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Applied Materials Endura II Aluminum Interconnect PVD CHC PC, CH1,5 SIP TI, CH 2 ALPS, CH 3,4 HTAl, CH5 RTDSTTN for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Applied Materials Endura II Aluminum Interconnect PVD CHC PC, CH1,5 SIP TI, CH 2 ALPS, CH 3,4 HTAl, CH5 RTDSTTN.
Please click on the "Send More Details" button at the end of the Endura II Aluminum Interconnect description, if you'd like to get more details, photos and specifications of this PVD CHC PC, CH1,5 SIP TI, CH 2 ALPS, CH 3,4 HTAl, CH5 RTDSTTN, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Applied Materials Endura II Aluminum Interconnect PVD CHC PC, CH1,5 SIP TI, CH 2 ALPS, CH 3,4 HTAl, CH5 RTDSTTN is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Applied Materials Endura II Aluminum Interconnect Equipment Details

SDI ID: 103058
Manufacturer: Applied Materials
Model: Endura II Aluminum Interconnect
Description: PVD CHC PC, CH1,5 SIP TI, CH 2 ALPS, CH 3,4 HTAl, CH5 RTDSTTN
Version: 300mm
Vintage: Inquire
Quantity: 1
Sales Condition: as is where is
Lead Time: Inquire
Sales Price: Inquire
Comments:
Current Condition: Installed - In Production - - Process:�REFLOWSPUT - - Chamber Position C- Process Type Reactive PC Chamber Position 1 & 5 - Process Type SIP Ti Chamber Position 2 - Process Type ALPS Chamber Position 3 & 4 - HT Al Chamber Position D - RT DSTTN - Process Type: Reactive PC Chamber position: C Shutter option: none chamber body (Al or SST): Al chamber body part number: 0040-76718 Slit valve seal (bonded or o-ring): Bonded Slit Valve door part number: 0040-84391 Target vendor: n/a Target No.: n/a Bakeout/idle power (%): n/a E-Mag Power Supply: n/a E-Mag Supply Vendor/Type: n/a OEM Part Number: n/a DC Power supply(AE-MDX????): n/a AMAT Part number Master: n/a OEM Part Number Master: n/a AMAT Part number Slave: n/a OEM Part Number Slave: n/a Generator Size : n/a Total DC (12 kwh,24kwh, etc): n/a Bias Generator : n/a AMAT Part number : n/a OEM Part Number: n/a Bias Generator Size: n/a Bias Generator Frequency: 13.56MHz and 2MHz(in one generator) Rf coil generator: COMDEL CDX-2000 Rf Match Box: 0010-21748/0010-52033 AMAT Part number : 0190-23308 OEM Part Number: n/a DC Coil Power Supply: n/a AMAT Part Number: n/a OEM Part Number: n/a Magnet rotation speed (rpm): n/a Magnet shim thickness: n/a Magnet type: n/a Magnet part number: n/a Magnet Serial Number (man. Date): n/a Target to magnet spacing(mm): n/a adaptor p/n: 0041-02659 Kit spacer upper p/n: n/a Kit spacer lower p/n: n/a upper shield p/n: Belljar 0040-55456 Treatment (Arc spray/Bead Blast): AL2O3 Treatment roughness (RA): n/a lower shield p/n: 0040-86514 Treatment (Arc spray/Bead Blast): Bead Blast Treatment roughness (RA): n/a inner(or mid) shield p/n: 0021-19342 Treatment (Arc spray/Bead Blast): Bead Blast Treatment roughness (RA): n/a shield clamp p/n: 0020-19258 Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a inner(or mid) shield clamp p/n: Insulator 0200-01903 Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a lower shield clamp p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a pedestal cover p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a dep ring p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a cover ring p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a insulator bushing p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a Shutter: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a pedestal type: n/a pedestal p/n: n/a heater spacing in mm: n/a heater spacing in steps: n/a min heater spacing in mm: n/a min heater spacing in steps: n/a max heater spacing in mm: n/a max heater spacing in steps: n/a Lift fingers p/n: n/a Lift