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ASML TWINSCAN XT1250D 193nm (ArF) Scanner - Cymer laser not included for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used ASML TWINSCAN XT1250D 193nm (ArF) Scanner - Cymer laser not included.
Please click on the "Get Quote" button at the end of the TWINSCAN XT1250D description, if you'd like to get a quotation, photos and specifications of this 193nm (ArF) Scanner - Cymer laser not included, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This ASML TWINSCAN XT1250D 193nm (ArF) Scanner - Cymer laser not included is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


ASML TWINSCAN XT1250D Equipment Details

SDI ID: 106043
Manufacturer: ASML
Model: TWINSCAN XT1250D
Description: 193nm (ArF) Scanner - Cymer laser not included
Version: 300 mm
Vintage: 01.05.2004
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

ASML TWINSCAN XT 1250D ArF SCANNER

Please note: The Cymer laser from this tool has been sold.

So, it would be necessary to purchase another Cymer laser to replace it with. The Cymer laser is a completely separate sub-system from the main equipment. Hence, adding another laser to the system will not present technical problems.
Configuration Items:
Track Pre-warning signal (APR)s: APR enabled
Avoid Track INPUT/OUTPUT conflicts, Raise AS after APRs: Avoid Track
INPUT/OUTPUT conflicts enabled
Active wafer release for dry WSs: FALSE
Closing disk types: No closing disk present
Safeguard to prevent loading of reticles with too wide or mispositioned pellicles: Disabled
Continuous clampable wafer table for dry WSs: Absent
Type of wafer table on chuck 1 & 2 for immersion machines: Zerodur version 1
WS Immersion throughput packages: None
WS Immersion thermal control packages: None
Wafer Stage Configurations: Wafer Stage type 2 configuration
Wafer Carrier Locations: Right
Wafers per Carriers: 25
Wafer Mark Sensors: Absent
Wafer Id Readers: Absent
Wafer Sizes:300mm
Wafer Tracks: Present
Wafer Stage Types: Dual Chuck
Wafer Stress Relaxations: FALSE
Lower Docking Plates: Present
WS Balance Masss: Stainless Steel
WH Robot Power Amplifiers: CPM 20
Wafer Stage Fast Stiff X Move Electronicss: Present
Wafer Stage Mirror Block Down Electronicss: Present
Universal Prealignments: Disabled
Interferometer axis version at exposures: 3 plus 1 axis
Wafer Handling Pneumaticss: Dedicated
Wafer Switchs: Absent
Chuck 1 & 2 wafer sizes: 300mm
Type of immersion hood for immersions: None
Specifies chuck1 & 2 layout relev. for Immersions: Chuck does not support immersion
Specifies chuck1 & 2 configs: Dry
Specifies chuck1 & 2 versions: not specified
Changed Short Stroke diff XY controllers: Disabled
Docking wheels at WH unloads: Present
Docking plate heights: Low
Immersion Hood versions: AbsentCarrier Handler Types: Mark I 300 Foup
Wafer Handling Load & Unload Robot Types: Double Fold Arm, 12 mm Z stroke
Wafer Handling Store Units: Absent
Wafer Handler wrt BF Shifted in Zs: Not Shifted
Reticle streaming lites: Disabled
Enhancements in Reticle Monitors: no enhancements
Reticle streaming: Disabled
Improvements for reticle handlings: Disabled
Extend IRIS maximum particles scanned to 50000.s: Absent
Zeroing type for Encoders Measurement Systems: Using extra hall sensors for zeroing
Reticle Stage Chuck Types: Glued Leafspring, TYPE_2: Glued LS, Pneum. GC, IFM / ENC
Nitrogen purging of Reticle Stages: RS is not purged
Reticle Carrier Locations: Right
Integrated Reticle Inspection Systems: PPD1 with IRIS1 functionality
Integrated Reticle Librarys: IRL with original functionality
Reticle Sizes: 6 inch
Reticle Carrier Tag Readers: Present
Reticle Stage Long Stroke Motor Types: Cobalt Ferro 18 teeth
Reticle Stage Long Stroke Configs: TYPE_3:CoFe_18 motor, SB controlled, int. vacuum
supply, pneum GC
Automated Reticle Transport Systems: Absent
Reticle Stage Lenscooler Boxes: Lenscooler Box with anti-aliasing Filter
Maximum Reticle ID Lengths: 24 Characters
Reticle Stage Measurement System on Scans: Heidenhain Encoders
Relative direction of ws to rs on the X axiss: Same
RS Object Fields: Normal
Reticle exchange types: Retex option: E
Iris feature Scans: Absent (Overrules Absent)
Reticle Handler types: Original
2D Barcode Readers: Absent
Integrated Reticle Inspection System Configurations: Disable creation of OSIRIS viewable
files.
WS Immersion Hood Only Testrigs: Absent
Version of RS/WS IO librarys: Version 1
Dynamic Performance Calculations: Mark 1
Stages Sample Rates: 5.0 kHz
Interferometer Electronics: Ifsr
Capacitive z-height sensor type.s: Dual Z sensor board
Ifm config at measure sides: 8 axes
Dose System Performance Test sequences: Test sequence 1
PEP-ADC Intensitys: Disable PEP-ADC Intensity
Online Lamp Peak: Disable Online Lamp Peak
Dose Intensity Optimizations: Dose Intensity OptimizationLaser Gas Life extensions: Disable Laser Gas Life extension
Type of multi foil lens elements: none
Depolarizer types: fixed depolarizer present
PSE & PCE Locations: not applicable
Intensity Calibration Per DOEs: Disabled
Pupil qualification methods: Centre of gravity method
Polarized illumination amorph DOE: Only unpolarized illumination
Fresnel corrections for WSSSs: Disabled
Is NA accuracy measurement allowed: Disabled
Exchangeable Pupil Lens Elements: No EPLE
Multifunction Active Lens Elements: 0
Multifunctional Active Elementss: 0
Use Sigma Calibrations: no Sigma Calibration
Use Sigma WIP Preserving Offsetss: no Sigma WIP Preserving Offsets
THFFC FDE model lens dependents: Disabled
TIS diffusers: absent
Determination of NA ellipticitys: Disabled
XML output for LITHOGUIDEs: Disabled
Use validity ranges around UIP data when Enabled: Use exact matching for UIP data
Number of EXLE elements: 0
Functional use of Active Elements: ALE function as ALE
Polarization Shaping Element Retractors: No PSER hardware installed in the machine
Method for alignment of the laser beams: Align the beam by minimizing the uniformity tilt
over the slit (LUBF)
Pupil TIS angular sensitivity calibration and corrections: TIS Pupil Measurement will not be
improved
Describes at what plane the BMU measures: BMU readings are directly used as if they
are at DOE1 plane
Lens Types: 12
Light-source Architectures: Laser
Light-source Types: Cymer Laser: XLA 165 (Not Included)
Light-source Wave-lengths: 193nm
DOSEMAPPERs: Present
DOSE_MAPPER_1s: Present
REMA architectures: REMA C
Illuminator Types: 120
Zoom Axicon Architectures/ Types: ZZA/120
NA Control Architectures/ Types: NA2 Torlon/ 120
Automated DOE Exchangers/ Architectures: Present/ 5 slots MIP Control
UNICOMs/ Architectures: Present/ 1 Motor
Test Tables: Absent
Imaging Electronics Architectures: B Architecture
Attenuator Types: VariableTest Table Z Axiss: Worm Wheel
PUPICOMs/ Architectures: Present/ DC Motor with gearbox
Number of Z Lens Manipulatorss: 5
Number of Active Lens Elementss: 1
Number of Bi-directional Active Lens Elementss: 0
Number of Active Manipulator Elementss: 0
Number of Active Elementss: 1
Number of Half Dome Mirrorss: 0
Number of Semi-Active X-Y Lens Manipulatorss: 4
Setup sensor board versions: Setup SSD version 1
Imaging Generic Power Amplifiers: Generic Power Amplifier
Imaging Control Rack Configurations: IPDR
Type of projection multiplexer boards: MUX Absent
LEC Rack in Electronic Architectures: Present
Projection GPA Configuration Versions: Version 2
Number of Lens NEXZ Manipulatorss: 5
Number of Lens Z Manipulators Using Camdisks: 0
Spotsensor surface coatings: Bilatal
Energy Sensors: VLOC
Spot Sensor Chuck 1s & 2s: VLOC
Modelling for MAXYSs: Absent
Uniformity Improvement Packages: Present
Number of pre-amps available per Z-manipulators: 0
Immersions: Absent
Pupil measurements with ILIASs: Present
Automatic CUAs: Absent
Beam Controls: Beam adjustment
Extended Spot Sensor Matchings: Present
Number of Rxms/ Ryms: 5/5
Diaphragm Limiters: Absent
NA1 motor types: None
Spot Sensor Reticle Stages: Absent
Smooth Field Uniformitys: Absent
Exchangeable Last Lens Elements: Present
Exchangeable Pupil Lens Elements: Absent
Number of manipulable ELLE axess: 0
UV Shutter versions: UV Shutter version 1
Dosecontrol Hardwares: ISB
Illuminator platforms: Aerial 2
Polarizations: Absent
Automatic PCE exchangers: Absent
Automatic CUA exchanger architectures: Not applicable
Test table architectures: Aerial 2Illumination modes: All illumination modes
DUV Lightsource Power Levels: 45.00 Watt
Lens Top Tool Connections: Lens Top Tool can be mounted on top of the Lens
Scanning Energy Sensor Calibrations: Static Energy Sensor Calibration
Position of Spot Sensor on Chuck 1s: Spot Sensor Position on Chuck 1 layout 1
Position of Spot Sensor on Chuck 2s: Spot Sensor Position on Chuck 2 layout 1
Z-capture for low relfectivity wafers: Off
TIS plate deformation corrections: Disabled
FSM Flexibility packages: Disabled
Field width optimised leveling: Disabled
Constrained fits: Disabled
Levelling throughput improvement on measure sides: No levelling throughput package
Point-to-Point LS Machine Matchings: Disabled
Circuit Dependent FECs: Present
Focus Monitorings: Present
Extended LS areas: Disabled
Air Gauges: Absent
Type of Air Gauges: No Air Gauge device present
Reticle shape corrections: Disabled ( Overrules Enabled )
LS focus nodes: LS focus node 3
Level Sensor Processing Racks: LCSR
LS_PEMM_CONFIGs: Present
LS_CPU_CONFIGs: 3 CPU's available
Base Liner overlay high order intrafields: Disabled
BaseLiner focus high order intrafields: Disabled
BaseLiner focus control.s: Disabled
Pattern Matcher fullchips: Absent
Pattern Matchers: Absent
Maximum numerical aperature (NA) that can be used in Lot Productions: level 0
Log missed translations: Disabled
Allow even orders usages: Present
Multilingual UIs: Absent
Improved Maintenance action scheduling.s: Disabled
Recipe Creators: Light
Lot Report Data Categorys: Enhanced Diagnostics
CDCs: Enabled
EFESEs: Absent
PED control modes: Absent
Proximity Matchings: Present
mbds controls: Present
Enhanced exposures 1s: Present
Data collection not covered by FOCUS and OVERLAYs: InformPro Data Collection
disabledOverlay Data Collections: Disabled
XML Lot Report Content Levels: Basic
Enable the Maintenance Assistants: Disable Maintenance Assistant
EDA Interfaces: Disabled
Equipment Constants via SECS interfaces: Disabled
LCI WaitWatcher plug-ins: Absent
Reorder Lot Services: Absent
Shot Data Collections: Absent
Focus Data Collections: Absent
Alignment Recipe Overrides: Disabled
Enable to support SMASH XY mark types.s: not supported
Specifies which mark types are supporteds: ASML marks only
Alignment laser configurations: 2 color laser
OADB Improved Dynamic Ranges: Disabled
board configurations: ODB + ADB
Alignment Camera Mirrors: Absent
Athena Narrow Marks Twinscans: Present
Alignment Sensor Types: Athena Narrow Marks OM
Athena Focus Improvements 1s: Present
Max alignment speeds: Setting 2
AA processing racks: AACR processing rack
Particle Extraction Mass Flow Meters: Absent
purging configurations: purging CONFIG 3
Bubble Extraction Seal Settings: Not Applicable
Ultra Pure Water flow controller (WICC)s: absent
LCW Circuit set-ups: Flow Version 1
In situ Wafer TablesStone Cleanings: Absent
Clean Air Configurations: Others
Metroframe Circuit Water Cabinets: Absent
CT Miscellaneous Racks: Present
Clean Air Temperature Controls: Driver and ACC
Purge Hoods configurations: Compressed Clean air and Extremely Clean Dry air
Nitrogen Purge Utility Controls: Absent
Reticle Cleanings: Absent
Metroframe types: TYPE_I
Inlet restriction for clean airs: Inlet restriction at right side
Reticle Stage purged mini environments: Present
Gas Control Unit Types: High Flow (HF)
Wet Imaging Control Cabinets: Not Applicable
Readout location of Pneumatic Facility Unit sensors: Machine Base Diagnostics System
(MBDS)
Laminar Bottom Hoods: Absent
Extreme Clean Humiditied Airs: AbsentLens Circuit Water Flows: High
Motor Circuit Water Flows: Normal
SPM temp correction for lens axiss: Disabled
2 Sided IFM-beams for WS-X (expose/ measure)s: Not available
Diff pressure correction for IFM beams: Absent
IFM Laser Configurations: AOM Recombo Laser
Position Control Rack Configurations: Rack Configuration type 3
Position Control Power Rack Configurations: TYPE_3: Stages Power Rack upto E-spec
Number of Motion Controllerss: 5 Motion Controllers present
Position Control Motion Control racks: PMCR
Reticle Stage Short Stroke X/Y11/Y12/Y21/Y22/Y11/Y11 amp.s: PADC 100V/16A
Wafer Stage Short Stroke 1 XY1/ XY2/XY3 amp.s: PADC 100V/16A
Wafer Stage Short Stroke 2 XY1/ XY2/XY3 amp.s: PADC 100V/16A
Reticle Stage Short Stroke Z1/Z2/Z3 amp.s: Pass Low Current 8.5A
Wafer Stage Short Stroke 1 Z1/Z2/Z3 amp.s: Pass Low Current 8.5A
Wafer Stage Short Stroke 2 Z1/Z2/Z3 amp.s: Pass Low Current 8.5A
Reticle Stage Long Stroke Y11/Y12/Y21/Y22 amp.s: 450V20A: PAAC AT-pepD
Reticle Balance Mass 1/2 amp.s: 450V20A: PAAC AT-pepD
Wafer Stage Long Stroke E/M X amp.s: 400V16A: PAAC AT-D
Wafer Stage Long Stroke E Y1/Y2/CS amp.s: 400V16A: PAAC AT-D
Wafer Stage Long Stroke M Y1/Y2/CS amp.s: 400V16A: PAAC AT-D
Wafer Stage Balance Mass 11/12/21/22 amp.s: 325V14A: PAAC AT-C
Pressure update rate for fringelength corrections: Pressure update rate 2 or 4 Hz
TestStreams: TestStream disabled
Performance Enhancement Packages: None
PEP Image Streamings: Present
Lot Overhead Reductions: LOR2
Extended Zone Alignments: Disabled
Intrafield Higher Order Process Correctionss: Disabled
SMASH Reuse Capture Information in Stage Alignments: Coarse capture scans are done
on all stage alignment marks.
Allow wafer plane deviation check with Focus Monitorings: Disabled
Parameter indicates how long overlay data will be stored.s: Short retention period.
Level sensor Ry drift corrections: Disabled
Fading Control Switchs: Disabled
Improved wafer reject modes: Disabled
Automated Lens Heating Calibrations: Disabled
Lens heating History in LH Feedforwards: Enabled
Allow different Exp,TIS Align sets: Absent
Imaging Fading Controls: Disabled
Gridmappers: Disabled
2D grid corrections: Enabled
Double TIS scans: DisabledSymmetrical Reticle Alignments: Disabled
Ast offset correction in TIS LHFB/LOCO (Version 3)s: Enabled
Choice of avoidance routing.s: Absent
NEXZ-tilt per exposures: The NEXZ-tilt cannot be adjusted per exposure.
Off-axis slits: Projection lens has no off-axis slit.
Improved Edge Field Levelings: Disabled
Enhanced Throughput Reticle Alignments: Present
Wavelength Adjustables: Adjustable
Allow L1L7 Type 1 Optimizations: Absent
Lot Alignment Report Encryptions: Unencrypted
Stage Alignment Filters: Present
Lot Correction Sequences: Unencrypted
Stage Alignment Filters: Present
Lot Correction Sequences: Type B
Lens Heating Feedbacks: Present
Application Specific Lens Heating Calibration and Verifications: Present
Improved Contrast Controls: Absent
ILIAS lens setups: Absent
Air Gauge Improved Levellings: Absent
Process Dependent Gain Corrections: Absent
Enhanced Exposure Overlays: Absent
ALE 1 Uses: Lens heating only
Overlay Nodes: Level 0
E-chuck Flatness Qualification Tests: Disabled
TOP HDs: Absent
Reticle Align High Precisions: Absent
LS spot coverages: Absent
Layout Version Number TIS Plate 1 on Chuck 1s/2s: TIS Plate 1 Layout Version 2
Layout Version Number TIS Plate 2 on Chuck 1s2s: TIS Plate 2 Layout Version 4
Usage of wavelength/ Energy Sensor data by TISs: Disabled
Indication what kind of AM controller hardware is presents: SUCR
Piezo Active Lens Mountss: Absent
ILIAS Functionality For Lithoguides: Present
ISIS Functionality For Lithoguides: Absent
SAMOS Stray Light Test For Lithoguides: Present
PUPIL Measurement For Lithoguides: Present
FOCAL Measurement for Lithoguides: Present
Leveling Verification Test for Lithoguides: Present
Lithoguide Imaging Recipess: Absent
Dose System Performance Test for Lithoguides: Present
ILIAS Sensor Locations: Chuck 2
ILIAS sensor type chuck 2s: Multiple scan grid
ILIAS sensor type chuck 1s: NoneReticle Level Polarization Sensors: Absent
SASO robustness and fiber connectivitys: Disable SASO robustness
Extended X width masking ranges: Disabled
PDO offset for EFL LS spots: Disabled
Assure System Snapshotss: not allowed
Insert a delay time before starting a Lot (lens heating).s: Enabled
Save throughput data to the disks: Disabled
Patch strategys: Patchlevel
Chuck Dedications: Basic
Application Types: Scanner Application
Number of RMCS clients: No clients
MDL Viewers: Site View
ZERO Fiducials: ILIAS MK2
Machine Architectures: XT Machine Architecture
XT Architecture Revisions: Rev1
Machine Types: 1250
Machine Specifications: pep-D Specification
Stand-alone Workstations: FALSE
CP 1As/1Bs/2s/3s/4s/5s/6s: Absent
Wafer Handler Productivitys: Level 0

