 ml/min
Temperature Control: Platen Cooling Water

Polisher
Polishing Head: 5-Zone Contour
Cross Break: Yes
Pad Wafer Loss Sensor: DARK PAD SENSOR
InterPlaten Clean: NO
ISRM Laser Key Switch: NO
Slurry Delivery System: 4 x 12 CLC SDS
Head 1 Power Cable: 0150-16277
Head 2 Power Cable: 0150-16278
Head 3 Power Cable: 0150-16279
Head 4 Power Cable: 0150-16280
Head 1 Encoder Cable: 0150-16281
Head 2 Encoder Cable: 0150-16282
Head 3 Encoder Cable: 0150-16283
Head 4 Encoder Cable: 0150-16284
G4+ UPA: MKS
G4+ UPA: MKS

Cleaner Meg
MEGASONICS: Two chem direct feed mix
Transducer: Yes
Chemical 1: 1250 ml/min
Chemical 2: 1250 ml/min

Brush Box 1 & Brush Box 2
Brush LDM Type: One chem direct feed (FM)
Chemical 1: 1250 ml/min
Chemical 2: N/A
Brush Box Level Spacer: N/A
Brush Box Shaft: N/A
Toe In: N/A
Slow drain: N/A

Dryer Module
Dryer Type: SRD
Recovery Module: SRD
Output Station Dampner: SRD

Damage/Missing parts list
PN 0195-06126: MIRRA PLATEN, PNEUMATIC BOX ASSEMBLY, PCB ON LEFT- Qty1
PN 0190-14502: CARD VME MOTION CONTROLLER- Qty3
PN 0020-47330: CLAMP, DRIVE, 6-PORT SPINDLE, LK REFLEXION- Qty1
PN 0020-47048: BRACKET, COUPLING MT, 6-PORT HIGH SPEED SPINDLE, REFLEXIOIN- Qty1
PN 0190-53071: FLEXIBLE DISK ASSY, SPINDLE, 17-4PH SST BUSHING- Qty1
PN 0190-38324: MKS G4-PLUS-B 4-PORT UPA, 300MM REFLEXION LK- Qty5
PN 0190-14385: 8 PORT MANIFOLD, FACILITIES SLURRY/CHEMISTRY INPUT, 300MM- Qty1
PN 0010-23069: TOP COVER ASSEMBLY MEG 300MM- Qty1
PN 0010-26102: TOP COVER BRUSH MODULE 300MM- Qty1
PN 0010-27774: ASSEMBLY, BRUSH MODULE R1 300MM- Qty2
PN 1080-01243: MOTOR SGM SERVO 100W 200VAC W/INCR ENCODER & BRAKE- Qty1
PN 1080-00363: MOTOR SGM SERVO 100W ABS- Qty1
PN 0190-77587: SLURRY, PNEUMATIC BOX ASSEMBLY, 300MM- Qty1
PN 0100-00722: PCB ASSY, PORT SERVER DISTRIBUTION- Qty1
PN 0190-05731: DEVICENET INTFC CARD, 4-CHANNEL W/ V1.3 FIRMWARE- Qty1
PN 0100-01995: PCB ASSEMBLY, ANALOG I/O BOARD W/VAR. WD- Qty1

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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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