hoop p/n: n/a Cryo restrictor(Y/N): n/a Cryo restrictor Part Number: n/a Max Cryo regen gas load (L): n/a Cryo gate valve (2/3 pos): Pendulum MFC 1 Gas: He MFC 1 Cal Factor: 1 MFC 1 Size: 300 MFC 1 Type: He MFC 1 Part Number: 0010-44160 MFC 2 Gas: Ar2 MFC 2 Cal Factor: 1 MFC 2 Size: 200 MFC 2 Type: Ar MFC 2 Part Number: 3030-13113 MFC 3 Gas: Ar MFC 3 Cal Factor: 1 MFC 3 Size: 20 MFC 3 Type: Ar MFC 3 Part Number: 3030-13116 MFC 4 Gas: (MFC6) H2 MFC 4 Cal Factor: (MFC6) 1 MFC 4 Size: (MFC6) 100 MFC 4 Type: (MFC6) H2 MFC 4 Part Number: (MFC6) 0015-02990 Chamber base pressure (T): 0.0000002 Chamber Rate-of-Rise(nTorr/min): 15000 Press. and ROR at Startup: not necessary Pressure Rise 1 min: not necessary Pressure Rise 5 min: not necessary Pressure Rise 10 min: not necessary Pressure vs. Gas Flow table: not necessary Process Ar Supply Pressure: 34.7 Process N2 Supply Pressure: 33.9 Cryo Regen N2 pressure: na Vent Ar pressure: 47.7 Optional Gas (He): 30.1 O2 (Ch. F): n/a H2(Ch. E): n/a H2(Ch. C): n/a CDA: 95.7 SLIT VALVE CDA: 85 Cooling Water Flow (GPM): 0.8 - Process Type: SIP Ti Chamber position: 1,5 Shutter option: yes chamber body (Al or SST): SST chamber body part number: 0040-98657 Slit valve seal (bonded or o-ring): Bonded Slit Valve door part number: 0040-84391 Target vendor: Nikko/Tosoh Target No.: TAG73 Bakeout/idle power (%): 0.4 E-Mag Power Supply: n/a E-Mag Supply Vendor/Type: n/a OEM Part Number: n/a DC Power supply(AE-MDX????): AE-Pinnacle AMAT Part number Master: 0190-08122 OEM Part Number Master: n/a AMAT Part number Slave: 0190-08122 OEM Part Number Slave: n/a Generator Size : 20kw Total DC (12 kwh,24kwh, etc): 40kw Bias Generator : ENI - GHW12Z AMAT Part number : 0190-25529 OEM Part Number: n/a Bias Generator Size: 1.25KW Bias Generator Frequency: 13.56MHZ, Rf coil generator: n/a Rf Match Box: 0010-02372/0010-52034 AMAT Part number : n/a OEM Part Number: n/a DC Coil Power Supply: n/a AMAT Part Number: n/a OEM Part Number: n/a Magnet rotation speed (rpm): 65 Magnet shim thickness: Ch1:1.25mm�Ch5:1.0mm Magnet type:�LP-3.7.4 Magnet part number: 0010-11228 Magnet Serial Number (man. Date): no need Target to magnet spacing(mm): 1.5�0.6 adaptor p/n: 0040-82921 Kit spacer upper p/n: 0040-76943 Kit spacer lower p/n: 0040-62877 upper shield p/n: 0020-23549 Treatment (Arc spray/Bead Blast): Arc Spray Treatment roughness (RA): n/a lower shield p/n: 0020-02344 Treatment (Arc spray/Bead Blast): Arc Spray Treatment roughness (RA): n/a inner(or mid) shield p/n: 0020-54777 Treatment (Arc spray/Bead Blast): Bead Blast Treatment roughness (RA): n/a shield clamp p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a inner(or mid) shield clamp p/n: 0020-08299 Treatment (Arc spray/Bead Blast): Arc Spray Treatment roughness (RA): n/a lower shield clamp p/n: 0020-02348 Treatment (Arc spray/Bead Blast): Arc Spray Treatment roughness (RA): n/a pedestal cover p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a dep ring p/n: 0200-08301 Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a cover ring p/n: 0021-17770 Treatment (Arc spray/Bead Blast): Arc Spray Treatment roughness (RA): n/a insulator bushing p/n: 0200-00590 Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a Shutter: 0021-25014 Treatment (Arc spray/Bead Blast): Bead Blast Treatment roughness (RA): n/a pedestal type: SLT FDR ECHUCK pedestal p/n: 0010-22985 heater spacing in mm: no concern heater spacing in steps: -55050 min heater spacing in mm: No Data min heater spacing in steps: No Data max heater spacing in mm: No Data max heater spacing in steps: No Data Lift fingers p/n: no concern Lift hoop p/n: no concern Cryo restrictor(Y/N): n/a Cryo restrictor Part Number: n/a Max Cryo regen gas load (L): 400 Cryo