LENS DATA (SEE ALSO ATTACHED DOCUMENT) :-

 

­Operator:ASML Machine:6xxx Release:4.1.0 Date:16/07/2015 Time:16:10

 

Report Filename : EMCA.68

Report Path : TM/Projection/StrayLightMonitoring/EMCA.log/

Machine Type : 1250D

 

Testname : Straylight At Multiple Opaque Squares

Start Time : Thu, 16 Jul 2015 16:07:37 096389us +0800

Stop Time : Thu, 16 Jul 2015 16:10:47 841204us +0800

Execution Time : 00:03:10

Test Run Result : Finished

Test Status : Test is Finished

Comment :

 

 

 

+----------------------------------+------------+-----------+----------+

| Step | Start Time | Stop Time | Status |

+==================================+============+===========+==========+

| Prepare machine | 16:07:37 | 16:09:15 | Finished |

| Perform TIS measurements | 16:09:15 | 16:10:08 | Finished |

| Perform Spot sensor measurements | 16:10:08 | 16:10:27 | Finished |

| Create testlog | 16:10:27 | 16:10:40 | Finished |

| Unload reticle | 16:10:40 | 16:10:46 | Finished |

| Calculate stray light | 16:10:46 | 16:10:47 | Finished |

+----------------------------------+------------+-----------+----------+

+----------------+

| Execution Time |

+================+

| 00:01:37 |

| 00:00:53 |

| 00:00:18 |

| 00:00:13 |

| 00:00:05 |

| 00:00:01 |

+----------------+

 

 

 

 

 

