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Applied Materials Endura II Front-End Metallization PVD CH2 Co CH3 Co CH 5 Co CHC PCXT CHD PCXT CH E DEGAS CH F DEGAS CH A CD-DG CHB CD-DG for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Applied Materials Endura II Front-End Metallization PVD CH2 Co CH3 Co CH 5 Co CHC PCXT CHD PCXT CH E DEGAS CH F DEGAS CH A CD-DG CHB CD-DG.
Please click on the "Send More Details" button at the end of the Endura II Front-End Metallization description, if you'd like to get more details, photos and specifications of this PVD CH2 Co CH3 Co CH 5 Co CHC PCXT CHD PCXT CH E DEGAS CH F DEGAS CH A CD-DG CHB CD-DG, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Applied Materials Endura II Front-End Metallization PVD CH2 Co CH3 Co CH 5 Co CHC PCXT CHD PCXT CH E DEGAS CH F DEGAS CH A CD-DG CHB CD-DG is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Applied Materials Endura II Front-End Metallization Equipment Details

SDI ID: 103060
Manufacturer: Applied Materials
Model: Endura II Front-End Metallization
Description: PVD CH2 Co CH3 Co CH 5 Co CHC PCXT CHD PCXT CH E DEGAS CH F DEGAS CH A CD-DG CHB CD-DG
Version: 300mm
Vintage: 01.06.2016
Quantity: 1
Sales Condition: as is where is
Lead Time: Inquire
Sales Price: Inquire
Comments:
Current Condition: Installed - In Production - PVD - 11-3AMAT_ENDURA2_CO_01 - COBALT - - Mainframe Frame Type: E2 300MM ENDURA Software Version: CPCI B50140 Load Lock Type: Single wafer load lock Robot Blade Type: ACB Transfer Blade Type: ACB Cryo: CTI,�On Board Cryo Compressor: IS1000 Heat Exchanger: DAIKIN Chm Position 2: Cobalt, Chemicals / Gases Used: N2,Ar Chm Position 3: Cobalt,�Chemicals / Gases Used: N2,Ar Chm Position 5: Cobalt,�Chemicals / Gases Used: N2,Ar Chm Position C: PCXT,�Chemicals / Gases Used: N2,Ar Chm Position D: PCXT,�Chemicals / Gases Used: N2,Ar Chamber Position: E, F, Process Type: Dual Mode Degas Chamber position: A, B, Process Type: Cool - DEGAS chamber Chamber Position: E, F Process Type: Dual Mode Degas Pump, Turbo - Adixen: CTI, On-Board - Cool chamber Chamber position: A, B Process Type: Cool - Process Type: Reactive PC Chamber position: C,D Shutter option: none chamber body (Al or SST): Al chamber body part number: 0040-76718 Slit valve seal (bonded or o-ring): bonded Slit Valve door part number: 0040-84391 Target vendor: n/a Target No.: n/a Bakeout/idle power (%): n/a E-Mag Power Supply: n/a E-Mag Supply Vendor/Type: n/a OEM Part Number: n/a DC Power supply(AE-MDX????): n/a AMAT Part number Master: n/a OEM Part Number Master: n/a AMAT Part number Slave: n/a OEM Part Number Slave: n/a Generator Size : n/a Total DC (12 kwh,24kwh, etc): n/a Bias Generator : n/a AMAT Part number : n/a OEM Part Number: n/a Bias Generator Size: n/a Bias Generator Frequency: 13.56MHz and 2MHz(in one generator) Rf coil generator: COMDEL CDX-2000 AMAT Part number : 0190-23308 OEM Part Number: n/a DC Coil Power Supply: n/a AMAT Part Number: n/a OEM Part Number: n/a Magnet rotation speed (rpm): n/a Magnet type: n/a Magnet part number: n/a adaptor p/n: n/a Kit spacer upper p/n: n/a Kit spacer lower p/n: n/a upper shield p/n: Belljar 0040-55456 Treatment (Arc spray/Bead Blast): Al2O3 Treatment roughness (RA): n/a lower shield p/n: 0040-86514 Treatment (Arc spray/Bead Blast): Bead Blast Treatment roughness (RA): n/a inner(or mid) shield p/n: 0021-19342 Treatment (Arc spray/Bead Blast): Bead Blast Treatment roughness (RA): n/a shield clamp p/n: 0020-19258 Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a inner(or mid) shield clamp p/n: Insulator 0200-01903 Treatment (Arc spray/Bead Blast): Al2O3 Treatment roughness (RA): n/a lower shield clamp p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a pedestal cover p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a dep ring p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a cover ring p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a insulator bushing p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a Shutter: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a pedestal type: n/a pedestal p/n: n/a Lift fingers p/n: n/a Lift hoop p/n: n/a Cryo restrictor(Y/N): n/a Cryo restrictor Part Number: n/a Max Cryo regen gas load (L): n/a Cryo gate valve (2/3 pos): Pendulum MFC 1 Gas: He MFC 1 Cal Factor: 1 MFC 