gate valve (2/3 pos): 3 Position MFC 1 Gas: N2 MFC 1 Cal Factor: n/a MFC 1 Size: 200 MFC 1 Type: N2 MFC 1 Part Number: na MFC 2 Gas: na MFC 2 Cal Factor: n/a MFC 2 Size: na MFC 2 Type: na MFC 2 Part Number: na MFC 3 Gas: Ar MFC 3 Cal Factor: n/a MFC 3 Size: 50 MFC 3 Type: Ar MFC 3 Part Number: na MFC 4 Gas: ArH MFC 4 Cal Factor: n/a MFC 4 Size: 20 MFC 4 Type: n/a MFC 4 Part Number: n/a Chamber base pressure (T): 2.0 e-8 Chamber Rate-of-Rise(nTorr/min): 522 Press. and ROR at Startup: no concern Pressure Rise 1 min: not necessary Pressure Rise 5 min: not necessary Pressure Rise 10 min: not necessary Pressure vs. Gas Flow table: not necessary Process Ar Supply Pressure: 30psi Process N2 Supply Pressure: 30psi Cryo Regen N2 pressure: 90 Vent Ar pressure: 40 Optional Gas (He): n/a O2 (Ch. F): n/a H2(Ch. E): n/a H2(Ch. C): n/a CDA: 88 SLIT VALVE CDA: 82 Cooling Water Flow (GPM): 8.9 - Process Type: ALPS Chamber position: 2 Shutter option: yes chamber body (Al or SST): SST chamber body part number: 0040-98657 Slit valve seal (bonded or o-ring): bonded Slit Valve door part number: 0040-84391 Target vendor: Nikko Target No.: TAG86 Bakeout/idle power (%): n/a E-Mag Power Supply: n/a E-Mag Supply Vendor/Type: n/a OEM Part Number: n/a DC Power supply(AE-MDX????): MKS DCG-200Z OPTIMA "AMAT Part number Master: 0190-22932-002 (40kw) -> 0190-26920 (20kw)" OEM Part Number Master: n/a "AMAT Part number Slave: 0190-22918-002 ->0190-28664 (20kw)" OEM Part Number Slave: n/a Generator Size : 20kw Total DC (12 kwh,24kwh, etc): 40kw Bias Generator : ENI GHW-12Z AMAT Part number : 0190-25529 OEM Part Number: na Bias Generator Size: 1250w Bias Generator Frequency: 13.56 Mhz Rf coil generator: n/a Rf Match Box: n/a AMAT Part number : n/a OEM Part Number: n/a DC Coil Power Supply: n/a AMAT Part Number: n/a OEM Part Number: n/a Magnet rotation speed (rpm): 65 Magnet shim thickness: na Magnet type: LP3.2.0 Magnet part number: 0010-26093 Magnet Serial Number (man. Date): no need Target to magnet spacing(mm): 1.5mm adaptor p/n: no data Kit spacer upper p/n: n/a Kit spacer lower p/n: n/a upper shield p/n: Dark Space Shield 0020-41709 Treatment (Arc spray/Bead Blast): AS Treatment roughness (RA): n/a lower shield p/n: 0021-07952 Treatment (Arc spray/Bead Blast): Bead Blast Treatment roughness (RA): n/a inner(or mid) shield p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a shield clamp p/n: na Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a inner(or mid) shield clamp p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a lower shield clamp p/n: 0020-83315 Treatment (Arc spray/Bead Blast): 0200-06863 Treatment roughness (RA): 0200-06864 pedestal cover p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a dep ring p/n: 0200-06863 Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a cover ring p/n: 0200-06864 Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a insulator bushing p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a Shutter: 0021-26565 Treatment (Arc spray/Bead Blast): AS Treatment roughness (RA): n/a pedestal type: SLT ESC pedestal p/n: 0010-22985 heater spacing in mm: no data heater spacing in steps: -55050 min heater spacing in mm: No Data min heater spacing in steps: No Data max heater spacing in mm: No Data max heater spacing in steps: No Data Lift fingers p/n: no data Lift hoop p/n: no data Cryo restrictor(Y/N): n/a Cryo restrictor Part Number: n/a Max Cryo regen gas load (L): na Cryo gate valve (2/3 pos): 3 Position MFC 1 Gas: AR MFC 1 Cal Factor: n/a MFC 1 Size: 100 MFC 1 Type: AR MFC 1 Part Number: na MFC 2 Gas: na MFC 2 Cal Factor: n/a MFC 2 Size: na MFC 2 Type: na MFC 2 Part Number: na MFC 3 Gas: ArH MFC 3 Cal Factor: n/a MFC 3 Size: 20 MFC 3 Type: n/a MFC 