SDI fabsurplus.com is pleased to announce the availability of the following listed used Canon FPA-6000ES6a 90nm Krf Scanner.
Please click on the "Send More Details" button at the end of the FPA-6000ES6a description, if you'd like to get more details, photos and specifications of this 90nm Krf Scanner, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Canon FPA-6000ES6a 90nm Krf Scanner is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||90nm Krf Scanner|
|Sales Condition:||as is where is|
Excimer Laser information:
1) UNIFORMITY (IUC) : 0.654 [%] (spec : ≦ ± 0.50 %)
2) INTENSITY (LIMC) : 20474.0 [W/m2] ( spec : ≧ 41500 W/m2 )
3) DISTORTION - MX Max : -11.3 [nm]
- MY Max : -11.3 [nm] (spec : ≦ 8nm)
4) LITEL - Totel RMS : 38.0 mλ (spec : ≦ 12mλ )
5) Wafer Chuck Flatness - LTV : 0.067 um (spec : ≦ 0.1um)
TTV : 0.867 um (spec : ≦ 1.0um)
1) UNIFORMITY (IUC) : 1.811 [%] (spec : ≦ ± 0.50 %)
2) INTENSITY (LIMC) : 24299.68 [W/m2] (spec : ≧ 41500 W/m2)
System is warehoused. Inspection available upon request.
Please check the attached pictures for more information.
Send Me More Details about this item.
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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