Balzers LLS 900 Batch Sputtering tool for Sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used Balzers LLS 900 Batch Sputtering tool.
Please click on the "Send More Details" button at the end of the LLS 900 description, if you'd like to get more details, photos and specifications of this Batch Sputtering tool, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Balzers LLS 900 Batch Sputtering tool is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

Balzers LLS 900 Equipment Details

SDI ID: 100997
Manufacturer: Balzers
Model: LLS 900
Description: Batch Sputtering tool
Version: 100 mm
Vintage: 01.12.1989
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire

Vintage 1989 Batch Sputtering System with loadlock.
Loadlock and Process chamber with turbo pumps.
Includes Polycold PFC650 Cascade Compressor Refrigeration System, June 1989 Vintage.
Sputtering with four AK618 cathodes and ENI pulsed power supply.
Substrate heating with quartz heater lamps, RF bias and RF etch possible.
Equipped for 4 inch wafers, used for sputtering Al/Ti/Ta.
Sputter Target Type: 81102787 Dimensions 484 mm x 166 mm x 12 mm Monoblock / LLS 900

Target 1 = AlSi / AlCu / Al
Target 2 = Ta
Target 3 = AlSi / AlCu / Al
Target 4 = Ta
Status In warehouse Condition Good

Attachments: 22 Files
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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