SDI fabsurplus.com is pleased to announce the availability of the following listed used KLA-Tencor Surfscan SP2 Wafer Particle Measurement System.
Please click on the "Send More Details" button at the end of the Surfscan SP2 description, if you'd like to get more details, photos and specifications of this Wafer Particle Measurement System, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This KLA-Tencor Surfscan SP2 Wafer Particle Measurement System is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||Wafer Particle Measurement System|
|Sales Condition:||as is where is|
Installed - In Production STANDARD SPECIFICATIONS Windows System: Windows XP SP3Main S/W: NGS 5.4 SR3 HF3Wafer Size: 300mm SEMI NotchCarrier-3 AdvanTag SW CID, Phx, TDK (load port)-8 user-configurable LEDs to display the loadport status- Load/unload button for manual delivery hand-off- Cassette / wafer mapping which allows the tool to generate a wafer map of the 300mm FOUP and detect wafer presence, empty slots and cross-slotted wafer. The wafer map can be displayed on the user screen and sent to a SECS host.Facilities-Power: 208 VAC, 3W-N-CDA: > 28.3 Nl/min, > 6.6791 kg/cm2-Vac: > 28.317 l/min, > -700 mm HgChamber-Powder Coat Panels Kit-200/300mm Vacuum option-Optical FilterLoad port: Vacuum 300mm Dual FIMSApplication-2mm Edge Exclusion-Oblique Incidence Illumination (High / Standard / Low)-Normal Incidence Illumination (High / Standard / Low)-Enhanced XY Coordinates-IDM SP2-Standard Classification package-LPD-N Classification-LPD-ES classification-Grading and Sorting-Spatial Filter (20 degree)-Spatial Filter (40 degree)-Spatial filter (rough films)-Spatial filter (Back)-High Sensitivity Inspect Mode-High Throughput Inspect ModeOptions-Haze-Haze Normalization-Haze Analysis-IC/OEM Mfg Surf Quality RecipeWafer size: 300mm XY Calibration Wafer with first ArticleHARDWARE CONFIGURATIONOthers: 5 Color Light Tower (RBYGW)Ethernet-NFS Client-E84 enabled for OHT & AGV/RGV-E87 (Based on E39)-GEM/SECS and HSMS-E40/ E94/ E90 / E116Handler: Secondary UI, Phoenix, SP2Main Computer-Intel®Xeon™ CPU 3.20GHz-3.5 GB RAM Memory-DVD- ROM-Mouse-Keyboard-3.5" Floppy-NGS application softwareFEC computer-Intel®Pentium®4 CPU-1.99 GB RAM MemoryDamage/Missing parts list
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The data provided herein is not an offer capable of acceptance.
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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