SDI fabsurplus.com is pleased to announce the availability of the following listed used Aviza RVP-300 Vertical Furnace Atmospheric Oxide Anneal Process.
Please click on the "Send More Details" button at the end of the RVP-300 description, if you'd like to get more details, photos and specifications of this Vertical Furnace Atmospheric Oxide Anneal Process, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Aviza RVP-300 Vertical Furnace Atmospheric Oxide Anneal Process is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||Vertical Furnace Atmospheric Oxide Anneal Process|
|Sales Condition:||as is where is|
ANNEAL System, General SpecificationHeater element Model�� �FURNACE,ATM -APLProcess Condition�� �APMaximum Operating Temperature�� �1200cN2 Load Lock�� �YesWafer Type�� �300 SEMI STD-NotchQty. of Production Wafers�� �120 slots LadderBoat Operation�� �2 Boat TypeSoftware Version�� �AVP 2.7.1 VSystem, FurnaceLoading Area Light�� �White�� �2Force Air Cooiling system�� �installed�� �1Side Maintenance�� �None�� �NoneO2 Density control�� �0-100ppm�� �1N2 Boat shower wafer cooling�� �None�� �1Furnace Temperature Controller�� �SSPC control�� �9System, Wafer/Carrier HandlingCarrier Type�� �12" FOUPCarrier Stage Capacity�� �16 FOUPWTU Type�� �GenMarkWTU alignment�� �GenMarkWTU Teaching method�� �Pre-aligner / dual beamSystem, Gas DistributionIGS Maker / Type�� �FujikinIGS MFC Maker / Type�� �AERAIGS Press Transducer Maker / Type�� �MykrolisSystem, Exhaust Specification�� �Vacuum Gage - 2 torr�� �AP tool�Vacuum Gage - 10 torr�� �AP tool�Vacuum Gage - 100 torr�� �AP tool�Vacuum Gage - 1000 torr�� �AP tool�Main Valve�� �AP tool�Pump Maker/Model�� �AP tool�Low vacuum valve�� �AP tool�Trap�� �AP tool�Vacuum Pressure Controller�� �AP tool�System, Reactor�� �Process Tube (LP)�� �NoneOuter/Inner Tube Material (LP)�� �NoneInner Tube Type (AP)�� �Quartz SingleInner T/C�� �12FT/HONEYWELLBoat Materail/Type�� �SicBoat Rotation�� �NonePedestal Materail/Type�� �QuartzAuto Shutter�� �installedSystem, Power Distribution�� �Voltage 3phase�� �480VACVoltage Single-phase�� �NoneFrequency�� �60Hz�System, User Interface�� �Operation Panel�� �Keyboard & ScreenIndicator Type�� �MouseOperation software type�� �LinuxGas Leak Detector�� �Gas Leak Detector Materail/Type�� �GasTechSystem, Fixture List, Gas�� �IGS maintenance Fixture�� �NoneVacuum Gauge�� �NoneDamage/Missing parts listDry pumps, quartz and profile TC are not included with sales
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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