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Oerlikon BAK760C PVD Sputtering System for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Oerlikon BAK760C PVD Sputtering System.
Please click on the "Send More Details" button at the end of the BAK760C description, if you'd like to get more details, photos and specifications of this PVD Sputtering System, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Oerlikon BAK760C PVD Sputtering System is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Oerlikon BAK760C Equipment Details

SDI ID: 101767
Manufacturer: Oerlikon
Model: BAK760C
Description: PVD Sputtering System
Version: 150 mm / 200 mm
Vintage: 01.06.1995
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

Specifications

- BPU420 E and VAX420

- EHV 110 Power supply

- 1 multi crucible  ESQ113 (4 pockets)

- 1 single crucible ESQ110

- 2 EKS 110,

- 2 ETS 110 (modification with PLC )for crucible rotation,

- 1 QSK 300 head (mono quartz)

- 1 TPG300 gauges controller

The tool was used to deposit the following metals:

 

-Aluminum

-Titanum

-Nickel

-Gold

 

It was used in production for  6 inch wafers

-3 platen of 12 positions in 6 inches = 36 wafers for 1 run

Platens are manually loaded in and out of the tool.

It is also possible to to use 3 platens of with positions with 8 inch wafers.

The tool currently includes a platen for loading 6 inch wafers only.

 

The tool is warehoused/not crated

Tool was functional before dismantling

Please check pictures below for more information.

Categories:
Attachments: 3 Files
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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