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Ebara FREX300S2 Multi-Process CMP - CMP Equipment for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Ebara FREX300S2 Multi-Process CMP - CMP Equipment.
Please click on the "Send More Details" button at the end of the FREX300S2 description, if you'd like to get more details, photos and specifications of this Multi-Process CMP - CMP Equipment, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Ebara FREX300S2 Multi-Process CMP - CMP Equipment is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Ebara FREX300S2 Equipment Details

SDI ID: 103087
Manufacturer: Ebara
Model: FREX300S2
Description: Multi-Process CMP - CMP Equipment
Version: 300mm
Vintage: 01.07.2015
Quantity: 1
Sales Condition: as is where is
Lead Time: Inquire
Sales Price: Inquire
Comments:
1.Main System: F-REX300S2 I.Polishing Unit ①Turn Table x4, Top Ring x4(GX 8-Area), Scan Dresser x4, Atomizer x4, ②Liner Transportor x2, Turn Over x2, STP x1, System Controller, ③Slurry Scan Nozzle x4, Wafer Slip-Out Sensor x4, Operation Panel x2 II.Cleaner Unit ④1st: R/R w/Megasonic Jet, 2nd:R/R, 3rd:R/R, 4th:IPA/SRD III.EFEM Unit ⑤Dry Robot x1, Loadport x4, Operation Panel x2, ITM NOVA Ready at Left Side IV.M14 Common Spec & FA Spec Requirement V.M14 Hardware Requirement & Improvement Items (Slurry Nozzle Motor Type, Auto Calibration) 2.Standard Options I.Spare GX Carrier II.Anti-Static Material for Wafer Exposed Surface III.Eddy Current End Point Monitor (R-ECM1D) for 2 Table-B&D IV.ME-30 x2 for S-OPM & TCM EPD Controller V.Malema Slurry Flow Controller for 3 Line/Table VI.Light Curtain for EFEM VII.Equipment Monitor Function (Camera)

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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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