SDI fabsurplus.com is pleased to announce the availability of the following listed used ASM A412 Doped Poly Vertical Furnace , Doped Poly configuration.
Please click on the "Send More Details" button at the end of the A412 Doped Poly description, if you'd like to get more details, photos and specifications of this Vertical Furnace , Doped Poly configuration, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This ASM A412 Doped Poly Vertical Furnace , Doped Poly configuration is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
| SDI ID: | 103068 |
|---|---|
| Manufacturer: | ASM |
| Model: | A412 Doped Poly |
| Description: | Vertical Furnace , Doped Poly configuration |
| Version: | 300 mm |
| Vintage: | 01.06.2007 |
| Quantity: | 1 |
| Sales Condition: | as is where is |
| Lead Time: | immediately |
| Sales Price: | Inquire |
| Comments: | Equipment details: Tool & Auxillary Settings Software version: 6.80C Heater Type: MRL Loader configuration, 4 or 5 loader: 4 Quartzware Configuration Outer tube: Quartz Inner tube: Quartz Boat: SiC boat Boat fix ring/Cap quartz: Quartz Adiabatic plate quantity: 6 Back N2, Qty: N/A BCl3, Qty & Type (L-type, Straight, Diffuser, Shower): N/A SiH4, Qty & Type (L-type, Straight, Diffuser, Shower): Multihole (1) U/D/L O2, Qty & Type (L-type, Straight, Diffuser, Shower): Multihole (1) E PH3, Qty & Type (L-type, Straight, Diffuser, Shower): Multihole (1) U/D/L ClF3, Qty & Type (L-type, Straight, Diffuser, Shower): N/A Vacuum Line configuration Design: original config 10 Torr Baratron model: MKS 10 Torr Baratron full scale setting: 10(F/S) 1000 Torr Baratron model: MKS 1000 Torr Baratron full scale setting: 1000(F/S) ATM sensor model: MKS Vent Valve 1 (VV1) normally closed/open,plunger, diaphragm: Normally open,plunger Check valve model: Fujikin Check valve resistance pressure: 2.26 Kpa Mainvalve type, Kitz or CKD: MKS Slow valve, incorporated with mainvalve or separate(AV72,AV77): Separate (PV003) Slow valve orifice size: 2.0mm (PV003) Pressure range of vacuum gauge(Inficon Pirani gauge): 10T Control Table Temp (Low Alarm Limit(deg)/High Alarm Limit(deg)/Check Time(min)): U: 0.7/0.7/30S CU: 0.7/0.7/30S C: 0.7/0.7/30S CL: 0.7/0.7/30S L: 0.7/0.7/30S Pressure (Low Alarm Limit(Torr)/High Alarm Limit(Torr)/Check Time(S)): 0.02/0.02/30S MFC (Low Alarm Limit(%)/High Alarm Limit(%)/Check Time(S)): MFC1: N2: 2%/2%/10sec MFC2: N2: 2%/2%/10sec MFC3: N2: 2%/2%/10sec MFC4: N2: 2%/2%/10sec MFC5: SiH4: 2%/2%/10sec MFC6: SiH4: 2%/2%/10sec MFC7: SiH4: 2%/2%/10sec MFC8: 1%O2/Ar: 1%/1%/10sec MFC9: 5%PH3/N2: 2%/2%/10sec MFC10: 5%PH3/N2: 2%/2%/10sec MFC11: 5%PH3/N2: 2%/2%/10sec MFC12: ClF3: 10%/10%/10sec MFC13: N/A MFC14: N/A MFC15: N/A MFC16: N/A MFC17: N/A MFC18: N/A MFC19: N/A MFC20: N/A MFC21: N/A APC Valve Action (High (%), Low (%), Time(s)): N/A Transfer Table Side Dummy: Upper:5 / Lower:10 Product: 100 Monitor: 5 Product & Monitor: 105 2nd charge time(min): 0 wafer cool time(min): 20min Leak Rate Table Base pressure low Limit(Torr): 1% Base pressure High Limit(Torr): 1% Leak Check check time(s): 60s Leak Check delay time(s): N/A Leak limit(Torr): 1% Retry Limit(count): 2 Loadlock Settings Loadlock configuration O2 analyser model, NGK or Toray: PBI3.1 / PBI4.0 Process: L/A Keep Value (ppm): 10ppm N2 Flow max (L): 1300L N2 Flow min (L): 300L Check Stability Time(s): N/A L/A Keep Value (ppm): 10ppm N2 Flow max (L): 1300L N2 Flow min (L): 300L Check Stability Time(s): N/A Idle: L/A Keep Value (ppm): 10ppm N2 Flow max (L): 1300L N2 Flow min (L): 300L Check Stability Time(s): N/A L/A O2 check time (min): N/A L/A O2 limit (ppm): 10ppm POD opener O2 limit (ppm): N/A POD O2 check time(min): N/A POD check retry : N/A |
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| Attachments: | 1 Files |
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