SDI fabsurplus.com is pleased to announce the availability of the following listed used KLA-Tencor SP1 DLS Darkfield Non-Pattern Inspection.
Please click on the "Send More Details" button at the end of the SP1 DLS description, if you'd like to get more details, photos and specifications of this Darkfield Non-Pattern Inspection, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This KLA-Tencor SP1 DLS Darkfield Non-Pattern Inspection is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||Darkfield Non-Pattern Inspection|
Wafer size: Compatible with both 12” and 8” wafers. It has been exclusively used for 12” wafer since 2014.
Vacuum type: The tool is a puck (vacuum) system (not an edge handling).
Dual FOUP: one for 200mm and the other for 300mm.
Laser history: Replaced about 3 years ago. Given the 90% uptime, it is ~23K hours.
Tool is fully functional with PSL calibration.
One fully refurbished spare laser is available.
System history: Used in a R&D facility (Class 10 cleanroom) since 2011. It has been never run in a production fashion, i.e., limited daily usage only.
Software version: MX Version: 18.104.22.168
Bright Field option available
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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