SDI fabsurplus.com is pleased to announce the availability of the following listed used Tepla 4011 Planar Plasma Etcher.
Please click on the "Send More Details" button at the end of the 4011 description, if you'd like to get more details, photos and specifications of this Planar Plasma Etcher, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Tepla 4011 Planar Plasma Etcher is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||Planar Plasma Etcher|
|Sales Condition:||as is where is|
Specification Process chamber: Material Aluminum Width 820 mm Height 138 mm Depth 706 mm Chamber door: Aluminum, quartz inspection window with ultraviolet and high-frequency radiation protection Vacuum system Process pressure: Approx. 0.1 - 1 mbar Gas and vacuum piping: High-grade steel, ¼“ Swagelok connections as well as aluminum KF components Gas supply: 2 - 4 separate gas ducts (2 option, metering by means of mass-flow controller Venting: By means of solenoid valve and series throttle valve Vacuum: Ultimate pressure attainable: Approx. 0.01 mbar Vacuum measurement: Capacitive pressure gauge measuring range from 0.01 to 10 mbar The suction system is located in the bottom of the chamber. Electro-pneumatic valve DN 65 ISO-K in suction line. (Optional) Dimensions: Height: approx. 1720 mm Width: approx. 1615 mm Depth: approx. 950 mm Weight: approx. 800 kg
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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