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TEL Tokyo Electron Telius 305 DRM Dielectric Dry Etch for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL Tokyo Electron Telius 305 DRM Dielectric Dry Etch.
Please click on the "Send More Details" button at the end of the Telius 305 DRM description, if you'd like to get more details, photos and specifications of this Dielectric Dry Etch, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL Tokyo Electron Telius 305 DRM Dielectric Dry Etch is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


TEL Tokyo Electron Telius 305 DRM Equipment Details

SDI ID: 103130
Manufacturer: TEL Tokyo Electron
Model: Telius 305 DRM
Description: Dielectric Dry Etch
Version: 300mm
Vintage: 01.06.2003
Quantity: 1
Sales Condition: as is where is
Lead Time: Inquire
Sales Price: Inquire
Comments:
Current Condition: Installed - In Production - DRY ETCH 15-3TEL_TLUDRM_OX_02 TEL TLUDRM OX No missing or damaged parts reported by Fab15. - - [Chamber A] Chamber type:DRM Gas config. (sccm)=FCS full scale 2line(advanced radical distribution control) Ar(754)/C4F8(43)/O2(46.8)/O2(1215) CF4(336)/CHF3(163)/CH2F2(144)/N2(300) CHF3(25.1)/O2(18.7)/N2(30)/CH2F2(14.4) RF 13.56MHz, max 5000W Temp Top +30~+80℃ Wall +40~+80℃ ESC -10~+60℃ - [Chamber A] Chamber type:DRM Gas config. (sccm)=FCS full scale 2line(advanced radical distribution control) Ar(754)/C4F8(43)/O2(46.8)/O2(1215) CF4(336)/CHF3(163)/CH2F2(144)/N2(300) CHF3(25.1)/O2(18.7)/N2(30)/CH2F2(14.4) RF 13.56MHz, max 5000W Temp Top +30~+80℃ Wall +40~+80℃ ESC -10~+60℃ - -
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