fabsurplus.com




Varian Viista 80 HP High Current Ion Implanter for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Varian Viista 80 HP High Current Ion Implanter.
Please click on the "Send More Details" button at the end of the Viista 80 HP description, if you'd like to get more details, photos and specifications of this High Current Ion Implanter, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Varian Viista 80 HP High Current Ion Implanter is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Varian Viista 80 HP Equipment Details

SDI ID: 102633
Manufacturer: Varian
Model: Viista 80 HP
Description: High Current Ion Implanter
Version: 300 mm
Vintage: 01.07.2004
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

Currently de-installed, and in the warehouse.

-Energy Range 200 eV - 80 keV

Please refer to the attached photos and here follows the system configuration.

Varian Semiconductor offers a full suite of single wafer ion implanters covering a wide range of doping and materials modification used in semiconductor applications. All applications use the VIISta Platform . The VIISta platform has enabled the transition from batch to single wafer systems, by providing precise angle control, low defectivity and particle control and high productivity. All VIISta single-wafer, single-platform products utilize a common single-wafer backbone with optimized beam lines for specific ion implantation applications.

 

VIISta80HP Configuration

Remarks

Vacuum system

 

 

Cryo Compressor

Y

CTI-9600 * 2EA

Process Chamber Cryo

Y

CTI-250F * 3EA

Load Lock pump

Y

Pfeiffer_TMH 261 YPX *2EA

Source turbo Pump

Y (Pump:STP-A2203C2)

Controller-SCU1500

Beamline turbo pump

Y (Pump:STP-A2203C2)

Controller-SCU1500

Source Rough Pump

Y

IGX100M

Endstation Rough Pump

Y

IQDP80

Endstation Diff Pump

Y

IQDP80

Endstation Info

 

 

Endstation

UES

 

Wafer Size

300mm

 

Buffer type

Brooks buffer type

 

Air bearing

Graphite type

E19282790

Y tilt type

Driven side encoder

 

Cassette platform

300mm

 

Wafer mapping

Thru beam type

 

Wafer walkout sensor

Y

 

Wafer orienter

N

E11320430

Cassette sensor present

Y

 

Platen

N

E11368067

Tilter head

Roplat type

 

Profiler Assembly

IN-VAC type

E11313830

Light Curtain

Y

 

Load locks

Standard load locks

 

PRI Robot

Y

Left Robot Removed (E40001450)

Signal tower

Y

 

Scan harness

Y

 

Process Module Controller

Y

 

Transport Module Controller

Y

 

 

 

Source & Beamline Info

 

 

Energy probe

Y

 

Gas Box

Y

E11140710

Gas stick #1

Gas 1

E11116732

Gas stick #2

Gas 2

E11147261

Gas stick #3

Gas 3

E11147241

Gas stick #4

Gas 4

E11147251

Gas stick #5

Gas 5

E11116782

Gas stick #6

N

 

Vaporiser

N

 

Ion Source

Y

 

Filament PS

Y

 

Arc PS

Y

 

Bias PS

Y

E19013050

Source Isolation Controller

Y

E11106220

Source Magnet PS

Y

 

Extraction PS(Hi energy)

Y

 

Extraction PS(Low energy)

Y

 

Extraction Suppresion PS

Y

 

70 Degree Magnet PS

Y

E19007880

90 Degree Magnet PS

Y

E19007880

Decel 1 PS

Y

 

Decel 2 PS

Y

 

Decel 1 Suppression

Y

 

Decel 2 Suppression

N

E11326011

Quad 2 PS

Y

E19283050

70 & 90 Rod controller

Y

 

Exhaust conductivity monitor

Y

 

 

 

 

General Info

 

 

Computers

Y

E11130730

Smoke detector

VESDA

 

Water leakage sensor

Y

 

CVCF PD

Y

E19009490

Remote Rack

Y

 

Lead Floor

Y

 

Service monitor

Y

 

Chiller

N

 

Facilities & Input power

Bottom supply

 

Condition

 

 

