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DNS SK 2000 BVPE COATER AND DEVELOPER TRACK WITH 2 CT, 2 BCT, 4 DEVELOPERS for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used DNS SK 2000 BVPE COATER AND DEVELOPER TRACK WITH 2 CT, 2 BCT, 4 DEVELOPERS.
Please click on the "Get Quote" button at the end of the SK 2000 BVPE description, if you'd like to get a quotation, photos and specifications of this COATER AND DEVELOPER TRACK WITH 2 CT, 2 BCT, 4 DEVELOPERS, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This DNS SK 2000 BVPE COATER AND DEVELOPER TRACK WITH 2 CT, 2 BCT, 4 DEVELOPERS is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


DNS SK 2000 BVPE Equipment Details

SDI ID: 106022
Manufacturer: DNS
Model: SK 2000 BVPE
Description: COATER AND DEVELOPER TRACK WITH 2 CT, 2 BCT, 4 DEVELOPERS
Version: 200 mm
Vintage: 30.09.2003
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

Inspection is available by appointment.
Config: 2 Coaters / 2BARC / 4 Developers

Wafer flow direction: Right to Left (Track interface is on the left side)

To see a video of the tool, taken in October 2014, showing the system shut down in the fab, please click here:-

http://youtu.be/jItameMz0dU

1.GENERAL INFORMATION Clean Track SK2000 2 Coater/2 BARC 4 Developer w/ Stepper IF
Tool ID  
Serial Number  
Vintage 2003
OEM DAI NIPPON SCREEN
Model SOKUDO SK2000-BVPEU
Process COAT/DEVE
Software version 9.G.0.1
2.WAFER SPECIFICATION  
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Wafer Cassette 8” PP Miraial
SMIF Interface NO
3. SYSTEM CONFIGURATION  
Process Block# 2
Coater head# 2
Barc Coater head# 2
Develop head# 4
Adhesion Chamber# 2
Cooling Plate# 10
Rapid Hot Plate(RHP)# 12
Hot Plate(RHP)# 3
EEW# 1
EEFT# 1
IFB# 1
Sourcs Bottle CCaabbiinneett((RREESSIISSTT) 1
Chemical Box (HMDS/Solvent/NMDW) 1
Controller Cabinet 1
Power BOX 1
Handling Unit Controller 1
3-1. Carrier Station  
Stage 1×4 Side Loading (Sender /Receiver)
3-2. Coater  
Nozzle# #6
Resist temperature System 1 temp control for 3 line x 2
Coater Cup PP+PP+PPS
Spin chuck PEEK
Resist Pump PDS-105C-KPM4-S01
Back rinse flow flow meter with sensor
VPS Pluse Mist Nozzle flow flow meter with sensor
Edge Cleaner flow meter with sensor
Solvent solution supply Central supply
Drain Central
3-3. Barc  
Nozzle# #2
Resist temperature System 1 temp control for 1 line x 2
Coater Cup PP+PP+PPS
Spin chuck PEEK
Resist Pump PDS-105C-KPM4-S01
Back rinse flow flow meter with sensor
VPS Pluse Mist Nozzle flow flow meter with sensor
Edge Cleaner flow meter with sensor
Solvent solution supply Central supply
Drain Central
3-4. Developer  
Nozzle Slit Scan Nozzle
Develop solution supply Central supply
Developer Cup PVC
Spin chuck PEEK
Develop Nozzle Flow flow meter with sensor
Develop Nozzle Wash flow meter with sensor
Rinse Nozzle Flow flow meter with sensor
Back Rinse Flow flow meter with sensor
Develop temperature System 1 temp control for 1 line x 2
Drain Central
3-5. Adhesion  
Method Vapor prime by N2 Bubbling
Hot plate 60-150deg by 0.1deg pitch
HMDS solution supply Central supply
3-6. Hot Plate  
Method Proximity bake with ceramic ball
Hot plate 50-180deg by 0.1deg pitch
3-7. Cooling Plate  
Method Proximity bake with ceramic ball
Cooling plate 20-25deg by 0.1deg pitch
3-8. Rapid Hot Plate(RHP)  
Method Proximity bake with ceramic ball
Hot plate 70-150deg by 0.1deg pitch
3-9. Hot Plate(HP)  
Method Proximity bake with ceramic ball
Hot plate 60-250deg by 0.1deg pitch
3-9. EEW  
Lamp Mercury xenon
Wave length 248nm
3-10. EEFT (EEW and Thickness)  
Lamp Mercury xenon
Wave length 248nm
Lamp for resist thickness Halogen
Wave length 400nm-800nm with low cut filter 480nm
3-11. IFB  
Robot(BHU1) 1
Robot(BHU2) 1
Buffer 2
   
   

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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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