SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL Tokyo Electron TELFORMULA ALD High-K Vertical Furnace.
Please click on the "Send More Details" button at the end of the TELFORMULA ALD High-K description, if you'd like to get more details, photos and specifications of this Vertical Furnace, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL Tokyo Electron TELFORMULA ALD High-K Vertical Furnace is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Manufacturer:||TEL Tokyo Electron|
|Model:||TELFORMULA ALD High-K|
|Sales Condition:||as is where is|
Tool is located in clean room. Tool is still powered on and wafers are not running on it.Buyer is responsible for arranging disassembly and rigging for tool.Hard Disk DRIVE WILL BE REMOVED FROM TOOL.Tube Material:QuartzBoat Material:QuartzProduction wafes:50Pressure control:APC Valve�Process Gas:TEMAZ(F.S:1.0sccm),TMA(F.S:300sccm),O3(F.S:20slm,200g/m3),N2,OCTANEVaporizer Maker:STEC(TMA,TEMAZ)Vaporizer TYPE:LSC-F530(TMA),TL-2011(TEMAZ)MFC Maker:STECMFC Model:Z500seriesProcess Temp:200-300degOzonizer Maker:TMEICOzonaizer Type:OP-250Pump Maker:EDWARDSPump Type:iXH1820Missing or damaged parts: none.
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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