Main Results

Test Log Name : 6xxx

Machine Number : 6xxx

Machine Type : 1250D

Lens Number : 0122xxxx

ELLE ID :

Measurement Time : 07/16/2015 16:10

Comment :

Pupil Shape

Illumination mode : Annular

NA : 0.850

DOE ID : 15

Sigma

inner : 0.690

outer : 0.930

Reticle ID : 45563154P009

Number of Cycles : 1

Attenuator Factor : 0.600

Chuck ID : CHUCK_ID_1

TIS Plate ID : PLATE_1

PGA gain : PGA_GAIN_10DB

Number of Samples : 100

Defocus : 0.000 [um]

Rema Usage TIS : Homed

Number of Laser Pulses : 50

Laser Frequency : 4000 [Hz]

Energy : 11.25 [mJ]

Rema Usage Spot Sensor : Homed

Dark Current : 576 [bits]

Reference Blocksize : 33 [um]

Straylight at ref. blocksize : 1.35 [%]

Max. Straylight position

X : -3.55 [mm]

Y : 6.60 [mm]

 

Detailled Results

+----------------+-----------+----------+-------------+----------+

| position | | | | |

|--------+-------+ | | | |

| X | Y | sensor | pad size | Stray Light | used ref |

| [mm] | [mm] | | [um] | [%] | |

+========+=======+===========+==========+=============+==========+

| -10.25 | 7.00 | TIS Ratio | 108 | 0.84 | 1 |

| -10.25 | 6.40 | TIS Ratio | 68 | 0.88 | 1 |

| -10.55 | 7.00 | TIS Ratio | 48 | 1.03 | 1 |

| -10.55 | 6.80 | TIS Ratio | 36 | 1.02 | 1 |

| -10.55 | 6.60 | TIS Ratio | 33 | 1.04 | 1 |

| -10.55 | 6.40 | TIS Ratio | 30 | 1.12 | 1 |

| -10.50 | 8.30 | TIS Ratio | 0 | 0.00 | 0 |

| -10.50 | 10.80 | TIS Ratio | 1100 | 0.49 | 3 |

| -10.50 | 8.45 | TIS Ratio | 0 | 0.00 | 0 |

| -6.75 | 7.00 | TIS Ratio | 108 | 0.85 | 4 |

| -6.75 | 6.40 | TIS Ratio | 68 | 0.91 | 4 |

| -7.05 | 7.00 | TIS Ratio | 48 | 1.00 | 4 |

| -7.05 | 6.80 | TIS Ratio | 36 | 1.04 | 4 |

| -7.05 | 6.60 | TIS Ratio | 33 | 0.97 | 4 |

| -7.05 | 6.40 | TIS Ratio | 30 | 1.12 | 4 |

| -7.00 | 8.30 | TIS Ratio | 0 | 0.00 | 0 |

| -7.00 | 10.80 | TIS Ratio | 1100 | 0.53 | 6 |

| -7.00 | 8.45 | TIS Ratio | 0 | 0.00 | 0 |

| -3.25 | 7.00 | TIS Ratio | 108 | 1.01 | 7 |

| -3.25 | 6.40 | TIS Ratio | 68 | 1.26 | 7 |

| -3.55 | 7.00 | TIS Ratio | 48 | 1.17 | 7 |

| -3.55 | 6.80 | TIS Ratio | 36 | 1.25 | 7 |

| -3.55 | 6.60 | TIS Ratio | 33 | 1.35 | 7 |

| -3.55 | 6.40 | TIS Ratio | 30 | 1.28 | 7 |

| -3.50 | 8.30 | TIS Ratio | 0 | 0.00 | 0 |

| -3.50 | 10.80 | TIS Ratio | 1100 | 0.60 | 9 |

| -3.50 | 8.45 | TIS Ratio | 0 | 0.00 | 0 |

| 0.25 | 7.00 | TIS Ratio | 108 | 0.70 | 10 |

| 0.25 | 6.40 | TIS Ratio | 68 | 0.92 | 10 |

| -0.05 | 7.00 | TIS Ratio | 48 | 0.97 | 10 |

| -0.05 | 6.80 | TIS Ratio | 36 | 1.01 | 10 |

| -0.05 | 6.60 | TIS Ratio | 33 | 1.22 | 10 |

| -0.05 | 6.40 | TIS Ratio | 30 | 1.17 | 10 |

| 0.00 | 8.30 | TIS Ratio | 0 | 0.00 | 0 |

| 0.00 | 10.80 | TIS Ratio | 1100 | 0.57 | 12 |

| 0.00 | 8.45 | TIS Ratio | 0 | 0.00 | 0 |

| 3.75 | 7.00 | TIS Ratio | 108 | 0.71 | 13 |

| 3.75 | 6.40 | TIS Ratio | 68 | 0.88 | 13 |

| 3.45 | 7.00 | TIS Ratio | 48 | 0.89 | 13 |

| 3.45 | 6.80 | TIS Ratio | 36 | 0.99 | 13 |

| 3.45 | 6.60 | TIS Ratio | 33 | 1.02 | 13 |

| 3.45 | 6.40 | TIS Ratio | 30 | 1.13 | 13 |

| 3.50 | 8.30 | TIS Ratio | 0 | 0.00 | 0 |

| 3.50 | 10.80 | TIS Ratio | 1100 | 0.57 | 15 |

| 3.50 | 8.45 | TIS Ratio | 0 | 0.00 | 0 |

| 7.25 | 7.00 | TIS Ratio | 108 | 0.87 | 16 |

| 7.25 | 6.40 | TIS Ratio | 68 | 0.92 | 16 |

| 6.95 | 7.00 | TIS Ratio | 48 | 1.00 | 16 |

| 6.95 | 6.80 | TIS Ratio | 36 | 1.01 | 16 |

| 6.95 | 6.60 | TIS Ratio | 33 | 0.99 | 16 |

| 6.95 | 6.40 | TIS Ratio | 30 | 1.12 | 16 |

| 7.00 | 8.30 | TIS Ratio | 0 | 0.00 | 0 |

| 7.00 | 10.80 | TIS Ratio | 1100 | 0.45 | 18 |

| 7.00 | 8.45 | TIS Ratio | 0 | 0.00 | 0 |

| 10.75 | 7.00 | TIS Ratio | 108 | 0.49 | 19 |

| 10.75 | 6.40 | TIS Ratio | 68 | 0.43 | 19 |

| 10.45 | 7.00 | TIS Ratio | 48 | 0.67 | 19 |

| 10.45 | 6.80 | TIS Ratio | 36 | 0.66 | 19 |

| 10.45 | 6.60 | TIS Ratio | 33 | 0.74 | 19 |

| 10.45 | 6.40 | TIS Ratio | 30 | 0.89 | 19 |

| 10.50 | 8.30 | TIS Ratio | 0 | 0.00 | 0 |

| 10.50 | 10.80 | TIS Ratio | 1100 | 0.39 | 21 |

| 10.50 | 8.45 | TIS Ratio | 0 | 0.00 | 0 |

| -10.50 | 10.80 | Spot | 1100 | 0.49 | 2 |

| -10.50 | 9.60 | Spot | 0 | 0.00 | 0 |

| -7.00 | 10.80 | Spot | 1100 | 0.53 | 5 |

| -7.00 | 9.60 | Spot | 0 | 0.00 | 0 |

| -3.50 | 10.80 | Spot | 1100 | 0.60 | 8 |

| -3.50 | 9.60 | Spot | 0 | 0.00 | 0 |

| 0.00 | 10.80 | Spot | 1100 | 0.57 | 11 |

| 0.00 | 9.60 | Spot | 0 | 0.00 | 0 |

| 3.50 | 10.80 | Spot | 1100 | 0.57 | 14 |

| 3.50 | 9.60 | Spot | 0 | 0.00 | 0 |

| 7.00 | 10.80 | Spot | 1100 | 0.45 | 17 |

| 7.00 | 9.60 | Spot | 0 | 0.00 | 0 |

| 10.50 | 10.80 | Spot | 1100 | 0.39 | 20 |

| 10.50 | 9.60 | Spot | 0 | 0.00 | 0 |

+--------+-------+-----------+----------+-------------+----------+

+--------+----------+--------+--------+--------+-------+

| | | | | | |

| | | | | | |

| ref id | used cal | cal id | Av TIS | cal | Av SS |

+========+==========+========+========+========+=======+

| 0 | 1 | 0 | 282.9 | -265.6 | 0.00 |

| 0 | 1 | 0 | 283.6 | -265.6 | 0.00 |

| 0 | 1 | 0 | 286.8 | -265.6 | 0.00 |

| 0 | 1 | 0 | 286.6 | -265.6 | 0.00 |

| 0 | 1 | 0 | 287.0 | -265.6 | 0.00 |

| 0 | 1 | 0 | 288.5 | -265.6 | 0.00 |

| 1 | 1 | 0 | 2319.6 | 0.0 | 0.00 |

| 0 | 1 | 1 | 275.7 | -265.6 | 0.00 |

| 3 | 0 | 1 | 2331.2 | 0.0 | 0.00 |

| 0 | 2 | 0 | 285.3 | -267.8 | 0.00 |

| 0 | 2 | 0 | 286.6 | -267.8 | 0.00 |

| 0 | 2 | 0 | 288.3 | -267.8 | 0.00 |

| 0 | 2 | 0 | 289.2 | -267.8 | 0.00 |

| 0 | 2 | 0 | 287.7 | -267.8 | 0.00 |

| 0 | 2 | 0 | 290.8 | -267.8 | 0.00 |

| 4 | 2 | 0 | 2328.0 | 0.0 | 0.00 |

| 0 | 2 | 2 | 278.6 | -267.8 | 0.00 |

| 6 | 0 | 2 | 2309.5 | 0.0 | 0.00 |

| 0 | 3 | 0 | 285.0 | -264.7 | 0.00 |

| 0 | 3 | 0 | 290.1 | -264.7 | 0.00 |

| 0 | 3 | 0 | 288.4 | -264.7 | 0.00 |

| 0 | 3 | 0 | 290.0 | -264.7 | 0.00 |

| 0 | 3 | 0 | 292.0 | -264.7 | 0.00 |

| 0 | 3 | 0 | 290.5 | -264.7 | 0.00 |

| 7 | 3 | 0 | 2281.4 | 0.0 | 0.00 |

| 0 | 3 | 3 | 277.0 | -264.7 | 0.00 |

| 9 | 0 | 3 | 2301.2 | 0.0 | 0.00 |

| 0 | 4 | 0 | 277.3 | -263.1 | 0.00 |

| 0 | 4 | 0 | 281.8 | -263.1 | 0.00 |

| 0 | 4 | 0 | 282.7 | -263.1 | 0.00 |

| 0 | 4 | 0 | 283.5 | -263.1 | 0.00 |

| 0 | 4 | 0 | 287.8 | -263.1 | 0.00 |

| 0 | 4 | 0 | 286.7 | -263.1 | 0.00 |

| 10 | 4 | 0 | 2282.6 | 0.0 | 0.00 |

| 0 | 4 | 4 | 274.5 | -263.1 | 0.00 |

| 12 | 0 | 4 | 2251.7 | 0.0 | 0.00 |

