SDI fabsurplus.com is pleased to announce the availability of the following listed used Applied Materials eMax CT plus eMax CT+ Dielectric etch chamber.
Please click on the "Send More Details" button at the end of the eMax CT plus description, if you'd like to get more details, photos and specifications of this eMax CT+ Dielectric etch chamber, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Applied Materials eMax CT plus eMax CT+ Dielectric etch chamber is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Model:||eMax CT plus|
|Description:||eMax CT+ Dielectric etch chamber|
Manufacturer: Applied Materials
Model: eMax CT plus
Description: eMax CT+ Dielectric etch chamber
Year of manufacture: 2007
Wafer size 12 inch
Turbo pump Alcatel ATH 1600M
RF Match Box Bias13.5 MHz(Bias) & 2 MHz(LF Bias)
LF Bias Daihen RMN-50N1 (p/n : 0190-15322)
Source 60 MHz Daihen AMN-30H (p/n : 0190-15323)
Gate valve Nor-Cal / NC-95-PP
13.56 MHz ENI GHW-50A (p/n : 0190-15319)
2 MHz ENI B-5002 (p/n : 0190-15320)
60 HHz AE Ovation 2760 (p/n : 0190-17779)
FIB eFib, wFib (Facilities Interface Box)
Chamber Equip Cart p/n : 0010-24353
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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