SDI fabsurplus.com is pleased to announce the availability of the following listed used SEN NV-GSD-HE3 High Energy Implanter.
Please click on the "Send More Details" button at the end of the NV-GSD-HE3 description, if you'd like to get more details, photos and specifications of this High Energy Implanter, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This SEN NV-GSD-HE3 High Energy Implanter is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||High Energy Implanter|
|Sales Condition:||as is where is|
|Sales Price:||800,000 USD|
4 FOUP (Comply with SEMI E47.1
Energy Range 10KeV to 3750KeV with RTEM (Real Time Energy Monitoring Capability)
mass analysis magnet and power supply
inject flag faraday
3KW 13.56 MHz power supply
High energy resonator cavities *12ea and Quadrupole *14ea
Quadrupole Lens and power supply
Final energy magnet and power supply
Continuous variable aperature
IBM WORK STATION
Software version K6.01P
Manual Schematic books
End station wafer handling In-air/In-vacuum high throughput wafer handling system
End station wafer handling Sub-class 1 , ULPA filtered wafer handling area
End station wafer handling Automatic notch alignment capability with buffer cassette
End station wafer handling Integrated " dummy wafer" fill-in capability
End station disk two axis variable implant angle
End station disk 13 wafer 300 mm process disk with direct
End station wafer handling Slot to slot wafer integrity
End station dose control Real time patented dose control
End station robot SEN MACOROB 300
End station option Valved RGA port on end station resolving
End station option Valved RGA port on disk module
End station option Faraday burn through sense
Facilities utilities Feed from Bottom
Facilities cable remote cryo pump compressor cable
Facilities cable remote disk chiller cable
Facilities utilities Feed Gas Box Exhaust from TOP
Facilities Beacon High voltage beacon
Facilities MAIN PD ASSEMBLY
Facilities SIGNAL TOWER LIGHT ASSY, 4Light CE
FIRE SAFETY KIT SMOKE DETECTOR, VESDA,
Gas Box Exhaust needs to feed from TOP
High Voltage Warning Display- English
Factory Automation E84 communication E84 OHT comunication suport 3port
Factory Automation Factory Automation Brooks Buffer w/6M
Gas Box Gas 1 type Gas box gas type position Ar with HP
Gas Box Gas 2 type Gas box gas type position BF3 with SDS
Gas Box Gas 3 type Gas box gas type position BF3 with SDS
Gas Box Gas 4 type Gas box gas type position PH3 with SDS
Gas Box Gas 5 type Gas box gas type position PH3 with SDS
Gas Box MFC2 Unit 8160 10ccm
Gas Box MFC3 Unit 8162 5ccm
Gas Box MFC4 Unit 8162 10ccm
Gas Box MFC5 Unit 8162 10ccm
Remote Rack SEN chiller
Remote Rack Heater exchange from FAC
Remote Rack Service PC X-terminal
Door Bypass Switch
SOURCE HEAD ELS
3-AXIS EXTRACTION ELECTRODE
Vacuum Cryopump CP2 Brooks_OB-8
Vacuum Cryopump CP3 Brooks_OB-10
Vacuum Cryopump CP7 Brooks_OB-250F
Vacuum Cryopump CP8 Brooks_OB-250F
Vacuum STP-2203C TP1
Vacuum STP-A803C TP4
Vacuum STP-A1303C TP5
Vacuum STP-A803C TP10
Vacuum STP-A1303C TP11
Vacuum STP-A803C TP12
Send Me More Details about this item.
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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