Applied Materials Mirra Mesa Integrated Oxide/STI CMP for Sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used Applied Materials Mirra Mesa Integrated Oxide/STI CMP.
Please click on the "Get Quote" button at the end of the Mirra Mesa Integrated description, if you'd like to get a quotation, photos and specifications of this Oxide/STI CMP, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Applied Materials Mirra Mesa Integrated Oxide/STI CMP is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

Applied Materials Mirra Mesa Integrated Equipment Details

SDI ID: 100873
Manufacturer: Applied Materials
Model: Mirra Mesa Integrated
Description: Oxide/STI CMP
Version: 200 mm
Vintage: 31.05.1999
Quantity: 1
Sales Condition: inquire
Lead Time: Inquire
Sales Price: Inquire



System configuration  
General information Selected Option
Technology Oxide/STI/WCMP/CUCMP
Platform Type Mirra Mesa
Wafer Specification Selected Option
Wafer Size 200mm
Wafer Shape Notch Type
Mirra 3400 CMP System
System Information Selected Option
Application Oxide/STI/WCMP/CUCMP
Process Type All Process
Cleaner Type Mesa
Wet Robot Type Standard Refurbished
Wet Queue Tank NA
System Skins Clear Skins
Load Cup Full Contact HCLU, Overhauled
Cassette Type 8 inch
Performance Enhancement Options Selected Option
Daily PM Reduction Kit (Clean Kit) Optional
Pad Conditioner Head1~3 DDF3
Pad Conditioner Disk Holder Universal - Screw type
Pad Conditioner Sweep Hard Stop Yes
Pad Conditioner retrofit Normal DDF3
Pad Conditioner Gear Assembly Overhaul Yes
Waterfall Spray Cleaning System Optional
Factory Interface Options Selected Option
Platen 1 ISRM Legacy
Platen 2 ISRM Legacy
Platen 3 ISRM Legacy
In Line Metrology NA
SECS GEM Interface Yes
High Speed Messaging System (HSMS) Optional
Installation Type RORZE FABS202
Integrated System Basic FABS Yes (FFU included)
FABS Robot Blade YES, OEM new or overhauled
Cassette Tank YES
Factory Automation Yes
Polisher Options Selected Option
Polishing Head (Head1~4) TITAN 1 x 4ea
Upper Pneumatics Assembly (UPA) TITAN1 UPA
UPA Location External Relocated
Pad Wafer Loss Sensor Dual Sensor
Platen Temperature Control No
Platen Temp Control Cable No
Upper Platen Coating Teflon Coating
Platen Gear Assembly Overhaul Yes, Greaseless Type
Slurry Delivery Options Selected Option
Slurry Delivery 3 Slurries
Slurry Flow Rate Standard Flow
Slurry Flow Controller (CLC) Tokyo Keiso CLC x 3
Slurry Pump Head Yes (Not Applicable if CLC model is chosen)
Slurry Containment Bulkhead Double Containment
Slurry Facilities None
Slurry Loop Line No
Slurry Loop Line A Slurry (PL1, PL2, PL3)
Slurry Loop Line B Optional
Slurry Loop Line C Optional
Slurry Dispense Arm Standard Length Platen1~3
High Pressure Rinse
Slurry Leak Detector Yes
Cleaner Plumbing Not Applicable
DI Water Standard
Slurry Tube Yes
Slurry Filter & Housing NO
Slip Out Sensor Slurry Cover Per Head Yes
System Safety Selected Option
EMO Guard Ring Yes
System Labels English
System User Labels English
Smoke Detector Yes
Polisher Slurry Leak Sensor Yes
Electrical Requirements Selected Option
Line Frequency 50 HZ
Line Voltage 200/208 VAC
Uninterruptible Power Supply None
Power Lamp Green Lamp
Power Connected Lamp No
Circuit Breaker 200A
Controller Top Panel Holes Punched Out for AC Power Cables Entry
Configurable IO No
GFI Type Standard 30mA
Isolation Transformer No
Umbilical's Selected Option
CAT Track Style WaterFall
Polisher to Controller Cable Standard 30ft
Controller to Monitor Cable Standard
Slurry System Interface Cable None
Factory Hookup Selected Option
Upper Exhaust Standard
Upper Exhaust Material Stainless Steel
Lower Exhaust None
Process Exhaust Vent Interlock Sensor Yes
Upper Exhaust Connection No Flange
Drain Manifold Options:
1 Line or 4 Lines to Facilities
Drain Adapter NPT Fittings
Internal Vacuum Venturi Yes


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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