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SEN NV-GSD-HE3 High Energy Implanter for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used SEN NV-GSD-HE3 High Energy Implanter.
Please click on the "Send More Details" button at the end of the NV-GSD-HE3 description, if you'd like to get more details, photos and specifications of this High Energy Implanter, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This SEN NV-GSD-HE3 High Energy Implanter is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


SEN NV-GSD-HE3 Equipment Details

SDI ID: 100237
Manufacturer: SEN
Model: NV-GSD-HE3
Description: High Energy Implanter
Version: 300mm
Vintage: Inquire
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: 800,000 USD
Comments:

Configuration

4 FOUP (Comply with SEMI E47.1

Energy Range 10KeV to 3750KeV with RTEM (Real Time Energy Monitoring Capability)

UPS MUF3051-BL

mass analysis magnet and power supply

inject flag faraday

3KW 13.56 MHz power supply

LINER ACCELERATOR

High energy resonator cavities *12ea and Quadrupole *14ea

Quadrupole Lens and power supply

Final energy magnet and power supply

resolving faraday

Continuous variable aperature

IBM WORK STATION

Software version K6.01P

Manual Schematic books

End station wafer handling In-air/In-vacuum high throughput wafer handling system

End station wafer handling Sub-class 1 , ULPA filtered wafer handling area

End station wafer handling Automatic notch alignment capability with buffer cassette

End station wafer handling Integrated " dummy wafer" fill-in capability

End station disk two axis variable implant angle

End station disk 13 wafer 300 mm process disk with direct

End station wafer handling Slot to slot wafer integrity

End station dose control Real time patented dose control

End station robot SEN MACOROB 300

End station option Valved RGA port on end station resolving

End station option Valved RGA port on disk module

End station option Faraday burn through sense

Facilities utilities Feed from Bottom

Facilities cable remote cryo pump compressor cable

Facilities cable remote disk chiller cable

Facilities utilities Feed Gas Box Exhaust from TOP

Facilities Beacon High voltage beacon

Facilities MAIN PD ASSEMBLY

Facilities SIGNAL TOWER LIGHT ASSY, 4Light CE

FIRE SAFETY KIT SMOKE DETECTOR, VESDA,

60Hz Standard

Gas Box Exhaust needs to feed from TOP

High Voltage Warning Display- English

Factory Automation E84 communication E84 OHT comunication suport 3port

Factory Automation Factory Automation Brooks Buffer w/6M

Gas Box Gas 1 type Gas box gas type position Ar with HP

Gas Box Gas 2 type Gas box gas type position BF3 with SDS

Gas Box Gas 3 type Gas box gas type position BF3 with SDS

Gas Box Gas 4 type Gas box gas type position PH3 with SDS

Gas Box Gas 5 type Gas box gas type position PH3 with SDS

Gas Box MFC2 Unit 8160 10ccm

Gas Box MFC3 Unit 8162 5ccm

Gas Box MFC4 Unit 8162 10ccm

Gas Box MFC5 Unit 8162 10ccm

Remote Rack SEN chiller

Remote Rack Heater exchange from FAC

Remote Rack Service PC X-terminal

Door Bypass Switch

SOURCE HEAD ELS

3-AXIS EXTRACTION ELECTRODE

Vacuum Cryopump CP2 Brooks_OB-8

Vacuum Cryopump CP3 Brooks_OB-10

Vacuum Cryopump CP7 Brooks_OB-250F

Vacuum Cryopump CP8 Brooks_OB-250F

Vacuum STP-2203C TP1

Vacuum STP-A803C TP4

Vacuum STP-A1303C TP5

Vacuum STP-A803C TP10

Vacuum STP-A1303C TP11

Vacuum STP-A803C TP12

 

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The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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