SDI fabsurplus.com is pleased to announce the availability of the following listed used VON ARDENNE XEA NOVA Horizontal Sputtering System for Solar Panels.
Please click on the "Send More Details" button at the end of the XEA NOVA description, if you'd like to get more details, photos and specifications of this Horizontal Sputtering System for Solar Panels, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This VON ARDENNE XEA NOVA Horizontal Sputtering System for Solar Panels is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||Horizontal Sputtering System for Solar Panels|
|Sales Condition:||as is where is|
In Fab - Disconnected, Decontaminated, Not Deinstalled IN-LINE GLASS COATING SYSTEM Located in Clean roomI ncluding 12 Sputter sections & towing, Transport Cabinet, Chiller & Pump, Power System, ITO Clamps...etc XEAnova 5.5 WAFER COATING SYSTEM TECHNICAL DATASubject to change without notice due to technical improvement.GENERAL FEATURESThroughput ≤ 5500 substrates/hour for M6 wafersSubstrates silicon wafers, metal plates, polymer films, othersSubstrate size all common formats: M2, M4, M6, M10 and M12Substrate thickness ≤ 3 mmCoating area on carrier ≈ (1 x 1.7) m2 , e.g. (6 x 9) for M6 wafersSPUTTERING SYSTEMMagnetron type single or dual rotatableSputter arrangement sputter up and sputter downDeposition type DC, pulsed DC, ACNumber of independent process unlimitedGases and media e.g. Ar, O2 , N2 , H2 O, XTarget utilization > 80 %, depending on process & materialOPTIONAL PROCESS FEATURESSubstrate heatingPre-treatment (e.g. Ion etching …)Alternative deposition technologies upon requestOPTIONAL FEATURESAutomated substrate loading & unloadingAutomated carrier return systemControlled heating and cooling unit (CHU)Dry air supply (CDA)Carrier storage racksOthers on requestAUTOMATION OPTIONSConfiguration single- or double-endAutomation system fully automaticSubstrate feeding cassette, box, other
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