SDI fabsurplus.com is pleased to announce the availability of the following listed used Ebara FREX300S2 Multi-Process CMP - CMP Equipment.
Please click on the "Send More Details" button at the end of the FREX300S2 description, if you'd like to get more details, photos and specifications of this Multi-Process CMP - CMP Equipment, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Ebara FREX300S2 Multi-Process CMP - CMP Equipment is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||Multi-Process CMP - CMP Equipment|
|Sales Condition:||as is where is|
1.Main System: F-REX300S2 I.Polishing Unit ①Turn Table x4, Top Ring x4(GX 8-Area), Scan Dresser x4, Atomizer x4, ②Liner Transportor x2, Turn Over x2, STP x1, System Controller, ③Slurry Scan Nozzle x4, Wafer Slip-Out Sensor x4, Operation Panel x2 II.Cleaner Unit ④1st: R/R w/Megasonic Jet, 2nd:R/R, 3rd:R/R, 4th:IPA/SRD III.EFEM Unit ⑤Dry Robot x1, Loadport x4, Operation Panel x2, ITM NOVA Ready at Left Side IV.M14 Common Spec & FA Spec Requirement V.M14 Hardware Requirement & Improvement Items (Slurry Nozzle Motor Type, Auto Calibration) 2.Standard Options I.Spare GX Carrier II.Anti-Static Material for Wafer Exposed Surface III.Eddy Current End Point Monitor (R-ECM1D) for 2 Table-B&D IV.ME-30 x2 for S-OPM & TCM EPD Controller V.Malema Slurry Flow Controller for 3 Line/Table VI.Light Curtain for EFEM VII.Equipment Monitor Function (Camera)
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The data provided herein is not an offer capable of acceptance.
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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