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Kokusai Vertron III Vertical Furnace Nitride for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Kokusai Vertron III Vertical Furnace Nitride.
Please click on the "Send More Details" button at the end of the Vertron III description, if you'd like to get more details, photos and specifications of this Vertical Furnace Nitride, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Kokusai Vertron III Vertical Furnace Nitride is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Kokusai Vertron III Equipment Details

SDI ID: 102499
Manufacturer: Kokusai
Model: Vertron III
Description: Vertical Furnace Nitride
Version: 200 MM
Vintage: 01.06.1995
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

Process: LPCVD Nitride Si3N4
SYSTEM CONTROLLER : CX2000
SECS/GEM COMMUNICATION
Load Station
WAFER SIZE : 8 Inch  
DUAL SMIF LOADER , ASYST LPT 2200
Cassette Loader Type: CX1209
PROCESS GASES (LPCVD / NITRIDE)
SiH2Cl2 , NH3
OTHER GASES : N2
        
PROCESS PRESSURE CONTROL SYSTEM:       
VACUUM PUMP  : EDWARDS iQDP80
DRY PUMP CAPACITY : QMB 1200
Vacuum Gauges: Edwards Model 1570
FORELINE SIZE : 80
PRESSURE CONTROLLER : CX1204
PRESSURE CONTROL METHODOLOGY : Close Loop  (PID)
PROCESS MANOMETER
PRESSURE DIFFERENTIAL MANOMETER
PUMP MANOMETER
INLINE COLDTRAP
EXHAUST CONTROLLER

Still installed in the cleanroom, but in warm shut down since Jan 2019.
See attached photos for details of current condition.

Categories:
Attachments: 12 Files
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The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

July 2021 Update
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