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Oxford Plasmalab 800 Plus Plasma Enhanced Chemical Vapor Deposition�Automatic pressure control for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Oxford Plasmalab 800 Plus Plasma Enhanced Chemical Vapor Deposition�Automatic pressure control.
Please click on the "Send More Details" button at the end of the Plasmalab 800 Plus description, if you'd like to get more details, photos and specifications of this Plasma Enhanced Chemical Vapor Deposition�Automatic pressure control, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Oxford Plasmalab 800 Plus Plasma Enhanced Chemical Vapor Deposition�Automatic pressure control is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Oxford Plasmalab 800 Plus Equipment Details

SDI ID: 103040
Manufacturer: Oxford
Model: Plasmalab 800 Plus
Description: Plasma Enhanced Chemical Vapor Deposition�Automatic pressure control
Version: 200 mm
Vintage: Inquire
Quantity: 1
Sales Condition: as is where is
Lead Time: Inquire
Sales Price: Inquire
Comments:
Substrate electrode: 460mm with PID controlCan process wafer piecesShower head gas inlet optimized for PECVD400� C substrate tableSystem ComputerPC control with OPT software under WindowsSystem software controls all aspects of machine functionality and control of the process operationProduction mode: system will perform the following sequence without any operator intervention: chamber pumping, recipe running, chamber ventingProcess chamber includes a window panel giving a view on the process tableSystem ChillerEdwards IHX 610 Vacuum PumpAdvanced Energy LF-5 RF GeneratorPower: 208VAC, 3PH, 50/60 HZGas Box with MKS MFCs consisting of:1)� Gas: CF42)� Gas: N23)� Gas: N2O4)� Gas: SiH45)� Gas: N26)� Gas: O2�
Categories:
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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