KLA-Tencor ASET F5x Thin Film Measurement System for Sale

Available fully refurbished with 6 month warranty!

KLA-TENCOR ASET F5x THIN FILM MEASUREMENT SYSTEM Specifications:

- Model: ASET F5x

- Configured for 200mm wafers with Dual Cassette Open Handler

- Spectroscopic Ellipsometer

- Xenon Light Source with 220nm to 800nm Wavelength Range (1 Xenon Lamp)

- Three User Selectable DBS Spot Sizes: 2.7, 10, 40 um

- Pattern Recognition (KLA F5x)

- Windows XP Operating System

- 1.25 GHz Pentium Computer

- 80GB SCSI Hard Drive

- DVD/RW Drive

- 1 Gb DRAM

- Flat Panel LCD Display

- KLA F5x Keyboard and Trackball

- Ethernet PCIA Card

- Multi-Layer Film Capacity

- Micro Spot Optics

- Scanning Stage (KLA F5x)

- Wafer Mapping

- In-Situ Capability

- Controller Type: PC/VME

- Operator Manual for KLA F5x

REFURBISHMENT PROCESS FOR KLA-TENCOR F5X:

- Replace Xenon Lamp with New

- Replace Lamp Window Glass Cover with New

- Replace Paraboloid Assembly with New

- Replace Keyboard and Trackball Mouse with New

- Replaced Polarizer, as required

- Replace Power Supply, as required

- Replacement or repair of any bad circuit board

- Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed.

- Refurbish Robot: replace all belts, refurbish ball splines and lead screw, new

bearings, replace motors if needed, check vacuum switch and valve and replace if

needed, new vacuum lines, replace flip-flop assy, check boards, lubrication,

repeatabily and orthogonality test.

- Optics assemblies cleaned and aligned to meet performance specifications or

replaced as needed

- Electronic assemblies tested to meet performance specifications or replaced as

needed

- Replace old monitor with Brand New LCD Monitor

- Perform stage calibrations

- Perform handler calibrations

- Run DBS and SE calibrations

- Calibrate system using calibration wafers

- Machine covers are cleaned, polished, or replaced, as needed

- Performance specifications returned to original factory specifications

- Machine is fully tested over consecutive days to verify compliance to OEM specifications

- System locked for transport following proper procedures