1 Size: 300 MFC 1 Type: He MFC 1 Part Number: 0010-44160 MFC 2 Gas: Ar2 MFC 2 Cal Factor: 1 MFC 2 Size: 200 MFC 2 Type: Ar MFC 2 Part Number: 3030-13113 MFC 3 Gas: Ar MFC 3 Cal Factor: 1 MFC 3 Size: 20 MFC 3 Type: Ar MFC 3 Part Number: 3030-13116 MFC 4 Gas: (MFC6) H2 MFC 4 Cal Factor: (MFC6) 1 MFC 4 Size: (MFC6) 100 MFC 4 Type: (MFC6) H2 MFC 4 Part Number: (MFC6) 0015-02990 Chamber base pressure (T): 0.0000002 Chamber Rate-of-Rise(nTorr/min): 15000 Press. and ROR at Startup: not necessary Pressure Rise 1 min: not necessary Pressure Rise 5 min: not necessary Pressure Rise 10 min: not necessary Pressure vs. Gas Flow table: not necessary Process Ar Supply Pressure: 34.7 Process N2 Supply Pressure: 33.9 Cryo Regen N2 pressure: na Vent Ar pressure: 47.7 Optional Gas (He): 30.1 O2 (Ch. F): n/a H2(Ch. E): n/a H2(Ch. C): n/a CDA: 95.7 SLIT VALVE CDA: 85 Cooling Water Flow (GPM): 0.8 - Process Type: Cobalt Chamber position: 2,3,5 Shutter option: yes chamber body (Al or SST): SST chamber body part number: 0040-98657 Slit valve seal (bonded or o-ring): bonded Slit Valve door part number: 0040-84391 Target vendor: NIKKO Target No.: TAG169 Bakeout/idle power (%): n/a E-Mag Power Supply: n/a E-Mag Supply Vendor/Type: n/a OEM Part Number: n/a DC Power supply(AE-MDX????): MKS AMAT Part number Master: 0190-23736 OEM Part Number Master: n/a AMAT Part number Slave: n/a OEM Part Number Slave: n/a Generator Size : 10kw Total DC (12 kwh,24kwh, etc): 10kw Bias Generator : n/a AMAT Part number : n/a OEM Part Number: n/a Bias Generator Size: n/a Bias Generator Frequency: n/a Rf coil generator: n/a AMAT Part number : n/a OEM Part Number: n/a DC Coil Power Supply: n/a AMAT Part Number: n/a OEM Part Number: n/a Magnet rotation speed (rpm): 55 Magnet type: ALPS CO Magnet part number: 0010-51232 "adaptor p/n:�0240-29326 KIT, ADAPTER, ALPS CO, 300MM ENDURA BLUE adapter:0040-62882" Kit spacer upper p/n: n/a Kit spacer lower p/n: n/a upper shield p/n: DARK SPACE SHIELD 0021-18068 Treatment (Arc spray/Bead Blast): Bead Blast Treatment roughness (RA): n/a lower shield p/n: 0020-48185 Treatment (Arc spray/Bead Blast): Bead Blast Treatment roughness (RA): n/a inner(or mid) shield p/n: 0040-76737 (Ground ring) Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a shield clamp p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a inner(or mid) shield clamp p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a lower shield clamp p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a pedestal cover p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a dep ring p/n: 0200-20437 Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a cover ring p/n: 0021-22177 Treatment (Arc spray/Bead Blast): Bead Blast Treatment roughness (RA): n/a insulator bushing p/n: n/a Treatment (Arc spray/Bead Blast): n/a Treatment roughness (RA): n/a Shutter: 0021-26565 Treatment (Arc spray/Bead Blast): Bead Blast Treatment roughness (RA): n/a pedestal type: HT-ESC pedestal p/n: 0010-27430 Lift fingers p/n:�0020-46828 Lift hoop p/n:�0020-75465 Cryo restrictor(Y/N): n/a Cryo restrictor Part Number: n/a Max Cryo regen gas load (L): n/a Cryo gate valve (2/3 pos): 3 Position MFC 1 Gas: AR MFC 1 Cal Factor: n/a MFC 1 Size: 100 MFC 1 Type: AR "MFC 1 Part Number: Brooks (can not see P/N)" MFC 2 Gas: AR MFC 2 Cal Factor: n/a MFC 2 Size: 20 MFC 2 Type: AR "MFC 2 Part Number: Brooks 0010-42843" MFC 3 Gas: n/a MFC 3 Cal Factor: n/a MFC 3 Size: n/a MFC 3 Type: n/a MFC 3 Part Number: n/a MFC 4 Gas: n/a MFC 4 Cal Factor: n/a MFC 4 Size: n/a MFC 4 Type: n/a MFC 4 Part Number: n/a Chamber base pressure (T): 5.00E-8 Torr Chamber Rate-of-Rise(nTorr/min): 2000nTorr/min Press. and ROR at Startup: Ch2/3/5:Press:2.20E-08Torr��ROR:2xx nT/min Pressure Rise 1 min: not necessary Pressure Rise 5 min: not necessary Pressure Rise 10 min: not necessary Pressure vs. Gas Flow table: not necessary Process Ar Supply Pressure: 32psi Process N2 Supply Pressure: n/a Cryo Regen N2 pressure: 78 Vent Ar pressure: n/a Optional Gas (He): n/a O2 (Ch. F): n/a H2(Ch. E): n/a H2(Ch. C): n/a CDA: 78 SLIT VALVE CDA: 77 Cooling Water Flow (GPM): CH2:8�CH3:10 CH5:11 - Damage/Missing parts list

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The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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