SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL Tokyo Electron Telius SP-305 SCCM Dielectric Dry Etch.
Please click on the "Send More Details" button at the end of the Telius SP-305 SCCM description, if you'd like to get more details, photos and specifications of this Dielectric Dry Etch, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL Tokyo Electron Telius SP-305 SCCM Dielectric Dry Etch is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Manufacturer:||TEL Tokyo Electron|
|Model:||Telius SP-305 SCCM|
|Description:||Dielectric Dry Etch|
|Sales Condition:||as is where is|
Current Condition: Installed - In Production - Process: OX - - Standard Specifications - Software Revision: Linux 5.75 Rev 001 - Lot Stability Dummy SW: Software for running lot stability wafer. - OEE WPH Software: Yes - GEM SEC Revision: TBD - Wafer Size: Diameter 300+/- 0.20mm(SEMI M1.15), Notch - Carrier: FOUP (Comply with SEMI E47.1 (25wafers)) - Inter Face: 5 carrier stage (Continuous flow operation) with Semi compliant MENV and FIMS assemblies - Online Connection: GEM / CIM GJG (Hardware Interface : Ethernet 100Base-Tx) - Interface A: Yes - Utility Box: Regulator : Air/AR2500(SMC), N2/SQ-420E(VERIFLO), He/SQMICRO(VERIFLO) - Utility Box: Manual Valve : OGD20V-6RM-K / OGD10V-4RM-K (CKD) - Utility Box: Pressure Gauge : Bourdon Gauge - Loader Mod Corrosion Prevent: NO, without Corrosion Prevent - Load Lock Pressure Monitor: Pressure Switch : VSA100A (INFICON) - Load Lock Pressure Monitor: Pirani gauge : TTR211S LEYBOLD) - Load Lock Pressure Monitor: CM : 626A01TDE (MKS) - Maintenance Monitor: 2 (Flat Panel Display Touch Screen Type) - Water Leak Detector: 5 (LM;1, each PS;1) - Signal Tower: Red/Yellow/Green/Blue (Upper Left of Front x1 & Upper right section of loader on maintenance side x1) - Data Back up: USB& MO - EMO: Front x3, Rear x6 - Cable Length: One 15m and one 16m (Interconnection, RF cables) - Inter Locks: External (When the I/L signal is received from Factory, gas valves are closed) - Fittings: No brass fittings - - Supporting Remote Units - Chiller: UBRPD5A-2T? - Coolant: Lower:FC3283, Upper:FC40 - Chiller Hose: BRINE HOSE 15/14M - Handy Maintenance Controller: LCD DISPLAY UT3-TLN21-A - RF Generator TOP: AGA-50B2 - RF Matcher TOP: AMN-50B2 - RF Generator Bottom: WGA-50E - Matching Controller: WMN-50H6(2MHZ/5KW)(PS3) - Pen Record Box: 2L80-00212-12 - Loader Module: SELME2112ZS22-AD5 - LOAD PORT: NO,Bolts-L type - DRIVE UNIT:SBX92102928 - READER OPTICAL: ISS-1700-1TELCC - Carrier ID Reader: NO,V640series+V700-L22 (Omron) - APC: 12 INCH (320MM) - - Hardware Configuration - Proc Chbr 1,2,3,4: SCCM Oxide; Y203 Coating - Chamber hardware: FCC - Endpoint type: SE2000ii - ESC type: Ceramics ESCwith STD Vpp - Focus ring: 3.4mm - Thunderwall He Gas Inlet: Ceramic Thunderwall with Ceramic pusher pins - Polished focus ring: O - FC lower insulator: FC lower insulator w/quartz upper ring shield - Magnet Shield: O - Oring for Chbr Body-Depos: Armorcrystal, Chemraz SC657 - CEL Body ASSY: Brine Control Mode - TMP: TMP-3403LMC-T4(VG300) (SHIMADZU) - TMP Back Pressure Monitor: 51A11TGA2BA003 (MKS) - Dry Pump: ESR80WN, KEG approved - Final Valve, Heater: Valve; AGD21V-6RM-GWL4 (CKD) - Filter: Filter; CEP-TM_HL-VR-03PB (Toshiba Ceramic) - APC: Pendulum Motion Dia., 320mm(VAT), R.T.~90deg - Pressure Monitor: C/M (Process Monitor) : 627BRETDD2P (MKS), 45deg, 30Pa - Pressure Monitor: C/M (Self Check) : 627B11TDC2P (MKS), 45deg, 1330Pa - Pressure Monitor: B.A. Gauge (CM Calibration) : BPG400 (INFICON), 2.0x10-5 ~ 0.1Pa - Pressure Monitor: N,41A13DGA2AA040 (MKS), no process impact - Pressure Monitor: Pressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gas - - Gas Box Configuration - Gas line 1- N2 1000 sccm-AERA FCD985CT-BF - Gas line 2- C4F8 200 sccm-AERA FC-D985CT-BF - Gas line 3- Ar 2000 sccm-AERA FC-D985CT-BF - Gas line 4- O2 50 sccm-AERA FC-D985CT-BF - Gas line 5- CH2F2 30 sccm-AERA FC-D985CT-BF - Gas line 6- CHF3 200 sccm-AERA FC-D985CT-BF - Gas line 7- CF4 200 sccm-AERA FC-D985CT-BF - Gas line 8- C4F8 50 sccms-AERA FC-D985CT-BF - Gas line 9- C3F8 50 sccms-AERA FC-D985CT-BF - Gas line 10- C4F6 50 sccm-AERA FC-D985CT-BF - Gas line 11- O2 1000 sccm-AERA FC-D985CT-BF - Gas line 12- Ar 500 sccm-AERA FC-D985CT-BF - Purge: N2 (Process Grade N2) - Filter: CNF1004USG4 (Nihon Pall) - Regulator: SQMICRO (VERIFLO) - Filter (N2): CNF1004USG4 (Nihon Pall) - Valve: Primary side(Utility-MFC):Mega mini (FUJIKIN) - Valve: Secondary side(MFC-PC):Mega one (FUJIKIN) - Piping: Dual Piping (for Gas leak containment, Gas box to Final valve & Exhaust through Gas box) - Gas Leak Detection Port: 5 Ports (6.35mm, Swagelok L-type) - Final Pressure Switch: 51A (MKS) - Pressure Gauge: Bourdon
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