SDI fabsurplus.com is pleased to announce the availability of the following listed used JUSUNG Cyclone Plus ALD (Atomic Layer Deposition).
Please click on the "Get Quote" button at the end of the Cyclone Plus description, if you'd like to get a quotation, photos and specifications of this ALD (Atomic Layer Deposition), and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This JUSUNG Cyclone Plus ALD (Atomic Layer Deposition) is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||ALD (Atomic Layer Deposition)|
|Sales Condition:||as is where is|
Transfer Module Platform-. Two Load Lock-. Wafer Align Chamber -.Auto Door-. 3 Load Port Module- 6 Sided Transfer Chamber-. Controller for TMCCluster Tool Control Main Power Box Control RackAuto Wafer Centering systemSemi-batch ALD Al203 Reaction Chamber Process chamber -. Aluminum chamber (5 wfs loading) -. Wafer up/down Ass'y-. Space Divided Plasma KitVacuum Ass'yGas Jungle Box-. In-situ cleaningNew heating systemDisk RPM ControlSoftware & ControllerHeat Exchanger control interfaceO3 generator control interface2LDS SystemSemi-batch ALD Al203 Reaction ChamberProcess chamber -. Aluminum chamber (5 wfs loading) -. Wafer up/down Ass'y-. Space Divided Plasma KitVacuum Ass'yGas Jungle Box-. In-situ cleaningNew heating systemDisk RPM ControlSoftware & ControllerHeat Exchanger control interface2LDS SystemOptions & CESSwap KitO3 GeneratorAuto refill system interface2 * Source Canister (4L) 2* Source Canister (3.2L) Additional cost for increasing of 03 concentrationDry Pump FDC function2* Powder Trap
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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