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Nikon FX 702J Flat Panel Display Exposure ystem for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Nikon FX 702J Flat Panel Display Exposure ystem.
Please click on the "Send More Details" button at the end of the FX 702J description, if you'd like to get more details, photos and specifications of this Flat Panel Display Exposure ystem, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Nikon FX 702J Flat Panel Display Exposure ystem is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Nikon FX 702J Equipment Details

SDI ID: 101702
Manufacturer: Nikon
Model: FX 702J
Description: Flat Panel Display Exposure ystem
Version: Gen 3.5
Vintage: 01.06.2002
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

Production on this machine ended in December, 2019. This system is currently shut down in the fab. The equipment was in excellent, operational condition, before it was shut down .Inspection (Without power on) is available by appointment.
The Nikon FX-702J is a stepper exposure system for higher-definition color TFT-LCDs.
Main Features
• Overlay Accuracy Dramatically Improved with High-Accuracy Alignment System
A new image processing alignment system was adopted to achieve an alignment accuracy of 0.32μm or better
(| mean | + 3 σ ) when using EGA 8-point measurement.

• Wide Exposure Field and High Resolution Simultaneously Achieved
A newly designed projection optics system was developed
using i-line for the exposure wavelength. The new system
has a wide exposure field of 100 x 100mm, which realizes a
high resolution of 1.5μm or better for L/S and 2.0μm or
better for C/H. In conjunction with the improvement in
alignment accuracy, the new system is fully capable of
producing even higher resolution LCDs.

• Throughput Dramatically Improved
The new system can expose 580 or more 8-inch panels per
hour (with 15 panels per glass plate) or 270 or more 13-inch
panels per hour (with 6 panels per glass plate). This is a
dramatic improvement over previous steppers handling
high- resolution LCDs.

• Large Plate Applications
The Nikon FX-702J can process plates as large as 600 x
720mm. This application makes it possible for sixty 4-inch
panels, fifteen 8-inch panels, or six 14-inch panels to be
made on one glass plate.

Summary Of Specifications
Resolution: 1.5μm or better (L/S),2.0μm or better (C/H) (On 1μm-thick positive resist).
Exposure field: 100mm square ~ 74.83 x 120mm (≤ø141.42mm)
Exposure wavelength: i-line (365nm)
Projection magnification: 1:1
Alignment accuracy: 0.32μm or better (8-point EGA: | mean | + 3σ)
Maximum plate size: 600 mm x 720 mm
Reticle size: Standard 6-inch 0.25
Options:
Pellicle particle detector
Extended reticle library
Reticle bar code reader
Remote control system (RCS)

Categories:
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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