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Applied Materials Centura AP DPS II Metal Metal Etch 2 Ch DPS2 and 2 CH ASP for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Applied Materials Centura AP DPS II Metal Metal Etch 2 Ch DPS2 and 2 CH ASP.
Please click on the "Send More Details" button at the end of the Centura AP DPS II Metal description, if you'd like to get more details, photos and specifications of this Metal Etch 2 Ch DPS2 and 2 CH ASP, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Applied Materials Centura AP DPS II Metal Metal Etch 2 Ch DPS2 and 2 CH ASP is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Applied Materials Centura AP DPS II Metal Equipment Details

SDI ID: 102660
Manufacturer: Applied Materials
Model: Centura AP DPS II Metal
Description: Metal Etch 2 Ch DPS2 and 2 CH ASP
Version: 300 mm
Vintage: Inquire
Quantity: 1
Sales Condition: as is where is
Lead Time: Inquire
Sales Price: Inquire
Comments:

Used, In Warehouse - Not Crated Tool has been de-installed and is stored in an off-site warehouse. .[Chamber A] Chamber type:DPS2 G1Gas config.(sccm)=MFC full scaleBCL3(200)/CL2(200)/O2(50)/N2(50)/SF6(300)/CHF3(50)/CF4(200)/AR(200)Source 13.56MHz, max 3000 WBias 13.56MHz Hz, max  1500 WLid Temp Control ~95℃ESC Temp Control ~85℃[Chamber B]Chamber type:DPS2 G1Gas config.(sccm)=MFC full scaleBCL3(200)/CL2(200)/O2(50)/N2(50)/SF6(300)/CHF3(50)/CF4(200)/AR(200)Source 13.56MHz, max 3000 WBias 13.56MHz Hz, max  1500 WLid Temp Control ~95℃ESC Temp Control ~85℃[Chamber C]Chamber type:ASPGas config.(sccm)=MFC full scaleCF4(50)/O2(10000)/N2(1000)H2O Vapor 3000sccmPower max 3000 W[Chamber D]Chamber type:ASPGas config.(sccm)=MFC full scaleCF4(50)/O2(10000)/N2(1000)H2O Vapor 3000sccmPower max 3000 W

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