SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL Tokyo Electron Triase+ Ti/TiN Metal CVD (Chemical Vapor Deposition) .
Please click on the "Send More Details" button at the end of the Triase+ Ti/TiN description, if you'd like to get more details, photos and specifications of this Metal CVD (Chemical Vapor Deposition) , and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL Tokyo Electron Triase+ Ti/TiN Metal CVD (Chemical Vapor Deposition) is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Manufacturer:||TEL Tokyo Electron|
|Description:||Metal CVD (Chemical Vapor Deposition)|
|Sales Condition:||as is where is|
1. Main System 1-1. TRIAS e+ Platform - Load Port*3 (12" wafer) - Loader Module - Lord Lock Module with Cooling*3 - Power Distribution Unit - Trias Software - PF S2-0200 Safety - 1-2. Ti Process Module(2 Sets) - PCOT Ti Chamber - Gas Box - RF Generation Unit - Milaebo Trap Interface - Milaebo Trap Software - 1-3. TiN Process Module(2 Sets) - PCOT TiN Chamber - Gas Box - Korea Trap Interface - Korea Trap Software - Accessory Parts 2-1. PF Accessory Load Port UI Fixing at LM Right Side EFEM & FAN Check Monitor TM, LLM Leak Check Port Manual Valve Transfer Navigation System PF Outer Cable Edge Grip Blade LM Fluorescent Light TM RGA PORT (w/o Manual Valve) - 2-2. Ti PM Accessory(2 sets) Ti Leak Check Port Ti PM Outer Cable Ti Gas Box ClF3, H2, NH3 LINE - 2-3. TiN PM Accessory(2 sets) TiN Leak Check Port TiN High Coverage Process Kit TiN PM Outer Cable - 2-4. Utility Accessory Utility Interconnection Gas Female FDC Signal Tower CVCF�Correspondence Rear Step Cable Tray - 2-5. Safety PF, PM S2-0200 Korean & English Safety Label for PF and PM - 2-6. Software & AGV Standard GEM,GJG On Line OHT&AGV I/O Monitor Correspondence Omron Carrier ID Reader Correspondence Wafer Log Wafer ID, PPID, PRJOBID - - HP-Ti Kit for Ti ModuleSFD Kit For TiN ModuleKorea Trap - - -
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