SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL Tokyo Electron Telius SP-305 SCCM Dielectric Etch, Oxide Process, 4 CHAMBER SCCM.
Please click on the "Get Quote" button at the end of the Telius SP-305 SCCM description, if you'd like to get a quotation, photos and specifications of this Dielectric Etch, Oxide Process, 4 CHAMBER SCCM, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL Tokyo Electron Telius SP-305 SCCM Dielectric Etch, Oxide Process, 4 CHAMBER SCCM is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Manufacturer:||TEL Tokyo Electron|
|Model:||Telius SP-305 SCCM|
|Description:||Dielectric Etch, Oxide Process, 4 CHAMBER SCCM|
|Sales Condition:||as is where is|
Process: OX Standard Specifications Software Revision: Linux 5.75 Rev 001Lot Stability Dummy SW: Software for running lot stability wafer.OEE WPH Software: YesGEM SEC Revision: TBDWafer Size: Diameter 300+/- 0.20mm(SEMI M1.15), NotchCarrier: FOUP (Comply with SEMI E47.1 (25wafers))Inter Face: 5 carrier stage (Continuous flow operation) with Semi compliant MENV and FIMS assembliesOnline Connection: GEM / CIM GJG (Hardware Interface : Ethernet 100Base-Tx)Interface A: YesUtility Box: Regulator : Air/AR2500(SMC), N2/SQ-420E(VERIFLO), He/SQMICRO(VERIFLO)Utility Box: Manual Valve : OGD20V-6RM-K / OGD10V-4RM-K (CKD)Utility Box: Pressure Gauge : Bourdon GaugeLoader Mod Corrosion Prevent: NO, without Corrosion PreventLoad Lock Pressure Monitor: Pressure Switch : VSA100A (INFICON)Load Lock Pressure Monitor: Pirani gauge : TTR211S LEYBOLD)Load Lock Pressure Monitor: CM : 626A01TDE (MKS)Maintenance Monitor: 2 (Flat Panel Display Touch Screen Type)Water Leak Detector: 5 (LM;1, each PS;1)Signal Tower: Red/Yellow/Green/Blue (Upper Left of Front x1 & Upper right section of loader on maintenance side x1)Data Back up: USB& MOEMO: Front x3, Rear x6Cable Length: One 15m and one 16m (Interconnection, RF cables)Inter Locks: External (When the I/L signal is received from Factory, gas valves are closed)Fittings: No brass fittingsSupporting Remote UnitsChiller: UBRPD5A-2T?Coolant: Lower:FC3283, Upper:FC40Chiller Hose: BRINE HOSE 15/14MHandy Maintenance Controller: LCD DISPLAY UT3-TLN21-ARF Generator TOP: AGA-50B2RF Matcher TOP: AMN-50B2RF Generator Bottom: WGA-50EMatching Controller: WMN-50H6(2MHZ/5KW)(PS3)Pen Record Box: 2L80-00212-12Loader Module: SELME2112ZS22-AD5LOAD PORT: NO,Bolts-L typeDRIVE UNIT:SBX92102928READER OPTICAL: ISS-1700-1TELCCCarrier ID Reader: NO,V640series+V700-L22 (Omron)APC: 12 INCH (320MM)Hardware ConfigurationProc Chbr 1,2,3,4: SCCM Oxide; Y203 CoatingChamber hardware: FCCEndpoint type: SE2000iiESC type: Ceramics ESCwith STD VppFocus ring: 3.4mmThunderwall He Gas Inlet: Ceramic Thunderwall with Ceramic pusher pinsPolished focus ring: OFC lower insulator: FC lower insulator w/quartz upper ring shieldMagnet Shield: OOring for Chbr Body-Depos: Armorcrystal, Chemraz SC657CEL Body ASSY: Brine Control ModeTMP: TMP-3403LMC-T4(VG300) (SHIMADZU)TMP Back Pressure Monitor: 51A11TGA2BA003 (MKS)Dry Pump: ESR80WN, KEG approvedFinal Valve, Heater: Valve; AGD21V-6RM-GWL4 (CKD)Filter: Filter; CEP-TM_HL-VR-03PB (Toshiba Ceramic)APC: Pendulum Motion Dia., 320mm(VAT), R.T.~90degPressure Monitor: C/M (Process Monitor) : 627BRETDD2P (MKS), 45deg, 30PaPressure Monitor: C/M (Self Check) : 627B11TDC2P (MKS), 45deg, 1330PaPressure Monitor: B.A. Gauge (CM Calibration) : BPG400 (INFICON), 2.0x10-5 ~ 0.1PaPressure Monitor: N,41A13DGA2AA040 (MKS), no process impactPressure Monitor: Pressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gasGas Box ConfigurationGas line 1- N2 1000 sccm-AERA FCD985CT-BFGas line 2- C4F8 200 sccm-AERA FC-D985CT-BFGas line 3- Ar 2000 sccm-AERA FC-D985CT-BFGas line 4- O2 50 sccm-AERA FC-D985CT-BFGas line 5- CH2F2 30 sccm-AERA FC-D985CT-BFGas line 6- CHF3 200 sccm-AERA FC-D985CT-BFGas line 7- CF4 200 sccm-AERA FC-D985CT-BFGas line 8- C4F8 50 sccms-AERA FC-D985CT-BFGas line 9- C3F8 50 sccms-AERA FC-D985CT-BFGas line 10- C4F6 50 sccm-AERA FC-D985CT-BFGas line 11- O2 1000 sccm-AERA FC-D985CT-BFGas line 12- Ar 500 sccm-AERA FC-D985CT-BFPurge: N2 (Process Grade N2)Filter: CNF1004USG4 (Nihon Pall)Regulator: SQMICRO (VERIFLO)Filter (N2): CNF1004USG4 (Nihon Pall)Valve: Primary side(Utility-MFC):Mega mini (FUJIKIN)Valve: Secondary side(MFC-PC):Mega one (FUJIKIN)Piping: Dual Piping (for Gas leak containment, Gas box to Final valve & Exhaust through Gas box)Gas Leak Detection Port: 5 Ports (6.35mm, Swagelok L-type)Final Pressure Switch: 51A (MKS)Pressure Gauge: Bourdon
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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