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Oxford Instruments Plasmalab System 100 PECVD TEOS with Load Lock for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Oxford Instruments Plasmalab System 100 PECVD TEOS with Load Lock.
Please click on the "Get Quote" button at the end of the Plasmalab System 100 description, if you'd like to get a quotation, photos and specifications of this PECVD TEOS with Load Lock, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Oxford Instruments Plasmalab System 100 PECVD TEOS with Load Lock is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Oxford Instruments Plasmalab System 100 Equipment Details

SDI ID: 103007
Manufacturer: Oxford Instruments
Model: Plasmalab System 100
Description: PECVD TEOS with Load Lock
Version: 200 mm
Vintage: 01.06.2001
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

Oxford Instruments
Plasmalab System 100
PECVD TEOS with Load Lock
Wafer Size: 200 mm
Process     PECVD & TEOS
Loadlock Pump Alcatel APT 80 Turbo, ACT 200T Controller
Number of Gas Inputs     Ten Gas
Advanced Energy LF-5--RF Generator
Advanced Energy RFX 600A--RF Generator
Process Gases
  CF4 80%, O2 20%--500 SCCM---MKS 1179A
  Ar 90%, PH3 10%--50 SCCM---MKS 1479A
  Ar 90%, GeH4 10%--50 SCCM---MKS 1479A
  Ar 90%, BeH6 10%--50 SCCM---MKS 1479A
  N2 95%, SiH4 5%--1 SLM---MKS 1479A
  NH3 100%--100 SCCM---MKS 1479A
  N2O 100%--3 SLM---MKS 1179A
  N2O 100%--200 SCCM  MKS 1179A
  N2 100%--2 SLM MKS 1179A
  O2 100%--500 SCCM MKS 1179A

Includes:
-Cleaning and recalibration of MFCs
-Chamber Inplace wet cleaning.
-System will be fully functional and source inspection to be performed at our facility with inert gases
Power setup: 208 V 25.6 A 50/60 Hz 3 Phase
CE Marked


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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