| 0 | 5 | 0 | 278.2 | -264.0 | 0.00 |

| 0 | 5 | 0 | 281.6 | -264.0 | 0.00 |

| 0 | 5 | 0 | 281.8 | -264.0 | 0.00 |

| 0 | 5 | 0 | 283.8 | -264.0 | 0.00 |

| 0 | 5 | 0 | 284.3 | -264.0 | 0.00 |

| 0 | 5 | 0 | 286.6 | -264.0 | 0.00 |

| 13 | 5 | 0 | 2262.3 | 0.0 | 0.00 |

| 0 | 5 | 5 | 275.5 | -264.0 | 0.00 |

| 15 | 0 | 5 | 2286.1 | 0.0 | 0.00 |

| 0 | 6 | 0 | 277.1 | -259.4 | 0.00 |

| 0 | 6 | 0 | 278.1 | -259.4 | 0.00 |

| 0 | 6 | 0 | 279.8 | -259.4 | 0.00 |

| 0 | 6 | 0 | 279.9 | -259.4 | 0.00 |

| 0 | 6 | 0 | 279.6 | -259.4 | 0.00 |

| 0 | 6 | 0 | 282.1 | -259.4 | 0.00 |

| 16 | 6 | 0 | 2294.1 | 0.0 | 0.00 |

| 0 | 6 | 6 | 268.4 | -259.4 | 0.00 |

| 18 | 0 | 6 | 2267.8 | 0.0 | 0.00 |

| 0 | 7 | 0 | 273.6 | -263.5 | 0.00 |

| 0 | 7 | 0 | 272.2 | -263.5 | 0.00 |

| 0 | 7 | 0 | 277.1 | -263.5 | 0.00 |

| 0 | 7 | 0 | 276.9 | -263.5 | 0.00 |

| 0 | 7 | 0 | 278.5 | -263.5 | 0.00 |

| 0 | 7 | 0 | 281.6 | -263.5 | 0.00 |

| 19 | 7 | 0 | 2295.2 | 0.0 | 0.00 |

| 0 | 7 | 7 | 271.4 | -263.5 | 0.00 |

| 21 | 0 | 7 | 2289.7 | 0.0 | 0.00 |

| 0 | 0 | 1 | 0.0 | 0.0 | 0.00 |

| 2 | 0 | 1 | 0.0 | 0.0 | 0.91 |

| 0 | 0 | 2 | 0.0 | 0.0 | 0.00 |

| 5 | 0 | 2 | 0.0 | 0.0 | 0.91 |

| 0 | 0 | 3 | 0.0 | 0.0 | 0.01 |

| 8 | 0 | 3 | 0.0 | 0.0 | 0.92 |

| 0 | 0 | 4 | 0.0 | 0.0 | 0.01 |

| 11 | 0 | 4 | 0.0 | 0.0 | 0.91 |

| 0 | 0 | 5 | 0.0 | 0.0 | 0.01 |

| 14 | 0 | 5 | 0.0 | 0.0 | 0.91 |

| 0 | 0 | 6 | 0.0 | 0.0 | 0.00 |

| 17 | 0 | 6 | 0.0 | 0.0 | 0.92 |

| 0 | 0 | 7 | 0.0 | 0.0 | 0.00 |

| 20 | 0 | 7 | 0.0 | 0.0 | 0.92 |

+--------+----------+--------+--------+--------+-------+

 

 

Operator:ASML Machine:6xxx Release:4.1.0 Date:13/05/2015 Time:21:07

 

Report Filename : EMZQ.76

Report Path : TM/Projection/AberrationsQualification/ILIAS/EMZQ.log/

Machine Type : 1250D

 

Testname : Ilias Lens Qualification

Start Time : Wed, 13 May 2015 20:03:24 088689us +0800

Stop Time : Wed, 13 May 2015 21:07:27 542791us +0800

Execution Time : 01:04:03

Test Run Result : Finished

Test Status : Test is Finished

Results Validation : N.A.

Measurement Quality : N.A.

Comment :

 

 

 

+----------------------+------------+-----------+----------+----------------+

| Step | Start Time | Stop Time | Status | Execution Time |

+======================+============+===========+==========+================+

| Initialize Data | 20:03:24 | 20:03:25 | Finished | 00:00:01 |

| Prepare Machine | 20:03:25 | 20:06:04 | Finished | 00:02:39 |

| Perform Measurements | 20:06:04 | 21:06:35 | Finished | 01:00:30 |

| Model | 21:06:35 | 21:07:27 | Finished | 00:00:52 |

+----------------------+------------+-----------+----------+----------------+

 

Scenario Inputs

 

Selected Scenario : Manual

Verification Set : No Verification

Overrule Inputs : Yes

Manual Scenario Selected : Yes

 

 

 

 

 

 

 

Test Info

Machine ID : 6xxx

Machine type : 1250D

Lens ID : 0122xxxx

ELLE ID : 000000

Testlog : ZSQF_6xxx_20150513_2006_manual.tlg

Date and time of measurement : 05/13/2015 20:06

Reticle ID : 45564101P111

Measurements layout : UV13X2

Clearout reticle : Yes

Chuck ID : Chuck 2

Number of cycles : 1

Number of Y positions : 5

Lens Temperature : 22.00 [C]

Lens Pressure : 984.00 [mbar]

Lens Stability

 

Zernike delta over measurement time

+------+--------+-------+----------+

| | Delta | Spec. | In Spec. |

| | [nm] | [nm] | |

+======+========+=======+==========+

| Z5 | -0.104 | 2.000 | Yes |

| Z7 | -0.221 | 2.000 | Yes |

| Z9 | 0.095 | 2.000 | Yes |

| Z14 | -0.049 | 2.000 | Yes |

| Z16 | 0.054 | 2.000 | Yes |

+------+--------+-------+----------+

 

RMS values

+-------------+---------+------------------+-----------------------+

| | | After Correction | Deltas |

| | +---------+--------+-------+-------+-------+

| | Current | NEXZ | +SA | NEXZ | SA | Both |

| | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] |

+=============+=========+=========+========+=======+=======+=======+

| Spherical | 0.92 | 0.94 | 0.94 | -0.02 | 0.00 | -0.02 |

| Coma | 0.78 | 0.63 | 0.63 | 0.14 | 0.01 | 0.15 |

| Astigmatism | 1.10 | 1.10 | 1.10 | 0.00 | 0.00 | 0.00 |

| 3-foil | 0.55 | 0.56 | 0.57 | -0.01 | -0.00 | -0.01 |

| (Z5->Z37) | 2.27 | 2.29 | 2.28 | -0.01 | 0.01 | -0.01 |

| (Z38->) | 0.99 | 0.99 | 0.99 | 0.00 | 0.00 | 0.00 |

+-------------+---------+---------+--------+-------+-------+-------+

 

 

Measured Zernike distributions (integrated)

 

 

+-----+---------------+-------------------+---------------------+

| | Offset | Tilt in X | Curv in X |

| +-------+-------+---------+---------+----------+----------+

| | Value | Range | Value | Range | Value | Range |

| | [nm] | [nm] | [nm/cm] | [nm/cm] | [nm/cm2] | [nm/cm2] |

+=====+=======+=======+=========+=========+==========+==========+

| Z5 | -3.24 | 3.21 | -0.30 | 0.43 | 2.72 | 0.78 |

| Z6 | 0.70 | 0.57 | -0.24 | 0.44 | -0.20 | 1.28 |

| Z7 | 0.48 | 0.39 | 0.67 | 0.23 | -0.51 | 0.45 |

| Z8 | -0.49 | 2.89 | 0.22 | 0.51 | 0.62 | 2.11 |

| Z9 | -0.45 | 0.78 | -0.20 | 0.08 | 0.83 | 0.41 |

| Z14 | -0.07 | 0.23 | -0.08 | 0.38 | 0.39 | 0.25 |

| Z15 | -0.13 | 0.88 | 0.07 | 0.24 | 0.08 | 0.53 |

| Z16 | -0.59 | 0.83 | -0.43 | 0.15 | 0.95 | 0.48 |

+-----+-------+-------+---------+---------+----------+----------+

 

Non-integrated non-correctable aberration data (cycle averaged)

+-----+-------+------+

| | Min | Max |

| | [nm] | [nm] |

+=====+=======+======+

| Z5 | -4.80 | 3.87 |

| Z6 | -1.06 | 2.46 |

| Z7 | -1.90 | 1.12 |

| Z8 | -2.46 | 1.72 |

| Z9 | -1.04 | 1.30 |

| Z10 | -1.75 | 1.03 |

| Z11 | -1.78 | 2.18 |

| Z12 | -0.29 | 3.93 |

| Z13 | -1.77 | 1.48 |

| Z14 | -1.65 | 1.38 |

| Z15 | -1.14 | 0.83 |

| Z16 | -2.03 | 1.29 |

| Z17 | -3.41 | 0.09 |

| Z18 | -1.13 | 1.38 |

| Z19 | -1.20 | 2.14 |

| Z20 | -1.34 | 0.81 |

| Z21 | -2.50 | 2.00 |

| Z22 | -2.96 | 2.25 |

| Z23 | -0.81 | 1.77 |

| Z24 | -0.87 | 0.76 |

| Z25 | -1.56 | 1.58 |

| Z26 | -0.83 | 0.84 |

| Z27 | -0.98 | 0.85 |

| Z28 | 0.28 | 2.48 |

| Z29 | -1.27 | 0.89 |

| Z30 | -1.05 | 1.38 |

| Z31 | -1.18 | 1.00 |

| Z32 | -0.63 | 0.92 |

| Z33 | -1.07 | 0.86 |

| Z34 | -0.97 | 1.69 |

| Z35 | -0.64 | 0.75 |

| Z36 | -1.09 | 0.72 |

| Z37 | 1.30 | 2.83 |

+-----+-------+------+

 

