KLA-Tencor ASET F5x Thin Film Measurement System for Sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used KLA-Tencor ASET F5x Thin Film Measurement System.
Please click on the "Send More Details" button at the end of the ASET F5x description, if you'd like to get more details, photos and specifications of this Thin Film Measurement System, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This KLA-Tencor ASET F5x Thin Film Measurement System is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

KLA-Tencor ASET F5x Equipment Details

SDI ID: 101693
Manufacturer: KLA-Tencor
Model: ASET F5x
Description: Thin Film Measurement System
Version: 200 - 300 mm
Vintage: 01.06.2003
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: 820,000 USD

Available fully refurbished with 6 month warranty!


- Model: ASET F5x

- Configured for 200mm wafers with Dual Cassette Open Handler

- Spectroscopic Ellipsometer

- Xenon Light Source with 220nm to 800nm Wavelength Range (1 Xenon Lamp)

- Three User Selectable DBS Spot Sizes: 2.7, 10, 40 um

- Pattern Recognition (KLA F5x)

- Windows XP Operating System

- 1.25 GHz Pentium Computer

- 80GB SCSI Hard Drive

- DVD/RW Drive

- 1 Gb DRAM

- Flat Panel LCD Display

- KLA F5x Keyboard and Trackball

- Ethernet PCIA Card

- Multi-Layer Film Capacity

- Micro Spot Optics

- Scanning Stage (KLA F5x)

- Wafer Mapping

- In-Situ Capability

- Controller Type: PC/VME

- Operator Manual for KLA F5x




- Replace Xenon Lamp with New

- Replace Lamp Window Glass Cover with New

- Replace Paraboloid Assembly with New

- Replace Keyboard and Trackball Mouse with New

- Replaced Polarizer, as required

- Replace Power Supply, as required

- Replacement or repair of any bad circuit board

- Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed.

- Refurbish Robot: replace all belts, refurbish ball splines and lead screw, new

bearings, replace motors if needed, check vacuum switch and valve and replace if

needed, new vacuum lines, replace flip-flop assy, check boards, lubrication,

repeatabily and orthogonality test.

- Optics assemblies cleaned and aligned to meet performance specifications or

replaced as needed

- Electronic assemblies tested to meet performance specifications or replaced as


- Replace old monitor with Brand New LCD Monitor

- Perform stage calibrations

- Perform handler calibrations

- Run DBS and SE calibrations

- Calibrate system using calibration wafers

- Machine covers are cleaned, polished, or replaced, as needed

- Performance specifications returned to original factory specifications

- Machine is fully tested over consecutive days to verify compliance to OEM specifications

- System locked for transport following proper procedures

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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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