Applied Materials Mirra Mesa Integrated Oxide/STI CMP for sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used Applied Materials Mirra Mesa Integrated Oxide/STI CMP.
Please click on the "Get Quote" button at the end of the Mirra Mesa Integrated description, if you'd like to get a quotation, photos and specifications of this Oxide/STI CMP, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Applied Materials Mirra Mesa Integrated Oxide/STI CMP is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

Applied Materials Mirra Mesa Integrated Equipment Details

SDI ID:

100873

Manufacturer:

Applied Materials

Model:

Mirra Mesa Integrated

Description:

Oxide/STI CMP

Version:

200 mm

Vintage:

31.05.1999

Quantity:

Sales Condition:

inquire

Lead Time:

Inquire

Sales Price:

Inquire

Comments:

THIS EQUIPMENT IS AVAILABLE IN COMPLETELY REFURBISHED CONDITION, RE-BUILT TO YOUR REQUIRED SPECIFICATION.

THE FOLLOWING IS AN EXAMPLE OF A SPECIFICATION WHICH CAN BE PROVIDED:-

System configuration
General information	Selected Option
Technology	Oxide/STI/WCMP/CUCMP
Platform Type	Mirra Mesa
Wafer Specification	Selected Option
Wafer Size	200mm
Wafer Shape	Notch Type
Mirra 3400 CMP System
System Information	Selected Option
Application	Oxide/STI/WCMP/CUCMP
System	DRY IN-DRY OUT
Process Type	All Process
Cleaner Type	Mesa
Wet Robot Type	Standard Refurbished
Wet Queue Tank	NA
System Skins	Clear Skins
Load Cup	Full Contact HCLU, Overhauled
Cassette Type	8 inch
Performance Enhancement Options	Selected Option
Daily PM Reduction Kit (Clean Kit)	Optional
Pad Conditioner Head1~3	DDF3
Pad Conditioner Disk Holder	Universal - Screw type
Pad Conditioner Sweep Hard Stop	Yes
Pad Conditioner retrofit	Normal DDF3
Pad Conditioner Gear Assembly Overhaul	Yes
Waterfall Spray Cleaning System	Optional
Factory Interface Options	Selected Option
Platen 1 ISRM	Legacy
Platen 2 ISRM	Legacy
Platen 3 ISRM	Legacy
In Line Metrology	NA
SECS GEM Interface	Yes
High Speed Messaging System (HSMS)	Optional
Installation Type	RORZE FABS202
Integrated System Basic FABS	Yes (FFU included)
FABS Robot Blade	YES, OEM new or overhauled
Cassette Tank	YES
Factory Automation	Yes
Polisher Options	Selected Option
Polishing Head (Head1~4)	TITAN 1 x 4ea
Upper Pneumatics Assembly (UPA)	TITAN1 UPA
UPA Location	External Relocated
Pad Wafer Loss Sensor	Dual Sensor
Platen Temperature Control	No
Platen Temp Control Cable	No
Upper Platen Coating	Teflon Coating
Platen Gear Assembly Overhaul	Yes, Greaseless Type
Slurry Delivery Options	Selected Option
Slurry Delivery	3 Slurries
Slurry Flow Rate	Standard Flow
Slurry Flow Controller (CLC)	Tokyo Keiso CLC x 3
Slurry Pump Head	Yes (Not Applicable if CLC model is chosen)
Slurry Containment Bulkhead	Double Containment
Slurry Facilities	None
Slurry Loop Line	No
Slurry Loop Line A	Slurry (PL1, PL2, PL3)
Slurry Loop Line B	Optional
Slurry Loop Line C	Optional
Slurry Dispense Arm	Standard Length Platen1~3
Slurry Dispense Arm	High Pressure Rinse
Slurry Leak Detector	Yes
Cleaner Plumbing	Not Applicable
DI Water	Standard
Slurry Tube	Yes
Slurry Filter & Housing	NO
Slip Out Sensor Slurry Cover Per Head	Yes
FACILITIES OPTIONS
System Safety	Selected Option
EMO Guard Ring	Yes
EMO IO	No
System Labels	English
System User Labels	English
LOTO Box	NO
Smoke Detector	Yes
Polisher Slurry Leak Sensor	Yes
Electrical Requirements	Selected Option
Line Frequency	50 HZ
Line Voltage	200/208 VAC
Uninterruptible Power Supply	None
Power Lamp	Green Lamp
Power Connected Lamp	No
Circuit Breaker	200A
Controller Top Panel	Holes Punched Out for AC Power Cables Entry
Configurable IO	No
GFI Type	Standard 30mA
Isolation Transformer	No
Umbilical's	Selected Option
CAT Track Style	WaterFall
Polisher to Controller Cable	Standard 30ft
Controller to Monitor Cable	Standard
Slurry System Interface Cable	None
Factory Hookup	Selected Option
Upper Exhaust	Standard
Upper Exhaust Material	Stainless Steel
Lower Exhaust	None
Process Exhaust Vent Interlock Sensor	Yes
Upper Exhaust Connection	No Flange
Drain Manifold	Options: 1 Line or 4 Lines to Facilities
Drain Adapter	NPT Fittings
Internal Vacuum Venturi	Yes

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Attachments: 2 Files

Filename:
AMAT_Mirra_Mesa_Configuration.xlsx
Size: 34435 bytes
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Applied Materials Mirra Mesa Integrated Oxide/STI CMP for Sale

Applied Materials Mirra Mesa Integrated Equipment Details

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