SDI fabsurplus.com is pleased to announce the availability of the following listed used Novellus GAMMA Express Stripper/Asher.
Please click on the "Get Quote" button at the end of the GAMMA Express description, if you'd like to get a quotation, photos and specifications of this Stripper/Asher, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Novellus GAMMA Express Stripper/Asher is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Sales Condition:||as is where is|
Installed - In Production Tool system is upgraded to from GAMMA 2130 GAMMA ExpressSTANDARD SPECIFICATIONSSoftware Revision : V4.20B10Factory Automation: OHT PIO SensorWafer Size: Diameter 300+/- 0.05mmCarrier: FOUP (Comply with SEMI E47.1 (25wafers))Inter Face: 3 carrier stage (Continuous flow operation)Online Connection: GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx)Platform Type: Version 2UPS on system: YesEarth Leakage Breaker: YesMonitor: 2(Flat Panel Display Touch Screen Type,�2(QNS /WIN) ; Front,�1(WIN) ;back�Signal Tower: Red/Yellow/Green/Blue (Upper Left of Front x1 & Upper right section of loader on�maintenance side x1)"EMO: Front x1, Rear x2PM to Pump Interconnect: 50 ftPower box for pump: MDPInter Locks: External (When the I/L signal is received from Factory, gas valves are closed)Configuration SpecificationsMF: Gamma 2130 upgread to xPREtch Chamber: Gamma 2130/ Position 1 to position 6RF Cable Length: RFG to Matcher, 30 ft�Generator: MKS GHW-50A, Max power 5000W + RF match COMET 5KW HI-THLD (XPR type)chamber kit : StandardWafer Lift Mechanism : FinO-Rings : Fluorosilicon/TEVGate Valve: Barrier seal doorGas System Type: 4 Gas ConfigurationFOUP / ATM Robot / Backend: 3 FOUP / YASKAWA�MP2300i controller / YASKAWA�MP2300i controllerFactory Automation: OHT PIO SensorCassette ID: Hermos Carrier IDUser Interface Options: Side and front Monitor UIInterconnect Cables TM_Subpanel: TM to Subpanel, 100ftConditioning Station: Conditioning StationNon Standard Feature: StandardGas 1: Gas/ mfc size/ mfc model: STEC SEC-Z500 / SEC-Z512/Z522��O2/50 SLMGas 2: Gas/ mfc size/ mfc model: STEC SEC-Z500 / SEC-Z512/Z522��N2/7 SLMGas 3: Gas/ mfc size/ mfc model: STEC SEC-Z500 / SEC-Z512/Z522�4%H2N2/20SLMGas 4: Gas/ mfc size/ mfc model: STEC SEC-Z500 / SEC-Z512/Z522�CF4/50 SCCMDamage/Missing parts list1.LP1 communication fail2.FFU Fan fault
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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