3 Part Number: n/a MFC 4 Gas: n/a MFC 4 Cal Factor: n/a MFC 4 Size: n/a MFC 4 Type: n/a MFC 4 Part Number: n/a Chamber base pressure (T): 2.0 e-8 Chamber Rate-of-Rise(nTorr/min): 522 Press. and ROR at Startup: no concern Pressure Rise 1 min: not necessary Pressure Rise 5 min: not necessary Pressure Rise 10 min: not necessary Pressure vs. Gas Flow table: not necessary Process Ar Supply Pressure: 30psi Process N2 Supply Pressure: 30 Cryo Regen N2 pressure: 90 Vent Ar pressure: 40 Optional Gas (He): na O2 (Ch. F): n/a H2(Ch. E): n/a H2(Ch. C): n/a CDA: 88 SLIT VALVE CDA: 82 Cooling Water Flow (GPM): 8.9 - Process Type: HT Al Chamber position: 3,4 Shutter option: yes chamber body (Al or SST): SST chamber body part number: 0040-98657 Slit valve seal (bonded or o-ring): bonded Slit Valve door part number: 0040-84391 Target vendor: Tosoh Target No.: TAG113 Bakeout/idle power (%): n/a E-Mag Power Supply: n/a E-Mag Supply Vendor/Type: n/a OEM Part Number: n/a DC Power supply(AE-MDX????): MKS DCG-200Z OPTIMA AMAT Part number Master: 0190-26920-001 OEM Part Number Master: 3152412-243C AMAT Part number Slave: 0190-28664-001 OEM Part Number Slave: 3152412-243C Generator Size : 20kw Total DC (12 kwh,24kwh, etc): 40kw Bias Generator : n/a AMAT Part number : n/a OEM Part Number: n/a Bias Generator Size: n/a Bias Generator Frequency: n/a Rf coil generator: n/a Rf Match Box: n/a AMAT Part number : n/a OEM Part Number: n/a DC Coil Power Supply: n/a AMAT Part Number: n/a OEM Part Number: n/a Magnet rotation speed (rpm): 95 Magnet shim thickness: Ch3:0.5mm�Ch4:0.5mm Magnet type: WP Magnet part number: 0010-03485 Magnet Serial Number (man. Date): no need Target to magnet spacing(mm): 1.1mm adaptor p/n: 0040-69768 Kit spacer upper p/n: n/a Kit spacer lower p/n: n/a upper shield p/n: 0021-24752 Treatment (Arc spray/Bead Blast): Bead Blast Treatment roughness (RA): n/a lower shield p/n: 0020-29711 Treatment (Arc spray/Bead Blast): Bead Blast Treatment roughness (RA): n/a inner(or mid) shield p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a shield clamp p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a inner(or mid) shield clamp p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a lower shield clamp p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a pedestal cover p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a dep ring p/n: 0200-07118 Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a cover ring p/n: 0200-06864 Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a insulator bushing p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a Shutter: 0021-26565 Treatment (Arc spray/Bead Blast): Bead Blast Treatment roughness (RA): n/a pedestal type: HT ECHUCK pedestal p/n: 0010-27430 heater spacing in mm: No Data heater spacing in steps: Ch3:-52840�Ch4:-52840 min heater spacing in mm: No Data min heater spacing in steps: No Data max heater spacing in mm: No Data max heater spacing in steps: No Data Lift fingers p/n:�0020-46828 Lift hoop p/n:�0020-75465 Cryo restrictor(Y/N): n/a Cryo restrictor Part Number: n/a Max Cryo regen gas load (L): 980 Cryo gate valve (2/3 pos): 3 Positon MFC 1 Gas: n/a MFC 1 Cal Factor: n/a MFC 1 Size: n/a MFC 1 Type: n/a MFC 1 Part Number: n/a MFC 2 Gas: n/a MFC 2 Cal Factor: n/a MFC 2 Size: n/a MFC 2 Type: n/a MFC 2 Part Number: n/a MFC 3 Gas: Ar MFC 3 Cal Factor: 1 MFC 3 Size: 200 MFC 3 Type: AE MFC 3 Part Number:�0015-02988 MFC 4 Gas: ArH MFC 4 Cal Factor: 1 MFC 4 Size: 20 MFC 4 Type: Ar MFC 4 Part Number: AE 0015-02990 Chamber base pressure (T): 5.00E-8 Torr Chamber Rate-of-Rise(nTorr/min): 5000nTorr/min "Press. and ROR at Startup: Ch2 Press:1.30E-8Torr�ROR:1100nT/min Ch3 Press:2.0E-8Torr�ROR:947nT/min" Pressure Rise 1 min: not