SDI fabsurplus.com is pleased to announce the availability of the following listed used Ushio UMA-2003 UV Cure System.
Please click on the "Send More Details" button at the end of the UMA-2003 description, if you'd like to get more details, photos and specifications of this UV Cure System, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Ushio UMA-2003 UV Cure System is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||UV Cure System|
|Sales Condition:||as is where is|
Installed - In Production Model: UMA-2003-H120FModel: UMA-2003-H120F-IM01Process: 6500-35 GATE RESIST CUREBasic System: UMA-2003-H120F UVC, Qty 1Wafer Size: Capable of processing 300mm +/- 0.05mm (SEMI M28), 775 +/- 25um, notched wafers, Qty 1Carrier: 2 FOUP, Qty 1(TDK TAS-300)Interface: 2 FOUP (Continuous flow operation). With Semi compliant MENV and FIMS assembliesCarrier ID: Bar code, Qty 2Communications Protocol: HSMS, Qty 1EMO: Display and Main Unit (including attached Mini-environment) have front and back EMO, LAMP POWERSUPPLY UNIT FRONT SIDE, Qty 4Interlocks: Power Supply Unit and Mini-environment have panel (cover) interlocks. Open lamp houseCable Lengths: 15 meter cables run between the main unit and the Lamp?Supply unit, Qty 1Signal Tower: Red/Yellow/Green, Qty 1CL plate: Hp on the CL plate(with vacuum), Qty 1Detection sensor(port1,port2): The FOUP up and down a transmission sensor Installation, Qty1LAMP POWER SUPPLY?UNIT: LAMP?POWER SUPPLY?UNITCHILLER?UNIT: Qty 1ROBOT?Controller?Unit: Qty 1Bulk Gas: CDA Peak Flow=280, Ave Flow=5.4, Static pressure0.5?0.6M??Bulk Gas: N2?FLOW10?50????n, Static pressure0.5?0.6MpaBulk Gas: Vacuum?-80???,Flow?40L/MinElectric: 200V�10V? 3PH 50/60Hz?175A? for ToolElectric: 200V�10V? 3PH 50/60Hz?33A? for Chiller UnitWater supply: Temperature?10?25? Flow? 6L/Min(over) Pressure?0.5?0.6Mpa for toolsWater supply: Temperature?25?(following), Flow?60L/Min(over), Pressure?.1Mpa(over)for Chiller unitExhaust: 6m3/minLamp cooling?20m3/minLamp power supply Exhaust?7m3/min Qty 3Missing/Damaged Parts ListNone
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