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Ulvac NE 7800 Ferroelectric Etcher for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Ulvac NE 7800 Ferroelectric Etcher.
Please click on the "Send More Details" button at the end of the NE 7800 description, if you'd like to get more details, photos and specifications of this Ferroelectric Etcher, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Ulvac NE 7800 Ferroelectric Etcher is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Ulvac NE 7800 Equipment Details

SDI ID: 103018
Manufacturer: Ulvac
Model: NE 7800
Description: Ferroelectric Etcher
Version: 200 mm
Vintage: Inquire
Quantity: 1
Sales Condition: as is where is
Lead Time: Inquire
Sales Price: Inquire
Comments:
Number of Chambers: 4 Process Capabilities: Ta, FeRAM, RRAM, MRAM Chamber 1 Description Preheat Chamber IR heater Range: 200 to 600 deg C Chamber 2 Description: ISM ICP Etch ESD Chuck, 450C, He BS Cooling Bias power: 2000W, 400 KHz Antenna power: 3000W, 13.56 MHZ UTM 1400FW/DIK Turbo Pump Ebara ESR20N Dry Pump Gases: Ar, O2, SF6, C4F8, HBr, CL2, BCl3, CHF3 Chamber 3 Description: ISM ICP Etch ESD Chuck, He BS Cooling Bias power: 2000W, 400 KHz Antenna power: 3000W, 13.56 MHZ UTM 1400FW/DIK Turbo Pump Ebara ESR20N Dry Pump Gases: Ar, O2, SF6, C4F8, HBr, CL2, BCl3, CHF3 Chamber 4 Description: Microwave Ashing Chamber Heated Chuck, 280C Bias power: 600W, 13.56 MHz Microwave power: 3000W, 2.45 GHz Endpoint detection Ebara ESR200WN Dry Pump Gases: 02, 02, H2/N2, CF4, N2
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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