SDI fabsurplus.com is pleased to announce the availability of the following listed used Plasma-Therm 73/74 PECVD, Plasma Etch, Reactive Ion Etch.
Please click on the "Send More Details" button at the end of the 73/74 description, if you'd like to get more details, photos and specifications of this PECVD, Plasma Etch, Reactive Ion Etch, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Plasma-Therm 73/74 PECVD, Plasma Etch, Reactive Ion Etch is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||PECVD, Plasma Etch, Reactive Ion Etch|
|Sales Condition:||as is where is|
Number of Gas Inputs: 8 Gases. System Features: RF Plasma RF-5 generator MKS Type 252A exhaust valve controller Watlow Series 808 electric heater control RF Plasma AM-5 Automatching network (700) Leybold WSU251/D65BCS roots pumping system Tek-Temp TKD100/4000 chiller Brooks 5850E Mass Flow Controllers: Etch: N2(100 sccm),CHF3(200 sccm), Cl2(100 sccm), BCl3(100 sccm) Dep: N2(2000 sccm),N2(2000 sccm),N2(2000 sccm), NH3(sccm)
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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