Integrated non-correctable aberration (cycle averaged, scan integrated)

+-----+-------+-------+

| | Min | Max |

| | [nm] | [nm] |

+=====+=======+=======+

| Z5 | -3.51 | 1.49 |

| Z6 | -0.07 | 0.85 |

| Z7 | -0.70 | 0.71 |

| Z8 | -0.43 | 0.87 |

| Z9 | -0.75 | 0.78 |

| Z10 | -0.97 | 0.22 |

| Z11 | -0.72 | 0.50 |

| Z12 | 0.81 | 3.30 |

| Z13 | -1.08 | 0.03 |

| Z14 | -1.36 | 1.20 |

| Z15 | -0.17 | 0.20 |

| Z16 | -1.37 | 1.05 |

| Z17 | -2.74 | -1.71 |

| Z18 | -0.35 | 0.70 |

| Z19 | -0.86 | 1.23 |

| Z20 | -0.45 | 0.10 |

| Z21 | -1.57 | 1.15 |

| Z22 | -0.53 | -0.24 |

| Z23 | -0.55 | 1.40 |

| Z24 | -0.14 | 0.15 |

| Z25 | -1.34 | 1.30 |

| Z26 | -0.52 | 0.50 |

| Z27 | -0.62 | 0.23 |

| Z28 | 1.04 | 2.01 |

| Z29 | -0.06 | 0.28 |

| Z30 | -0.78 | 1.11 |

| Z31 | -0.30 | 0.09 |

| Z32 | -0.23 | 0.47 |

| Z33 | -0.29 | 0.08 |

| Z34 | -0.70 | 1.43 |

| Z35 | -0.10 | 0.15 |

| Z36 | -0.88 | 0.53 |

| Z37 | 1.56 | 2.20 |

+-----+-------+-------+

 

Integrated non-correctable aberration (cycle averaged, scan integrated)

 

 

 

+----+--------+------+------+------+-------+-------+-------+

| | X | Z2 | Z3 | Z4 | Z5 | Z6 | Z7 |

| | [mm] | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] |

+====+========+======+======+======+=======+=======+=======+

| 0 | -12.72 | | | | 1.49 | 0.80 | -0.70 |

| 1 | -10.60 | | | | 0.70 | 0.39 | -0.21 |

| 2 | -8.48 | | | | -0.63 | 0.55 | -0.16 |

| 3 | -6.36 | | | | -1.82 | 0.42 | -0.00 |

| 4 | -4.24 | | | | -3.17 | 0.52 | 0.57 |

| 5 | -2.12 | | | | -3.51 | 0.57 | 0.71 |

| 6 | -0.00 | | | | -3.51 | 0.79 | 0.39 |

| 7 | 2.12 | | | | -3.37 | 0.62 | -0.25 |

| 8 | 4.24 | | | | -2.69 | 0.81 | 0.01 |

| 9 | 6.36 | | | | -1.77 | 0.85 | 0.16 |

| 10 | 8.48 | | | | -0.54 | 0.67 | -0.02 |

| 11 | 10.60 | | | | 0.70 | 0.51 | -0.19 |

| 12 | 12.72 | | | | 0.14 | -0.07 | -0.48 |

+----+--------+------+------+------+-------+-------+-------+

 

 

+----+--------+-------+-------+-------+-------+------+-------+

| | X | Z8 | Z9 | Z10 | Z11 | Z12 | Z13 |

| | [mm] | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] |

+====+========+=======+=======+=======+=======+======+=======+

| 0 | -12.72 | 0.33 | 0.76 | -0.97 | 0.32 | 0.94 | -0.06 |

| 1 | -10.60 | 0.17 | 0.57 | 0.08 | 0.50 | 0.81 | 0.03 |

| 2 | -8.48 | -0.15 | 0.04 | 0.22 | 0.13 | 1.12 | 0.01 |

| 3 | -6.36 | -0.41 | -0.75 | 0.09 | -0.42 | 1.06 | -0.00 |

| 4 | -4.24 | -0.42 | -0.38 | -0.13 | -0.29 | 2.65 | -0.24 |

| 5 | -2.12 | -0.43 | -0.29 | 0.06 | -0.35 | 3.04 | -0.02 |

| 6 | -0.00 | -0.30 | -0.40 | 0.05 | -0.42 | 3.08 | -0.17 |

| 7 | 2.12 | -0.31 | -0.18 | -0.25 | -0.72 | 3.30 | -0.50 |

| 8 | 4.24 | -0.11 | -0.21 | 0.13 | -0.54 | 3.09 | -0.69 |

| 9 | 6.36 | -0.06 | -0.44 | -0.15 | -0.58 | 1.81 | -0.65 |

| 10 | 8.48 | 0.04 | 0.25 | -0.61 | -0.62 | 2.15 | -0.78 |

| 11 | 10.60 | 0.68 | 0.67 | -0.71 | -0.17 | 1.72 | -0.79 |

| 12 | 12.72 | 0.87 | 0.78 | 0.09 | 0.17 | 1.82 | -1.08 |

+----+--------+-------+-------+-------+-------+------+-------+

 

 

+----+--------+-------+-------+-------+-------+-------+-------+

| | X | Z14 | Z15 | Z16 | Z17 | Z18 | Z19 |

| | [mm] | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] |

+====+========+=======+=======+=======+=======+=======+=======+

| 0 | -12.72 | 1.20 | -0.03 | 1.05 | -1.83 | 0.24 | 1.23 |

| 1 | -10.60 | 0.23 | 0.11 | 0.65 | -2.21 | 0.18 | -0.07 |

| 2 | -8.48 | 0.43 | 0.05 | 0.64 | -2.20 | 0.42 | 0.36 |

| 3 | -6.36 | -0.42 | -0.04 | 0.60 | -2.74 | 0.13 | 0.36 |

| 4 | -4.24 | -1.36 | -0.17 | -0.27 | -2.22 | -0.05 | 0.01 |

| 5 | -2.12 | -1.11 | -0.17 | -0.97 | -2.34 | 0.10 | 0.15 |

| 6 | -0.00 | -0.50 | -0.05 | -1.37 | -2.45 | 0.01 | -0.15 |

| 7 | 2.12 | 0.52 | 0.06 | -1.29 | -2.07 | -0.35 | -0.21 |

| 8 | 4.24 | 1.20 | 0.12 | -0.57 | -1.95 | -0.30 | 0.01 |

| 9 | 6.36 | 0.63 | 0.20 | 0.08 | -2.45 | 0.10 | -0.37 |

| 10 | 8.48 | 0.31 | 0.09 | 0.01 | -1.71 | 0.45 | -0.10 |

| 11 | 10.60 | 0.28 | 0.08 | -0.05 | -1.78 | 0.59 | 0.27 |

| 12 | 12.72 | -0.62 | 0.18 | -0.02 | -1.94 | 0.70 | -0.86 |

+----+--------+-------+-------+-------+-------+-------+-------+

 

 

+----+--------+-------+-------+-------+-------+-------+-------+

| | X | Z20 | Z21 | Z22 | Z23 | Z24 | Z25 |

| | [mm] | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] |

+====+========+=======+=======+=======+=======+=======+=======+

| 0 | -12.72 | -0.45 | 0.69 | -0.24 | 1.40 | 0.15 | -0.72 |

| 1 | -10.60 | -0.34 | 0.76 | -0.38 | 1.29 | 0.08 | -1.34 |

| 2 | -8.48 | 0.04 | 1.06 | -0.44 | 0.38 | -0.03 | -1.09 |

| 3 | -6.36 | 0.10 | 1.15 | -0.50 | 0.57 | 0.06 | -0.34 |

| 4 | -4.24 | -0.16 | -0.15 | -0.43 | 0.63 | 0.02 | 0.34 |

| 5 | -2.12 | -0.25 | -1.03 | -0.33 | 0.82 | -0.04 | 0.85 |

| 6 | -0.00 | -0.08 | -1.57 | -0.39 | 0.97 | -0.08 | 1.30 |

| 7 | 2.12 | -0.17 | -1.27 | -0.37 | 0.78 | -0.05 | 1.00 |

| 8 | 4.24 | -0.23 | -0.13 | -0.42 | 1.02 | -0.14 | 0.47 |

| 9 | 6.36 | -0.10 | 0.97 | -0.37 | 0.64 | -0.13 | -0.08 |

| 10 | 8.48 | -0.08 | 0.97 | -0.27 | 0.48 | -0.14 | -0.81 |

| 11 | 10.60 | -0.20 | 0.59 | -0.51 | -0.43 | -0.02 | -1.20 |

| 12 | 12.72 | -0.16 | 0.27 | -0.53 | -0.55 | -0.10 | -0.55 |

+----+--------+-------+-------+-------+-------+-------+-------+

 

 

+----+--------+-------+-------+------+-------+-------+-------+

| | X | Z26 | Z27 | Z28 | Z29 | Z30 | Z31 |

| | [mm] | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] |

+====+========+=======+=======+======+=======+=======+=======+

| 0 | -12.72 | 0.20 | -0.62 | 1.36 | 0.28 | 1.11 | -0.01 |

| 1 | -10.60 | -0.52 | -0.57 | 1.05 | 0.15 | 0.58 | -0.30 |

| 2 | -8.48 | -0.25 | -0.06 | 1.19 | -0.06 | -0.25 | -0.29 |

| 3 | -6.36 | 0.06 | 0.23 | 1.76 | -0.04 | -0.05 | -0.14 |

| 4 | -4.24 | 0.40 | -0.16 | 1.68 | -0.02 | -0.00 | -0.27 |

| 5 | -2.12 | 0.50 | -0.37 | 1.99 | 0.08 | 0.19 | -0.19 |

| 6 | -0.00 | 0.02 | -0.25 | 1.94 | -0.04 | 0.05 | -0.16 |

| 7 | 2.12 | -0.08 | -0.10 | 2.01 | 0.08 | -0.21 | -0.11 |

| 8 | 4.24 | -0.11 | -0.12 | 1.97 | 0.05 | 0.14 | 0.03 |

| 9 | 6.36 | -0.23 | 0.10 | 1.80 | 0.27 | 0.12 | 0.09 |

| 10 | 8.48 | 0.12 | 0.18 | 1.18 | 0.20 | 0.47 | 0.07 |

| 11 | 10.60 | 0.39 | 0.14 | 1.04 | 0.14 | -0.37 | 0.04 |

| 12 | 12.72 | 0.04 | 0.01 | 1.13 | 0.13 | -0.78 | -0.16 |

+----+--------+-------+-------+------+-------+-------+-------+

 

