SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL Tokyo Electron CLEAN TRACK LITHIUS Multi Block (Resist Coater/Developer).
Please click on the "Send More Details" button at the end of the CLEAN TRACK LITHIUS description, if you'd like to get more details, photos and specifications of this Multi Block (Resist Coater/Developer), and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL Tokyo Electron CLEAN TRACK LITHIUS Multi Block (Resist Coater/Developer) is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Manufacturer:||TEL Tokyo Electron|
|Model:||CLEAN TRACK LITHIUS|
|Description:||Multi Block (Resist Coater/Developer)|
|Sales Condition:||as is where is|
•300mm•2005 vintage•4x FOUP (25 wafers)•Left to Right•High speed IBFM•4x Coat ModulesoRGEN02 pumps (4ml type)o7x resist nozzlesoResist temp controloTop side EBRoRRC pre wet•4x Develop Moduleso1 SH nozzleoTop side rinseoDevelop temp control•2x ADH•4x HCP (high speed CPL)•4x LHP (low hot plate)•9x CPHP (chilling high precision hot plate)•2x WCPL (water chilling plate)•1x IHCP•1x CWH (cup wash holder)•1x BWEE•2x TRS•2x Cup T&H control units•1x Develop External chemical box•ASML interface
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The data provided herein is not an offer capable of acceptance.
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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