SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL Tokyo Electron TELFORMULA ALD High-K Vertical Furnace.
Please click on the "Send More Details" button at the end of the TELFORMULA ALD High-K description, if you'd like to get more details, photos and specifications of this Vertical Furnace, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL Tokyo Electron TELFORMULA ALD High-K Vertical Furnace is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Manufacturer:||TEL Tokyo Electron|
|Model:||TELFORMULA ALD High-K|
|Sales Condition:||as is where is|
General Specification: Safety Specification: SEMI S2-0703Heater Model: Mid-Temp. VCM-50-012LCompatible with Atmoshpheric Process: NoneMaximum Operating Temperature (C): 300ART Control: YesN2 Load Lock: YesWafer Type: 300mm-Si SEMI STD-NotchQty. of Production Wafers: 50Software Version (WAVES): Ver.2.12 R008Seismic Isolation Configuration: NoneFurnace Spec, Furnace: Dewpoint Meter for N2 LL: NoneLoading Area Light: White (LED)RCU Duct Length FNC - RCU: 20mIonizer (maker/model): NoneChemical PreFilter-Acid: NoneChemical PreFilter-Alkali: NoneChemical PreFilter-Hydrocarbon: YesChemical PreFilter-Location: FNC TopSide Maintenance: NoneFurnace Spec, Wafer/Carrier HandlingCarrier Type: FOUP/25slots, SEMI STDFOUP Maker/Model: Entegris / A300Carrier Stage Capacity: 10Info Pad A,B: PinInfo Pad C,D: PinFork Material: Al2O3Furnace Spec, Furnace FacilitiesFurnace Exhaust Connection Point: Top ConnectionCooling Water Connection Point: Bottom ConnectionElectric Fan Exhaust Facility Connection: Not InstalledAir Intake Point: TopGas Spec, Gas Distribution SystemIGS Type: IGS 1.125"W-Seal rail-mountIGS Maker: FujikinTubing Bends: Bend (Less than 90deg)IGS Final Filter: PALLIGS Regulator: CKDIGS MFC (Maker/Type): HORIBA STEC / DigitalIGS MFC for low flow N2 purge when cleaning: HORIBA STEC / SEC-G111IGS Press. Transducer: Nagano"Liquid Source Vapor System Maker / Model: For TMA HORIBA STEC / LSC-F530For ZAC HORIBA STEC / TL-2014"Auto-Refill System- TMA: Air Lequide / CANDIAuto Refill System- ZAC: Air Lequide / CANDIAuto Refill System Provider: Provided by customerRefill System Tubing interconn: Provided by customerRefill System Tubing interconn: Provided by customerOzone Delivery System: OP-500H-RE1Ozone Delivery System Provider: Provided by customerWater Vapor Generator (WVG): NoneInjector O-ring material: DU353Gas Spec, Gas FacilitiesIncoming Gas Connection Point: Bottom ConnectionGas VENT Connection Point: Bottom ConnectionExhaust VENT Connection Point: Bottom ConnectionGas Unit Exh Connection Point: Bottom ConnectionExhaust SpecificationVacuum Gage - Press Ctrl: MKS (Hot) Capacitance ManometerVacuum Gage - Press Monitor (133kPa): MKS (Hot) Capacitance ManometerVacuum Gage - Pump Monitor: MKS (Hot) Capacitance Manometer"Main Valve: CKD / Valve: VEC-VH8-X0110 Controller: VYX-0279-CONT"Pump Maker/Model: EDWARDS / iXH1820Pump Provided by: Provided by customerAbatement System Type: Burning TypeAbatement System (Maker/Model): EDWARDS /TPU（Zenith)Abatement System Provider: CustomerN2 Dilution Unit Provided by: No NDUPump Power: Customer's Facility ProvidedPump Control Unit Setting Location: NonePump-FNC Vacuum Piping Provide: CustomerExhaust Pressure Control (AP): N/AExhaust Pressure Controller (AP) Maker / Model: N/AExhaust Box: Wide Type (1200mmW)Heating construction for Facility Exhaust: Between Pump and Abatement SystemHeating construction for Facility Exhaust provided by: CustomerExhaust O-ring material: DU353Power Specification, Power dist SystemVoltage 3phase: 400VAC ＆ 200VAC(for Ozonizer)3phase connection type: Star ConnectionVoltage Single-phase: NoneSingle-phase connection type: N/AFrequency: 60HzWattmeter: NoneControl Power UPS provided by: NoneControl Power UPS type: N/AUPS Input/Output Voltage: N/APower Specification, Cable LengthPower Cable Input Entrance Loc: Power Box TopOther power requirement: NoneFNC - Power Box: 30mFNC - RCU: 30mPower Box - RCU: 30mPower Box - Pump Unit: 30mPower Box - Refill System: 30mPower Box - WVG CTRL Unit (if used): N/APower Box - Abatement System (if used): N/AGas Detector Box - FNC (if used): N/AGas Detector Box - Power Box (if used): N/AOption Box - FNC (if used): N/AOption Box - Power Box (if used): N/AInterface Specification, Factory Automation SystemHost Communications: Comply with GJGEquipment Host I/F Connection: Power Box Top HSMS (10Base-T/100Base-TX)Ingenio: YesOHT Capability: YesAGV Capability: NoneRGV Capability: NonePGV Capability: NoneLoad Port Operation: Lower + UpperPIO I/F Location: FNC TopPIO Provided by: TELPIO Maker/Model: Hokuyo / DMS-HB1-ZCarrier ID Reader Writer Type: RFCIDRW Lower L/P: ReadCIDRW Upper L/P: ReadCIDRW FIMS: Read/WriteCIDRW Maker/Model: HOKUYO DMS-HB1-Z seriesCIDRW Provided by: CustomerCIDRW Tag Orientation: VerticalEEC (Equipment Engineering Cap: NoneCustomized Management Signals: PT/WaterInterface Specification, User InterfaceSignal Tower Model: LCE SeriesSignal Tower Colors: Red / Blue / Yellow / GreenSignal Tower Location: Front for 10 Stocker (Left)Front Operation Panel: YesMMI and Gas FlowChart: Gas Box & Front Operation Panel InstalledLight Curtain: NoneIndicator Type: HOKUYO DMS-HB1-Z seriesOperator Switch: Operator Access / White Cover with Orange LightPressure Display Unit: MPa / TorrCabinet Exh Pressure Display: PaWarning Label: Chinese/EnglishSpecial Label: NoneDamage/Missing parts listNone reported,
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