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MRL INDUSTRIES 1024 3-Tube Horizontal Diffusion Furnace for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used MRL INDUSTRIES 1024 3-Tube Horizontal Diffusion Furnace.
Please click on the "Get Quote" button at the end of the 1024 description, if you'd like to get a quotation, photos and specifications of this 3-Tube Horizontal Diffusion Furnace, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This MRL INDUSTRIES 1024 3-Tube Horizontal Diffusion Furnace is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


MRL INDUSTRIES 1024 Equipment Details

SDI ID: 10019
Manufacturer: MRL INDUSTRIES
Model: 1024
Description: 3-Tube Horizontal Diffusion Furnace
Version: 150 mm
Vintage: Inquire
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:
Process  Configured for 6" Wafers
Gas System   
  Gas Input Control  Mass Flow Controllers
  Process Gases  TCA, N2 & O2
Cantilever Loader  YES
 
 
Furnace Tube #2:
 
Process  Configured for 6" Wafers
Gas System 
  Gas Input Control  Mass Flow Controllers
  Process Gases  N2 & O2
Cantilever Loader  YES
 
 
Furnace Tube #3:
 
Process  Configured for 6" Wafers
Gas System 
  Gas Input Control  Mass Flow Controllers
  Process Gases  N2
Cantilever Loader  YES
 
 
Furnace Tube #4:
 
Cantilever Loader  YES
 
Gas Cabinet  YES
Maximum Temperature  1,200  ºC  (2,192 ºF, 1,473 ºK)
Number of Control Zones  3
Other Information 
    •  
    • Max Temperature 1200ºC
    • 3ea MRL “Black Max” #400-95705 Heating Elements with Spike Thermocouples
    • Furnace Tube 11.0” (i.d.) X 15.5” (o.d.) X 54” (l); 240V, 3 Ph, 22.1 KW
  • Load Zone – 16.0” (l); 10.5 KW
  • Center Zone – 20.0” (l); 6.3 KW
  • Source Zone – 8.0” (l); 5.3 KW
    • 3ea EUROTHERM Model FICS-11 Temperature Controllers
    • 3ea BURLING INSTRUMENTS Platinel II OTP Controllers
    • Miscellaneous Profile Thermocouples Available
    • MRL Automatic Loading Station with 3ea DIRECTION, INC. Cantilever Wafer Loaders
    • MRL GPM Gas Control Cabinet
    • Furnace Tube 1 – 3ea UNIT Model UFC-1100A MFCs
  • Gas #1: N2 – 10 SLM
  • Gas #2: O2 – 10 SLM
  • Gas #3: N2 – 1 SLM
  • Furnace Tube 2 – 2ea UNIT Model UFC-1100A MFCs
  • Gas #1: N2 – 10 SLM
  • Gas #2: O2 – 10 SLM
  • Furnace Tube 3 – 1ea UNIT Model UFC-1100A MFC
  • Gas #1: N2 – 10 SLM
  • 3ea ARGUS Gas Control Modules
  • 2ea J.C. SCHUMACHER Model 100 Source Temperature Control Systems
  • Upgraded with a PLC Controller

 


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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