Specification:-

-CE MARKED
-FITTED WITH FOUP PODS Cassette Interface:
o (4) FOUP
o Small WIP Buffer (Single wafer processing end station w/wafer Orient Control)
o (2) 25-Wafer Polished Loadlocks
• Energy Range: 200eV to 80keV
• IHC Ion Source
• Single Filament Bernas Ion Source
• Long Life PFG Filament
• Beam Energy Probe (for D1/D2 module control at 70/90° magnet regions)
• High Resolution 90° Analyzer Magnet
• 70° Magnet module
• Dual Plasma Xe Flood Gun
• 2D Profile Faraday
• Varian Positioning System (VPS): Recipe interlock incident angle control system
• Rotating Platen (X-Tilt capable from 0° to 60° +/-0.1° accuracy)
• Gas Cooled Electrostatic Platen
• Vertical Scanning
• Roplat Select Kit
• Facility Connections: Bottom Fed (air, water, power)
• Turbo Pumps/Cryogenics:
o (3) Helix/CTI 250F On-Board Cryo pumps
o Beamline: (1) Pfeiffer TMH2101
o Source: (1) Pfeiffer TMH2101
o End Station/LLKs: (2) Varian 300-HT
o (1) Varian Triscroll-300 Dry Pump
o (1) Diaphragm Rough Pump (air-bearing diff. seals stage 2)
o (1) Venturi Pump (air-bearing diff. seals stage 3)
o Remote Pump Kit: 15M Remote Pump Harness/Helium Lines Std Remote Pump Rack
• Gas Config:
o 1: Ar - HP (CGA 580, Praxair Specified)
o 2: BF3 - SDS (Unit MFC)
o 3: AsH3 - SDS (Praxair specified)
o 4: PH3 - SDS (Praxair specified)
o 5: SiF4 - HP (CGA 330)
o 6: CO2 - HP (CGA 320)
o 7: N2 - Maintenance Purge (Bulk ext feed)
o Affinity Chiller
• VIISTA Varian Control System (VCS):
o Operating System: Win NT/2000
o Auto-Recipe Set-up, Optimization, Control, Production Scheduling, WIP Tracking, etc... o HSMS SECS / GEM Interface
o 300mm SEMI Standards SW: includes E5, E30, E37, E37.1, E39, E40, E87, E90, E94
• Power Requirements: 208V (50kVA), 175A, 3-Phase, 5-Wire, Freq 50/60Hz
• Safety/Regulatory:
o S2-93A Compliant
o High Voltage Warning Displays (5 Locations)
o Source Exhaust Flow INTLK o Lead Floor Radiation Shield
o Hinged Enclosure Doors (interlocked)
o Status Lamp (RYGB, INCDST, CE certified)
o UPS – Control System & Platen
o EMO Interlocked Vesda Smoke Detection
o Exhaust (Gas Box, Mech. pumps, Cryo pumps) designed for thru-the-roof connections
• Installed Options:
o Replaceable Source Liners
o Vaporizer & Power Supply
o Ar External Purge Assembly (slot 1, UNIT MFC)
o Inert Process Gas Option for Slot 7
o Optional HP Gas Stick, Unit MFCs
o Stainless Steel UES Exhaust
o Thru-Beam Wafer Mapping
o SEMI E58 ARAMS Compliance
o SEMI E84 Compliance
o V80 Factory Automation Kit
o Wafer Viewing, Wafer ID (300mm backside OCR Semi M12 Reader)
o 4-Pole GFI Power Kit
o CE Marked Line Filter
o Reduced Brass Kit
o Teflon Toxic Exhaust Roughing Line
o Grounding Kit using Star Washers
o Customer supplied 50HZ Freq converters for CTI Cryos

 

Categories:
Attachments: 35 Files
Send Me More Details about this item.



Not the item you were looking for?

Ask SDI fabsurplus.com!

If you are looking for a specific piece of semiconductor equipment let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.

Inquiry

The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

sdi logo

Established in 1998, SDI has now built up an international network of sales agents and offices.

SDI has evolved into one of the largest semiconductor equipment brokerages by concentrating on professionalism, customer service and value for money.

Read more about us






View all FAB Implant Equipment for sale

Search for Varian items for sale

Search for Viista 80 HP items for sale


Ask SDI fabsurplus.com! If you can't find what you need, or are looking for a specific piece of semiconductor equipment. Let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.

Inquiry



sdi logo

Click here for all contact information.
SDI-Fabsurplus Srl Italy, and SDI-FABSURPLUS LLC. N. America




SDI fabsurplus.com works by using the latest technology to continuously monitor the used equipment market place.
If you want to join our mailing list, please send click on the button below to send an e-mail to subscribe to our monthly equipment news update.

Request monthly equipment news





We'd love to get your feedback about our website and our services!
Fill in the Feedback Form