SDI fabsurplus.com is pleased to announce the availability of the following listed used Oxford Instruments Plasmalab System 100 PECVD TEOS with Load Lock.
Please click on the "Send More Details" button at the end of the Plasmalab System 100 description, if you'd like to get more details, photos and specifications of this PECVD TEOS with Load Lock, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Oxford Instruments Plasmalab System 100 PECVD TEOS with Load Lock is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Model:||Plasmalab System 100|
|Description:||PECVD TEOS with Load Lock|
|Sales Condition:||as is where is|
Advanced Energy LF-5--RF Generator Advanced Energy RFX 600A--RF Generator Process Gases: CF4 80%, O2 20%--500 SCCM---MKS 1179A Ar 90%, PH3 10%--50 SCCM---MKS 1479A Ar 90%, GeH4 10%--50 SCCM---MKS 1479A Ar 90%, BeH6 10%--50 SCCM---MKS 1479A N2 95%, SiH4 5%--1 SLM---MKS 1479A NH3 100%--100 SCCM---MKS 1479A N2O 100%--3 SLM---MKS 1179A N2O 100%--200 SCCM MKS 1179A N2 100%--2 SLM MKS 1179A O2 100%--500 SCCM MKS 1179A
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