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Nikon NSR-S207D DUV lithography scanner for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Nikon NSR-S207D DUV lithography scanner.
Please click on the "Send More Details" button at the end of the NSR-S207D description, if you'd like to get more details, photos and specifications of this DUV lithography scanner, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Nikon NSR-S207D DUV lithography scanner is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Nikon NSR-S207D Equipment Details

SDI ID: 103273
Manufacturer: Nikon
Model: NSR-S207D
Description: DUV lithography scanner
Version: 300 mm
Vintage: 01.03.2005
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

Nikon-NSR-S207D Configuration

Reticle Blind

 

Setting value

44215

XM Outside

 

400 ~ 800 um

600

XP Inside

 

400 ~ 800 um

500

YM Outside

 

400 ~ 800 um

650

YP Inside

 

400 ~ 800 um

550

Lens performance Data

 

 

 

Illumination Check

 

Setting value

44215

ID1

Uniformity

 0.8 %

0.635

 

Power

> 2000 mw/cm2

2507

ID13

Uniformity

 0.8 %

0.656

 

Power

> 2000 mw/cm2

2497

ID15

Uniformity

 0.8 %

0.625

 

Power

> 2000 mw/cm2

2468

ID17

Uniformity

 0.8 %

0.611

 

Power

> 2000 mw/cm2

2571

ID21

Uniformity

 0.8 %

0.606

 

Power

> 2000 mw/cm2

2549

Wafer Stage Mirror Bow

 

Setting value

44215

Upper

Sub value X

 8 nm

2.472

 

 

 8 nm

1.854

 

 

Setting value

44215

Projection Lens Image Plane

Angle X

0 ± 1 urad

0.167

 

Angle Y

0 ± 3 urad

1.25

Field Inclination TFD

max - min

 0.080 um

0.053

 

All reading have?

Yes / No

Yes

 

Max [X-Y]

 0.060 um

-0.028

Flare check(Please inform EE when E0<=240mj)

E0

>=240 mj

320

Best Focus

 

0 0.015 um

0.002

Wafer Loader Repeatability (Front)

 

Setting value

44215

Y 3Sigma

 

 ≤ 15 um

4.153

Theta 3Sigma

 

 ≤ 15 um

6.022

X 3Sigma

 

 ≤ 15 um

5.322

T mean

 

0 ±10 um

2.175

Y mean

 

0 ±10 um

-0.795

X mean

 

0 ±10 um

-0.455

FIA Overlay Matching

 

Setting value

44215

Residual X 3Sigma

 

< 20nm

14

Residual Y 3Sigma

 

< 20nm

17

Plus/Minus Difference X

 

< 10nm

4

Plus/Minus Difference Y

 

< 10nm

6

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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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