 

+----+--------+-------+-------+-------+-------+-------+------+

| | X | Z32 | Z33 | Z34 | Z35 | Z36 | Z37 |

| | [mm] | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] |

+====+========+=======+=======+=======+=======+=======+======+

| 0 | -12.72 | 0.14 | -0.29 | 1.33 | 0.04 | 0.01 | 1.56 |

| 1 | -10.60 | -0.23 | -0.20 | 1.43 | 0.08 | -0.51 | 1.69 |

| 2 | -8.48 | -0.12 | -0.19 | 1.10 | 0.15 | -0.88 | 1.71 |

| 3 | -6.36 | -0.15 | -0.23 | 0.28 | 0.03 | -0.56 | 1.57 |

| 4 | -4.24 | -0.05 | -0.15 | 0.23 | -0.00 | -0.11 | 1.63 |

| 5 | -2.12 | 0.18 | -0.29 | 0.02 | -0.06 | 0.21 | 1.90 |

| 6 | -0.00 | 0.36 | -0.09 | 0.38 | -0.10 | 0.43 | 2.20 |

| 7 | 2.12 | 0.39 | -0.09 | 1.01 | 0.02 | 0.32 | 1.85 |

| 8 | 4.24 | 0.11 | 0.08 | 0.51 | 0.01 | 0.21 | 1.67 |

| 9 | 6.36 | 0.22 | 0.07 | 0.50 | 0.03 | -0.27 | 1.64 |

| 10 | 8.48 | -0.04 | -0.01 | -0.36 | 0.05 | -0.41 | 1.73 |

| 11 | 10.60 | -0.05 | -0.04 | -0.63 | 0.00 | -0.19 | 1.85 |

| 12 | 12.72 | 0.47 | 0.08 | -0.70 | 0.05 | 0.53 | 1.87 |

+----+--------+-------+-------+-------+-------+-------+------+

 

Non-integrated non-correctable aberration data (cycle averaged)

 

 

 

+----+--------+-------+------+------+------+-------+-------+-------+

| | X | Y | Z2 | Z3 | Z4 | Z5 | Z6 | Z7 |

| | [mm] | [mm] | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] |

+====+========+=======+======+======+======+=======+=======+=======+

| 0 | -12.72 | 3.60 | | | | 1.99 | 0.56 | -0.48 |

| 1 | -10.60 | 3.60 | | | | -0.04 | 0.51 | -0.27 |

| 2 | -8.48 | 3.60 | | | | -1.03 | 0.91 | 0.27 |

| 3 | -6.36 | 3.60 | | | | -1.61 | 0.06 | 0.15 |

| 4 | -4.24 | 3.60 | | | | -2.67 | 0.94 | 1.12 |

| 5 | -2.12 | 3.60 | | | | -3.15 | 0.45 | 1.03 |

| 6 | -0.00 | 3.60 | | | | -2.96 | 0.93 | 0.51 |

| 7 | 2.12 | 3.60 | | | | -3.28 | 1.15 | 0.02 |

| 8 | 4.24 | 3.60 | | | | -2.86 | 0.70 | -0.13 |

| 9 | 6.36 | 3.60 | | | | -1.96 | 1.28 | 0.33 |

| 10 | 8.48 | 3.60 | | | | -0.81 | 0.15 | -0.09 |

| 11 | 10.60 | 3.60 | | | | 0.12 | -0.19 | 0.13 |

| 12 | 12.72 | 3.60 | | | | -0.03 | -0.98 | -0.92 |

| 13 | -12.72 | 1.80 | | | | 0.86 | -1.06 | -0.50 |

| 14 | -10.60 | 1.80 | | | | 0.11 | -0.29 | -0.52 |

| 15 | -8.48 | 1.80 | | | | -1.67 | 1.50 | -0.65 |

| 16 | -6.36 | 1.80 | | | | -2.90 | 0.98 | 0.21 |

| 17 | -4.24 | 1.80 | | | | -4.44 | 0.52 | 0.79 |

| 18 | -2.12 | 1.80 | | | | -4.63 | 0.25 | 0.54 |

| 19 | -0.00 | 1.80 | | | | -4.80 | 0.87 | 0.30 |

| 20 | 2.12 | 1.80 | | | | -4.28 | 1.02 | -0.01 |

| 21 | 4.24 | 1.80 | | | | -3.83 | 0.46 | 0.26 |

| 22 | 6.36 | 1.80 | | | | -2.79 | 0.28 | 0.14 |

| 23 | 8.48 | 1.80 | | | | -1.56 | 0.84 | 0.22 |

| 24 | 10.60 | 1.80 | | | | -0.27 | 1.20 | -0.05 |

| 25 | 12.72 | 1.80 | | | | -1.64 | -0.83 | -0.54 |

| 26 | -12.72 | -0.00 | | | | -0.44 | 0.42 | 0.13 |

| 27 | -10.60 | -0.00 | | | | 0.65 | 0.22 | -0.04 |

| 28 | -8.48 | -0.00 | | | | -0.46 | 0.56 | -0.83 |

| 29 | -6.36 | -0.00 | | | | -2.78 | 0.53 | -0.02 |

| 30 | -4.24 | -0.00 | | | | -4.42 | 0.61 | 0.64 |

| 31 | -2.12 | -0.00 | | | | -4.50 | 0.36 | 0.75 |

| 32 | -0.00 | -0.00 | | | | -4.59 | 1.32 | 0.42 |

| 33 | 2.12 | -0.00 | | | | -3.89 | 0.67 | -0.58 |

| 34 | 4.24 | -0.00 | | | | -3.46 | 0.65 | 0.27 |

| 35 | 6.36 | -0.00 | | | | -2.40 | 0.65 | 0.16 |

| 36 | 8.48 | -0.00 | | | | -0.93 | 0.57 | 0.12 |

| 37 | 10.60 | -0.00 | | | | 0.07 | 0.48 | -0.40 |

| 38 | 12.72 | -0.00 | | | | -1.10 | -0.28 | -0.17 |

| 39 | -12.72 | -1.80 | | | | 1.18 | 2.46 | -0.75 |

| 40 | -10.60 | -1.80 | | | | 1.06 | 1.24 | 0.05 |

| 41 | -8.48 | -1.80 | | | | -0.57 | -0.35 | -0.26 |

| 42 | -6.36 | -1.80 | | | | -2.10 | -0.32 | -0.19 |

| 43 | -4.24 | -1.80 | | | | -3.53 | 0.55 | 0.26 |

| 44 | -2.12 | -1.80 | | | | -4.05 | 1.08 | 0.55 |

| 45 | -0.00 | -1.80 | | | | -3.85 | 0.41 | 0.19 |

| 46 | 2.12 | -1.80 | | | | -4.09 | -0.07 | -0.19 |

| 47 | 4.24 | -1.80 | | | | -3.14 | 1.28 | 0.03 |

| 48 | 6.36 | -1.80 | | | | -2.19 | 1.63 | 0.03 |

| 49 | 8.48 | -1.80 | | | | -0.55 | 0.75 | 0.19 |

| 50 | 10.60 | -1.80 | | | | 1.12 | 0.26 | -0.13 |

| 51 | 12.72 | -1.80 | | | | 0.58 | 0.42 | -0.35 |

| 52 | -12.72 | -3.60 | | | | 3.87 | 1.62 | -1.90 |

| 53 | -10.60 | -3.60 | | | | 1.74 | 0.26 | -0.24 |

| 54 | -8.48 | -3.60 | | | | 0.57 | 0.11 | 0.69 |

| 55 | -6.36 | -3.60 | | | | 0.30 | 0.82 | -0.18 |

| 56 | -4.24 | -3.60 | | | | -0.77 | -0.01 | 0.05 |

| 57 | -2.12 | -3.60 | | | | -1.20 | 0.72 | 0.69 |

| 58 | -0.00 | -3.60 | | | | -1.37 | 0.44 | 0.50 |

| 59 | 2.12 | -3.60 | | | | -1.30 | 0.32 | -0.47 |

| 60 | 4.24 | -3.60 | | | | -0.17 | 0.98 | -0.36 |

| 61 | 6.36 | -3.60 | | | | 0.50 | 0.40 | 0.13 |

| 62 | 8.48 | -3.60 | | | | 1.16 | 1.05 | -0.56 |

| 63 | 10.60 | -3.60 | | | | 2.45 | 0.81 | -0.51 |

| 64 | 12.72 | -3.60 | | | | 2.90 | 1.32 | -0.42 |

+----+--------+-------+------+------+------+-------+-------+-------+

 

 

