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KOKUSAI DJ-853V-8BL HTO (High Temperature Oxide) for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used KOKUSAI DJ-853V-8BL HTO (High Temperature Oxide).
Please click on the "Send More Details" button at the end of the DJ-853V-8BL description, if you'd like to get more details, photos and specifications of this HTO (High Temperature Oxide), and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This KOKUSAI DJ-853V-8BL HTO (High Temperature Oxide) is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


KOKUSAI DJ-853V-8BL Equipment Details

SDI ID: 101201
Manufacturer: KOKUSAI
Model: DJ-853V-8BL
Description: HTO (High Temperature Oxide)
Version: 200 mm
Vintage: 01.07.2004
Quantity: 1
Sales Condition: as is where is
Lead Time: Inquire
Sales Price: 160,000 USD
Comments:

Still installed and running in the cleanroom, Furnace (Batch of 75wfr)

Description

 

 

Fab

-

 

Area \ Department

LP-CVD

 

OE M \ V e n d o r

HITACHI KOKUSAI

 

Model

DJ-853V-8BL3

 

Serial Number

 

 

Vintage

Jul-04

 

Wafer Size (6'', 8'', 12'', )

8"

 

Process

HTO

 

SMIF Interface

NO

 

 

 

 

Equipment composition

 

 

1.Electric furnace

1-1.Resistance heater

D4EX19896

 

1-2.Heater control thermocouple

NM150SR5

 

1-3.Thermocouple for heating protection

D4EX06097

 

1-4.5 thermocouples for temperature monitor

D4EX19971

 

1-5.Control thyristor unit

SP200T10K80U146

 

 

 

2.Clean unit

2-1.Thin clean module unit

Transfer module : D4CX27791

 

2-2.Thin clean module unit

Upper cassette shelf top : D4CX27789

 

2-3.Clean module unit

Casette stage : D4CX27790

 

 

 

3.Controller

3-1.Main control unit

CX3002B RAID-HDD

 

3-2.Main operation unit

CX3002P

 

3-3.Digital precision temperature controller

CQ1700

 

3-4.Gas system input/output unit

CS1G-CPU43H

 

3-5.MFC/Exhaust control unit

CX3002

 

3-6.Wafer transfer control unit

CX1232

 

3-7.Gas flow pattern panel

DCBK-0134

 

3-8.Signal tower

LES-402AW-RYGC

 

3-9.Sync unit(For 5-zone heater)

DN-150A

 

3-10.UPS

DBK05D-01

 

 

 

4.Mechanism

4-1.Front shutter

 

 

4-2.Cassette stage

 

 

4-3.Wafer detection

F3M-S826

 

4-4.Cassette loader

 

 

4-5.Cassette shelf

 

 

4-6.Wafer transfer

 

 

4-7.Wafer pitch variable

 

 

4-8.Boat elevator

 

 

4-9.Furnace mouth shutter

 

 

4-10.Boat rotation

 

 

 

 

5.Gas system

5-1.MFC1

SEC-7350MO-203S-4CR-N2-SUC

 

5-2.MFC2

SEC-7330MO-202S-4CR-N2-SUC

 

5-3.MFC3

SEC-7330MO-202S-4CR-N2-SUC

 

5-4.MFC4

SEC7330MO-101S-4CR-SiH4-SUC

 

5-5.MFC5

SEC-7330MO-202S-4CR-N2O-SUC

 

5-6.MFM1

SEF-7330M-101S-4CR-SIH4-SUC

 

5-7.MFM2

SEF-7330M-202S-4CR-N20-SUC

 

 

 

6.Exhaust system

6-1.D/P,MBP

EBARA A150WT

 

6-2.Exhaust pipe

 

 

6-3.Vacuum sensor

 

 

6-4.Exhaust dilution line

 

 

6-5.In-furnace pressure release line

 

 

6-6.N2 line for pressure control

SEC-4500MO-203S-4CR-N2

 

6-7.Background line

 

 

6-8.Process exhaust switching valve

IVBL80SDA-NEF-41

 

6-9.Capacitance manometer

6 2 6 A1 3 T BE

 

 

6 2 6 A1 1 T BE

 

6-10.N2O VENT D/P

EBARA AA10W

 

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