SDI fabsurplus.com is pleased to announce the availability of the following listed used Canon MPA-600 Super Mirror Projection Mask Aligner.
Please click on the "Send More Details" button at the end of the MPA-600 Super description, if you'd like to get more details, photos and specifications of this Mirror Projection Mask Aligner, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Canon MPA-600 Super Mirror Projection Mask Aligner is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||Mirror Projection Mask Aligner|
|Sales Condition:||as is where is|
Canon MPA-600 Super
The Canon MPA-600Super is a 1:1 mirror projection mask aligner, which features improved overlay accuracy for mass production of VLSI devices. It’s development was based on the MPA-600FA and MPA-500FAb. The new design achieves better yield, higher throughput and improved stability.
Auto Feeder: Single, cassette to cassette, backside wafer handling
Wafer size: 6”, 5” and 4” sizes available)
Mask size: 7”, 6” and 5” sizes available)
Illumination: 2KW High Pressure Mercury Lamp
Intensity: > 600mW / cm2 (6 inch wafer)
Illumination Uniformity: + 3% Aperture sizes: 0.7, 0.6, 0.5 Exposure Uniformity: + 3%
Depth of Focus: > + 6um (linewidth 1.5um)
Magnification: < 0.2um (PDC ON)
Distortion: 3sigma < 0.5um (PDC OFF)
Scanning Accuracy: < + 1.5%
Auto Alignment Accuracy: LBS AA 3sigma < 0.58um (HeNe laser beam scan) TV AA 3sigma < 0.43um (TV image processing)
Throughput (6”wafer): > 89 wfs/h (first mask mode) > 77 wfs/h (LBS AA mode) > 68 wfs/h (TVAA mode)
Parts tool also available for spare parts.
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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