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ASM A412 Doped Poly Vertical Furnace , Doped Poly configuration for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used ASM A412 Doped Poly Vertical Furnace , Doped Poly configuration.
Please click on the "Send More Details" button at the end of the A412 Doped Poly description, if you'd like to get more details, photos and specifications of this Vertical Furnace , Doped Poly configuration, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This ASM A412 Doped Poly Vertical Furnace , Doped Poly configuration is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


ASM A412 Doped Poly Equipment Details

SDI ID: 103068
Manufacturer: ASM
Model: A412 Doped Poly
Description: Vertical Furnace , Doped Poly configuration
Version: 300 mm
Vintage: 01.06.2007
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

Equipment details:

Tool & Auxillary Settings

Software version: 6.80C

Heater Type: MRL

Loader configuration, 4 or 5 loader: 4

Quartzware Configuration

Outer tube: Quartz

Inner tube: Quartz

Boat: SiC boat

Boat fix ring/Cap quartz: Quartz

Adiabatic plate quantity: 6

Back N2, Qty: N/A

BCl3, Qty & Type (L-type, Straight, Diffuser, Shower): N/A

SiH4, Qty & Type (L-type, Straight, Diffuser, Shower): Multihole (1) U/D/L

O2, Qty & Type (L-type, Straight, Diffuser, Shower): Multihole (1) E

PH3, Qty & Type (L-type, Straight, Diffuser, Shower): Multihole (1) U/D/L

ClF3, Qty & Type (L-type, Straight, Diffuser, Shower): N/A

Vacuum Line configuration Design: original config

10 Torr Baratron model: MKS

10 Torr Baratron full scale setting: 10(F/S)

1000 Torr Baratron model: MKS

1000 Torr Baratron full scale setting: 1000(F/S)

ATM sensor model: MKS

Vent Valve 1 (VV1) normally closed/open,plunger, diaphragm: Normally open,plunger 

Check valve model: Fujikin

Check valve resistance pressure: 2.26 Kpa

Mainvalve type, Kitz or CKD: MKS

Slow valve, incorporated with mainvalve or separate(AV72,AV77): Separate (PV003)

Slow valve orifice size: 2.0mm (PV003)

Pressure range of vacuum gauge(Inficon Pirani gauge): 10T

Control Table

Temp (Low Alarm Limit(deg)/High Alarm Limit(deg)/Check Time(min)): 

U: 0.7/0.7/30S

CU: 0.7/0.7/30S

C: 0.7/0.7/30S

CL: 0.7/0.7/30S

L: 0.7/0.7/30S

Pressure (Low Alarm Limit(Torr)/High Alarm Limit(Torr)/Check Time(S)): 0.02/0.02/30S

MFC (Low Alarm Limit(%)/High Alarm Limit(%)/Check Time(S)): 

MFC1: N2: 2%/2%/10sec

MFC2: N2: 2%/2%/10sec

MFC3: N2: 2%/2%/10sec

MFC4: N2: 2%/2%/10sec

MFC5: SiH4: 2%/2%/10sec

MFC6: SiH4: 2%/2%/10sec

MFC7: SiH4: 2%/2%/10sec

MFC8: 1%O2/Ar: 1%/1%/10sec

MFC9: 5%PH3/N2: 2%/2%/10sec

MFC10: 5%PH3/N2: 2%/2%/10sec

MFC11: 5%PH3/N2: 2%/2%/10sec

MFC12: ClF3: 10%/10%/10sec

MFC13: N/A

MFC14: N/A

MFC15: N/A

MFC16: N/A

MFC17: N/A

MFC18: N/A

MFC19: N/A

MFC20: N/A

MFC21: N/A

APC Valve Action (High (%), Low (%), Time(s)): N/A

Transfer Table 

Side Dummy: Upper:5 / Lower:10

Product: 100

Monitor: 5

Product & Monitor: 105

2nd charge time(min): 0

wafer cool time(min): 20min

Leak Rate Table 

Base pressure low Limit(Torr): 1%

Base pressure High Limit(Torr): 1%

Leak Check check time(s): 60s

Leak Check delay time(s): N/A

Leak limit(Torr): 1%

Retry Limit(count): 2

Loadlock Settings

Loadlock configuration

O2 analyser model, NGK or Toray: PBI3.1 / PBI4.0

Process: 

L/A Keep Value (ppm): 10ppm

N2 Flow max (L): 1300L

N2 Flow min (L): 300L

Check Stability Time(s): N/A

L/A Keep Value (ppm): 10ppm

N2 Flow max (L): 1300L

N2 Flow min (L): 300L

Check Stability Time(s): N/A

Idle: 

L/A Keep Value (ppm): 10ppm

N2 Flow max (L): 1300L

N2 Flow min (L): 300L

Check Stability Time(s): N/A

L/A O2 check time (min): N/A

L/A O2 limit (ppm): 10ppm

POD opener O2 limit (ppm): N/A

POD O2 check time(min): N/A

POD check retry : N/A

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The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
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