+----+--------+-------+-------+-------+-------+-------+-------+-------+

| | X | Y | Z8 | Z9 | Z10 | Z11 | Z12 | Z13 |

| | [mm] | [mm] | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] |

+====+========+=======+=======+=======+=======+=======+=======+=======+

| 0 | -12.72 | 3.60 | -0.59 | 0.71 | 0.36 | 2.18 | 1.30 | -0.61 |

| 1 | -10.60 | 3.60 | -0.19 | 0.51 | 0.77 | 1.18 | 1.58 | -0.14 |

| 2 | -8.48 | 3.60 | 0.66 | 0.03 | -0.00 | 0.58 | 1.94 | 0.37 |

| 3 | -6.36 | 3.60 | 0.89 | -0.71 | -0.46 | 0.16 | 1.98 | 1.48 |

| 4 | -4.24 | 3.60 | 0.44 | -0.30 | -0.16 | -0.86 | 3.33 | 0.64 |

| 5 | -2.12 | 3.60 | 0.57 | -0.07 | 0.07 | -1.10 | 3.43 | 0.40 |

| 6 | -0.00 | 3.60 | 0.41 | -0.23 | -0.05 | -0.95 | 2.90 | 0.23 |

| 7 | 2.12 | 3.60 | 0.27 | -0.06 | 0.03 | -1.46 | 3.35 | -0.12 |

| 8 | 4.24 | 3.60 | 0.37 | -0.03 | 0.60 | -1.48 | 3.43 | -1.07 |

| 9 | 6.36 | 3.60 | 0.96 | -0.22 | 0.33 | -0.99 | 2.63 | -1.66 |

| 10 | 8.48 | 3.60 | 0.79 | 0.43 | -0.06 | -1.18 | 2.70 | -1.77 |

| 11 | 10.60 | 3.60 | 0.50 | 0.72 | 0.09 | -0.81 | 2.64 | -1.38 |

| 12 | 12.72 | 3.60 | 0.15 | 0.42 | 1.00 | -0.74 | 2.77 | -0.95 |

| 13 | -12.72 | 1.80 | 1.17 | 0.80 | -0.16 | 0.41 | 0.93 | 0.26 |

| 14 | -10.60 | 1.80 | 0.45 | 0.22 | 1.03 | 0.28 | 1.26 | 0.68 |

| 15 | -8.48 | 1.80 | 0.19 | -0.32 | 0.72 | 0.08 | 1.75 | -0.10 |

| 16 | -6.36 | 1.80 | 0.57 | -1.04 | 0.43 | -0.66 | 1.49 | 0.53 |

| 17 | -4.24 | 1.80 | 0.87 | -0.47 | 0.19 | -0.78 | 3.25 | 0.28 |

| 18 | -2.12 | 1.80 | 0.86 | -0.58 | 0.35 | -1.29 | 3.92 | -0.14 |

| 19 | -0.00 | 1.80 | 0.63 | -1.01 | 0.02 | -1.78 | 3.75 | 0.05 |

| 20 | 2.12 | 1.80 | 1.21 | -0.46 | -0.75 | -1.61 | 3.93 | -0.37 |

| 21 | 4.24 | 1.80 | 1.31 | -0.19 | -0.01 | -1.16 | 3.66 | -0.63 |

| 22 | 6.36 | 1.80 | 0.76 | -0.55 | -0.22 | -1.11 | 1.95 | -1.37 |

| 23 | 8.48 | 1.80 | 0.30 | 0.16 | -0.60 | -0.94 | 2.55 | -1.02 |

| 24 | 10.60 | 1.80 | 1.06 | 0.40 | -0.58 | -0.25 | 2.48 | -0.88 |

| 25 | 12.72 | 1.80 | 0.56 | 0.41 | 0.43 | -0.20 | 2.53 | -0.60 |

| 26 | -12.72 | -0.00 | 1.09 | 0.62 | -1.75 | -0.38 | 1.05 | 0.28 |

| 27 | -10.60 | -0.00 | 0.82 | 0.57 | -0.24 | -0.13 | 0.75 | -0.03 |

| 28 | -8.48 | -0.00 | 0.17 | -0.21 | 0.87 | -0.49 | 1.20 | 0.38 |

| 29 | -6.36 | -0.00 | -0.01 | -0.96 | 0.93 | -0.94 | 0.88 | -0.27 |

| 30 | -4.24 | -0.00 | 0.02 | -0.55 | 0.42 | -0.53 | 2.83 | -0.13 |

| 31 | -2.12 | -0.00 | -0.20 | -0.77 | -0.00 | -0.83 | 3.19 | 0.14 |

| 32 | -0.00 | -0.00 | 0.01 | -0.74 | -0.02 | -0.74 | 3.62 | -0.23 |

| 33 | 2.12 | -0.00 | 0.14 | -0.64 | -0.25 | -1.04 | 3.43 | -0.89 |

| 34 | 4.24 | -0.00 | 0.35 | -0.33 | -0.49 | -0.81 | 3.30 | -0.99 |

| 35 | 6.36 | -0.00 | 0.45 | -0.52 | -1.03 | -0.83 | 1.49 | -0.53 |

| 36 | 8.48 | -0.00 | 0.23 | 0.17 | -0.87 | -0.65 | 2.00 | -0.25 |

| 37 | 10.60 | -0.00 | 0.75 | 0.55 | -0.89 | 0.00 | 1.36 | -0.63 |

| 38 | 12.72 | -0.00 | 0.85 | 0.83 | -0.02 | 0.77 | 1.71 | -1.13 |

| 39 | -12.72 | -1.80 | 0.10 | 0.80 | -1.58 | 0.31 | 1.04 | 0.13 |

| 40 | -10.60 | -1.80 | 0.13 | 0.39 | -0.35 | 0.84 | 0.74 | 0.20 |

| 41 | -8.48 | -1.80 | -0.49 | 0.08 | 0.14 | 0.10 | 0.74 | -0.20 |

| 42 | -6.36 | -1.80 | -1.04 | -0.90 | 0.08 | -0.46 | 0.45 | -0.91 |

| 43 | -4.24 | -1.80 | -1.45 | -0.48 | -0.32 | -0.05 | 2.25 | -0.65 |

| 44 | -2.12 | -1.80 | -1.38 | -0.21 | 0.16 | 0.48 | 2.62 | 0.29 |

| 45 | -0.00 | -1.80 | -1.16 | -0.40 | 0.38 | 0.50 | 3.15 | -0.46 |

| 46 | 2.12 | -1.80 | -1.61 | -0.18 | -0.47 | -0.09 | 3.21 | -0.94 |

| 47 | 4.24 | -1.80 | -1.26 | -0.41 | -0.08 | -0.16 | 2.82 | -0.71 |

| 48 | 6.36 | -1.80 | -0.63 | -0.76 | -0.58 | -0.04 | 1.43 | -0.04 |

| 49 | 8.48 | -1.80 | -0.04 | -0.01 | -1.29 | -0.51 | 1.96 | -0.66 |

| 50 | 10.60 | -1.80 | 0.50 | 0.69 | -1.42 | 0.04 | 1.08 | -0.31 |

| 51 | 12.72 | -1.80 | 1.05 | 0.95 | -0.31 | 0.89 | 1.05 | -0.98 |

| 52 | -12.72 | -3.60 | -0.14 | 0.88 | -1.70 | -0.92 | 0.40 | -0.35 |

| 53 | -10.60 | -3.60 | -0.37 | 1.13 | -0.83 | 0.35 | -0.29 | -0.54 |

| 54 | -8.48 | -3.60 | -1.27 | 0.61 | -0.65 | 0.41 | -0.04 | -0.39 |

| 55 | -6.36 | -3.60 | -2.46 | -0.15 | -0.54 | -0.18 | 0.50 | -0.84 |

| 56 | -4.24 | -3.60 | -1.99 | -0.12 | -0.76 | 0.76 | 1.61 | -1.32 |

| 57 | -2.12 | -3.60 | -1.98 | 0.16 | -0.28 | 1.00 | 2.02 | -0.82 |

| 58 | -0.00 | -3.60 | -1.39 | 0.39 | -0.08 | 0.87 | 1.98 | -0.45 |

| 59 | 2.12 | -3.60 | -1.54 | 0.42 | 0.20 | 0.61 | 2.56 | -0.18 |

| 60 | 4.24 | -3.60 | -1.34 | -0.07 | 0.62 | 0.90 | 2.24 | -0.04 |

| 61 | 6.36 | -3.60 | -1.84 | -0.17 | 0.78 | 0.07 | 1.55 | 0.37 |

| 62 | 8.48 | -3.60 | -1.08 | 0.50 | -0.24 | 0.17 | 1.54 | -0.18 |

| 63 | 10.60 | -3.60 | 0.61 | 0.97 | -0.76 | 0.17 | 1.04 | -0.74 |

| 64 | 12.72 | -3.60 | 1.72 | 1.30 | -0.67 | 0.14 | 1.06 | -1.73 |

+----+--------+-------+-------+-------+-------+-------+-------+-------+

 

 

