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KLA-Tencor Surfscan SP3 Wafer Particle Measurement System for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used KLA-Tencor Surfscan SP3 Wafer Particle Measurement System.
Please click on the "Send More Details" button at the end of the Surfscan SP3 description, if you'd like to get more details, photos and specifications of this Wafer Particle Measurement System, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This KLA-Tencor Surfscan SP3 Wafer Particle Measurement System is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


KLA-Tencor Surfscan SP3 Equipment Details

SDI ID: 103099
Manufacturer: KLA-Tencor
Model: Surfscan SP3
Description: Wafer Particle Measurement System
Version: 300 mm
Vintage: 01.03.2014
Quantity: 1
Sales Condition: as is where is
Lead Time: 6 months
Sales Price: Inquire
Comments:

-The equipment will be made available at the EXW point on or around 1st February 2022.

The equipment being sold consists of the following main parts:
-Surfscan SP3 Scan Module
-IMC (image computer)
-1 heat exhaust blower

The system is fitted with the following wafer handling system:
Vacuum Chuck Triple FIMS handler (3 x 300 mm) 1 set

Software
NGS Version:6.20.6360
IMC Version: 2.30.6360

Standard Options
1 Oblique Incident 1 set
2 ST mode 1 set
3 2mm edge exclusion area 1 set
4 Defect classification function (Slipline, Scratch, Cluster, LPD-N, LPD-ES, RBB) 1 set
5 Dual Scan (Normal + Oblique Scan) 1 set
6 Partial Dual Scan (Secondly Inspection Region) 1 set
7 SURFmonitor Essentials 1 set
8 Optical filter (Fluorescence Filter) 1 set
9 Spatial filters (20 degrees, 40 degrees, Back) 1 set
10 Environmental optics (COE) kit 1 set
11 Cool White Panels (exterior panel) 1 set

Options
1 Normal incident P/N: 0274498-000 1 set
2 HT mode P/N: 0274501-000 1 set
3 HS mode P/N: 0274499-000 1 set
4 LPM (Large Particle Mode) P/N: 0262045-000 1 set
5 Custom Film Generator (Auto Cal Film) P/N: 0395928-000 1 set
6 300mm silica wafer set P/N: 0302187-000 1 set
7 300mm XY coordinate standard wafer P/N: 0016628-000 1 set
8 300mm SP3 Haze Normalization Wafer Set P/N: 0356234-000 1 set
9 NFS client P/N: 0306847-000 1 set
10 NGS desktop software P/N: 0307637-000 1 set


Installed Software Options
Illumination Oblique
Illumination Normal
Throughput HS
Throughput ST
Throughput HT
Desktop SW
Haze Line Classification
HighResHaze
Filters
GridAnalysis
ParametericCorrelation
Grading
Mask 20 Degrees
Mask 40 Degrees
iDM
SurfACEQuality low k
SurfACEQuality Rough 1
SurfACEQuality Rough 2
SurfACEQuality Smooth
SurfACEQuality Very Smooth
SurfACEQuality Medium
Filter Flourescence
Mask Back
SURFImage in KLARF
Dual Incidence
Rule Based Binning
Dual Incidence Obl Obl
M53 NormStyle
Enhanced LPD Detection
DRE
Mask XFS H3
InstSubType Classic Plus
Large Particle Mode
ART
CustomFilmGenerator
Sub1nm EdgeExclusion
Enhanced User Security


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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