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KLA-Tencor SP1 DLS Darkfield Non-Pattern Inspection for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used KLA-Tencor SP1 DLS Darkfield Non-Pattern Inspection.
Please click on the "Send More Details" button at the end of the SP1 DLS description, if you'd like to get more details, photos and specifications of this Darkfield Non-Pattern Inspection, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This KLA-Tencor SP1 DLS Darkfield Non-Pattern Inspection is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


KLA-Tencor SP1 DLS Equipment Details

SDI ID: 100867
Manufacturer: KLA-Tencor
Model: SP1 DLS
Description: Darkfield Non-Pattern Inspection
Version: 200mm/300mm
Vintage: 01.09.2002
Quantity: 1
Sales Condition: inquire
Lead Time: immediately
Sales Price: Inquire
Comments:

Wafer size: Compatible with both 12” and 8” wafers. It has been exclusively used for 12” wafer since 2014. 

Vacuum type: The tool is a puck (vacuum) system (not an edge handling).

Dual FOUP: one for 200mm and the other for 300mm. 

Laser history: Replaced about 3 years ago. Given the 90% uptime, it is ~23K hours. 

Tool is fully functional with PSL calibration. 

One fully refurbished spare laser is available.

System history: Used in a R&D facility (Class 10 cleanroom) since 2011.  It has been never run in a production fashion, i.e., limited daily usage only.

Software version: MX Version: 4.20.71.86

Bright Field option available

Categories:
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The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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