necessary Pressure Rise 5 min: not necessary Pressure Rise 10 min: not necessary Pressure vs. Gas Flow table: not necessary Process Ar Supply Pressure: 30psi Process N2 Supply Pressure: 93.5 Cryo Regen N2 pressure: 47.7 Vent Ar pressure: 37.9 Optional Gas (He): n/a O2 (Ch. F): n/a H2(Ch. E): n/a H2(Ch. C): 95.7 CDA: 85 SLIT VALVE CDA: 86 Cooling Water Flow (GPM): CH2:8.5 CH3:9.0 - Process Type: (RT DSTTN) Chamber position: D Shutter option: yes chamber body (Al or SST): SST chamber body part number: 0242-33289 Slit valve seal (bonded or o-ring): Bonded Slit Valve door part number: 0040-84391 Target vendor: Nikko/Tosoh Target No.: TAG72 Bakeout/idle power (%): 0 E-Mag Power Supply: n/a E-Mag Supply Vendor/Type: n/a OEM Part Number: n/a DC Power supply(AE-MDX????): ENI AMAT Part number Master: 0190-22931 OEM Part Number Master: DCG200Z AMAT Part number Slave: n/a OEM Part Number Slave: n/a Generator Size : 20kw Total DC (12 kwh,24kwh, etc): 20kw Bias Generator : n/a AMAT Part number : n/a OEM Part Number: n/a Bias Generator Size: n/a Bias Generator Frequency: n/a Rf coil generator: n/a Rf Match Box: n/a AMAT Part number : n/a OEM Part Number: n/a DC Coil Power Supply: n/a AMAT Part Number: n/a OEM Part Number: n/a Magnet rotation speed (rpm): 95 Magnet shim thickness: na Magnet type: TTN Magnet part number: 0010-03487 Magnet Serial Number (man. Date): no need Target to magnet spacing(mm): 1.1mm adaptor p/n: 0040-69768 Kit spacer upper p/n: n/a Kit spacer lower p/n: n/a upper shield p/n: 0021-21234 Treatment (Arc spray/Bead Blast): Bead Blast Treatment roughness (RA): n/a lower shield p/n: 0021-22065 Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a inner(or mid) shield p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a shield clamp p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a inner(or mid) shield clamp p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a lower shield clamp p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatm nt roughness (RA): n/a pedestal cover p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a dep ring p/n: 0040-07291 Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a cover ring p/n:�0021-22064 Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a insulator bushing p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a Shutter: 0021-26609 Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a pedestal type: ADVANCED A101 pedestal p/n: 0010-27432 heater spacing in mm: 55mm heater spacing in steps: -51000 min heater spacing in mm: 32 min heater spacing in steps: -69000 max heater spacing in mm: 55 max heater spacing in steps: -51000 Lift fingers p/n: na Lift hoop p/n: na Cryo restrictor(Y/N): n/a Cryo restrictor Part Number: n/a Max Cryo regen gas load (L): na Cryo gate valve (2/3 pos): 3 Positon MFC 1 Gas: N2 process MFC 1 Cal Factor: 0 MFC 1 Size: 200 MFC 1 Type: N2 MFC 1 Part Number: 0015-02992 MFC 2 Gas: none MFC 2 Cal Factor: n/a MFC 2 Size: na MFC 2 Type: na MFC 2 Part Number: na MFC 3 Gas: Ar process MFC 3 Cal Factor: 0 MFC 3 Size: 150 MFC 3 Type: Ar MFC 3 Part Number: 0015-02992 MFC 4 Gas: n/a MFC 4 Cal Factor: n/a MFC 4 Size: n/a MFC 4 Type: n/a MFC 4 Part Number: n/a Chamber base pressure (T): 3-E8 Chamber Rate-of-Rise(nTorr/min): 650 Press. and ROR at Startup: na Pressure Rise 1 min: not necessary Pressure Rise 5 min: not necessary Pressure Rise 10 min: not necessary Pressure vs. Gas Flow table: not necessary Process Ar Supply Pressure: 34.7 Process N2 Supply Pressure: 33.9 Cryo Regen N2 pressure: na Vent Ar pressure: 47.7 Optional Gas (He): 37.9 O2 (Ch. F): n/a H2(Ch. E): n/a H2(Ch. C): n/a CDA: 95.7 SLIT VALVE CDA: 85 Cooling Water Flow (GPM): 11.2 -
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