+----+--------+-------+-------+-------+-------+-------+-------+-------+

| | X | Y | Z14 | Z15 | Z16 | Z17 | Z18 | Z19 |

| | [mm] | [mm] | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] |

+====+========+=======+=======+=======+=======+=======+=======+=======+

| 0 | -12.72 | 3.60 | 1.03 | -0.17 | 1.17 | -2.59 | 0.86 | 1.36 |

| 1 | -10.60 | 3.60 | 0.39 | -0.11 | 0.60 | -2.59 | 1.32 | 0.51 |

| 2 | -8.48 | 3.60 | 0.30 | -1.14 | 0.43 | -2.70 | 1.00 | 0.63 |

| 3 | -6.36 | 3.60 | -0.13 | -1.00 | 0.55 | -3.34 | 0.48 | 0.11 |

| 4 | -4.24 | 3.60 | -1.33 | -0.49 | 0.03 | -2.54 | 0.77 | 0.08 |

| 5 | -2.12 | 3.60 | -0.86 | -0.05 | -0.64 | -2.68 | 0.15 | 0.39 |

| 6 | -0.00 | 3.60 | -0.32 | 0.07 | -1.00 | -2.38 | -0.32 | -0.13 |

| 7 | 2.12 | 3.60 | 0.66 | -0.02 | -0.96 | -1.96 | -0.84 | -0.71 |

| 8 | 4.24 | 3.60 | 1.13 | 0.15 | -0.63 | -1.78 | -1.13 | -0.33 |

| 9 | 6.36 | 3.60 | 0.50 | -0.44 | 0.09 | -2.16 | -0.26 | -0.41 |

| 10 | 8.48 | 3.60 | 0.19 | -0.73 | -0.35 | -1.76 | -0.17 | -0.28 |

| 11 | 10.60 | 3.60 | 0.33 | -0.40 | -0.25 | -1.57 | 0.09 | -0.03 |

| 12 | 12.72 | 3.60 | -0.86 | -0.01 | 0.05 | -1.39 | 0.37 | -1.11 |

| 13 | -12.72 | 1.80 | 1.21 | -0.12 | 0.80 | -2.80 | 0.48 | 0.70 |

| 14 | -10.60 | 1.80 | 0.94 | -0.29 | 0.33 | -2.63 | 0.56 | -0.68 |

| 15 | -8.48 | 1.80 | 0.79 | -0.17 | 0.59 | -2.51 | 0.45 | 0.15 |

| 16 | -6.36 | 1.80 | -0.67 | -0.52 | 0.44 | -3.41 | 1.05 | 0.63 |

| 17 | -4.24 | 1.80 | -1.36 | -0.30 | -0.49 | -3.25 | 0.71 | -0.30 |

| 18 | -2.12 | 1.80 | -0.99 | -0.43 | -1.33 | -3.18 | 0.42 | -0.20 |

| 19 | -0.00 | 1.80 | -0.45 | -0.04 | -1.68 | -2.94 | -0.14 | -0.18 |

| 20 | 2.12 | 1.80 | 0.30 | 0.06 | -1.71 | -2.86 | -0.46 | 0.02 |

| 21 | 4.24 | 1.80 | 1.34 | 0.07 | -0.86 | -2.78 | -1.08 | 0.21 |

| 22 | 6.36 | 1.80 | 0.90 | 0.07 | -0.32 | -3.16 | -1.01 | -0.34 |

| 23 | 8.48 | 1.80 | 0.37 | -0.08 | -0.47 | -2.11 | 0.11 | -0.17 |

| 24 | 10.60 | 1.80 | 0.20 | -0.17 | -0.50 | -1.99 | -0.00 | 0.43 |

| 25 | 12.72 | 1.80 | -1.13 | 0.19 | -0.27 | -2.27 | 0.34 | -0.33 |

| 26 | -12.72 | -0.00 | 1.36 | -0.17 | 0.96 | -2.20 | 0.14 | 0.76 |

| 27 | -10.60 | -0.00 | 0.36 | 0.21 | 0.71 | -2.75 | 0.14 | -0.49 |

| 28 | -8.48 | -0.00 | 0.78 | 0.51 | 0.70 | -1.97 | 0.35 | 0.21 |

| 29 | -6.36 | -0.00 | -0.89 | 0.42 | 0.37 | -3.21 | -0.13 | 0.45 |

| 30 | -4.24 | -0.00 | -1.41 | 0.15 | -0.67 | -2.88 | 0.04 | -0.28 |

| 31 | -2.12 | -0.00 | -0.98 | 0.33 | -1.39 | -2.46 | 0.15 | -0.14 |

| 32 | -0.00 | -0.00 | -0.38 | 0.37 | -2.03 | -2.89 | 0.19 | -0.19 |

| 33 | 2.12 | -0.00 | 0.27 | 0.53 | -1.69 | -2.40 | -0.07 | 0.17 |

| 34 | 4.24 | -0.00 | 1.08 | 0.44 | -0.85 | -2.66 | 0.03 | 0.56 |

| 35 | 6.36 | -0.00 | 1.03 | 0.43 | -0.07 | -2.80 | 0.04 | -0.20 |

| 36 | 8.48 | -0.00 | 0.18 | 0.36 | 0.28 | -1.87 | 0.06 | 0.04 |

| 37 | 10.60 | -0.00 | 0.25 | 0.83 | 0.06 | -1.94 | 0.44 | 0.60 |

| 38 | 12.72 | -0.00 | -0.59 | 0.45 | -0.13 | -2.40 | 0.54 | -0.49 |

| 39 | -12.72 | -1.80 | 1.38 | 0.43 | 1.02 | -1.64 | 0.15 | 1.22 |

| 40 | -10.60 | -1.80 | -0.10 | 0.59 | 0.75 | -2.01 | -0.24 | -0.16 |

| 41 | -8.48 | -1.80 | 0.27 | 0.63 | 0.76 | -2.08 | 0.30 | 0.53 |

| 42 | -6.36 | -1.80 | -0.44 | 0.51 | 0.70 | -2.30 | -0.72 | 0.29 |

| 43 | -4.24 | -1.80 | -1.65 | 0.13 | -0.19 | -1.65 | -0.98 | 0.28 |

| 44 | -2.12 | -1.80 | -1.31 | 0.29 | -1.07 | -2.24 | -0.03 | 0.05 |

| 45 | -0.00 | -1.80 | -0.59 | 0.42 | -1.43 | -2.40 | 0.25 | -0.14 |

| 46 | 2.12 | -1.80 | 0.66 | 0.45 | -1.40 | -2.15 | -0.18 | -0.07 |

| 47 | 4.24 | -1.80 | 1.36 | 0.27 | -0.47 | -1.89 | 0.55 | -0.14 |

| 48 | 6.36 | -1.80 | 0.64 | 0.70 | 0.30 | -2.28 | 1.12 | -0.58 |

| 49 | 8.48 | -1.80 | 0.20 | 0.62 | 0.35 | -1.43 | 0.85 | 0.24 |

| 50 | 10.60 | -1.80 | -0.12 | 0.47 | 0.13 | -1.90 | 1.04 | 0.80 |

| 51 | 12.72 | -1.80 | -0.24 | 0.17 | -0.02 | -1.94 | 0.98 | -1.19 |

| 52 | -12.72 | -3.60 | 1.01 | -0.10 | 1.29 | 0.09 | -0.43 | 2.14 |

| 53 | -10.60 | -3.60 | -0.42 | 0.18 | 0.84 | -1.04 | -0.90 | 0.45 |

| 54 | -8.48 | -3.60 | 0.04 | 0.41 | 0.72 | -1.75 | 0.00 | 0.27 |

| 55 | -6.36 | -3.60 | 0.06 | 0.39 | 0.94 | -1.46 | -0.03 | 0.33 |

| 56 | -4.24 | -3.60 | -1.05 | -0.31 | -0.04 | -0.77 | -0.79 | 0.29 |

| 57 | -2.12 | -3.60 | -1.40 | -0.97 | -0.43 | -1.13 | -0.20 | 0.62 |

| 58 | -0.00 | -3.60 | -0.73 | -1.07 | -0.73 | -1.61 | 0.06 | -0.11 |

| 59 | 2.12 | -3.60 | 0.68 | -0.74 | -0.68 | -0.98 | -0.22 | -0.48 |

| 60 | 4.24 | -3.60 | 1.11 | -0.35 | -0.05 | -0.63 | 0.15 | -0.27 |

| 61 | 6.36 | -3.60 | 0.08 | 0.23 | 0.40 | -1.84 | 0.62 | -0.30 |

| 62 | 8.48 | -3.60 | 0.61 | 0.26 | 0.26 | -1.40 | 1.38 | -0.31 |

| 63 | 10.60 | -3.60 | 0.74 | -0.30 | 0.29 | -1.48 | 1.37 | -0.44 |

| 64 | 12.72 | -3.60 | -0.27 | 0.10 | 0.27 | -1.71 | 1.25 | -1.20 |

+----+--------+-------+-------+-------+-------+-------+-------+-------+

 

 

+----+--------+-------+-------+-------+-------+-------+-------+-------+

| | X | Y | Z20 | Z21 | Z22 | Z23 | Z24 | Z25 |

| | [mm] | [mm] | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] |

+====+========+=======+=======+=======+=======+=======+=======+=======+

| 0 | -12.72 | 3.60 | -0.96 | 0.42 | -1.73 | 1.22 | -0.28 | -0.42 |

| 1 | -10.60 | 3.60 | 0.31 | 0.44 | -1.78 | 1.23 | 0.17 | -1.26 |

| 2 | -8.48 | 3.60 | 0.28 | 0.71 | -2.40 | 0.42 | 0.24 | -1.02 |

| 3 | -6.36 | 3.60 | -0.25 | 0.65 | -2.95 | 0.84 | 0.69 | -0.34 |

| 4 | -4.24 | 3.60 | 0.29 | -0.50 | -2.68 | 0.29 | 0.60 | 0.34 |

| 5 | -2.12 | 3.60 | 0.69 | -1.53 | -2.00 | 1.00 | 0.26 | 0.70 |

| 6 | -0.00 | 3.60 | 0.67 | -2.25 | -0.53 | 0.76 | -0.12 | 1.26 |

| 7 | 2.12 | 3.60 | 0.66 | -1.76 | 0.83 | 0.74 | -0.18 | 0.80 |

| 8 | 4.24 | 3.60 | 0.69 | -0.44 | 1.38 | 1.05 | -0.07 | 0.50 |

| 9 | 6.36 | 3.60 | -0.24 | 0.76 | 2.25 | 0.79 | -0.47 | -0.05 |

| 10 | 8.48 | 3.60 | 0.02 | 0.66 | 1.73 | -0.09 | -0.43 | -0.83 |

| 11 | 10.60 | 3.60 | 0.18 | 0.15 | 0.86 | -0.48 | -0.35 | -0.84 |

| 12 | 12.72 | 3.60 | -1.04 | 0.49 | 0.55 | -0.57 | -0.36 | -0.21 |

| 13 | -12.72 | 1.80 | -0.23 | 1.00 | -1.17 | 1.32 | -0.10 | -0.63 |

| 14 | -10.60 | 1.80 | -0.02 | 1.29 | -1.06 | 1.07 | -0.03 | -1.28 |

| 15 | -8.48 | 1.80 | 0.31 | 1.71 | -1.60 | 0.37 | -0.16 | -0.90 |

| 16 | -6.36 | 1.80 | -0.06 | 1.98 | -2.09 | 0.71 | -0.18 | -0.38 |

| 17 | -4.24 | 1.80 | 0.42 | 0.50 | -1.89 | 0.73 | -0.07 | 0.37 |

| 18 | -2.12 | 1.80 | 0.23 | -0.45 | -0.84 | 0.87 | -0.36 | 1.03 |

| 19 | -0.00 | 1.80 | 0.57 | -1.06 | -0.31 | 0.95 | -0.03 | 1.52 |

| 20 | 2.12 | 1.80 | 0.62 | -0.44 | -0.03 | 0.86 | -0.59 | 1.24 |

| 21 | 4.24 | 1.80 | 0.40 | 0.68 | 0.98 | 1.02 | -0.68 | 0.47 |

| 22 | 6.36 | 1.80 | -0.23 | 2.00 | 1.19 | 0.65 | -0.53 | -0.14 |

| 23 | 8.48 | 1.80 | -0.01 | 1.87 | 0.99 | 0.45 | -0.87 | -0.86 |

| 24 | 10.60 | 1.80 | -0.09 | 1.23 | -0.48 | -0.68 | -0.86 | -1.22 |

| 25 | 12.72 | 1.80 | -0.21 | 0.78 | 0.19 | -0.32 | -0.56 | -0.62 |

| 26 | -12.72 | -0.00 | -0.51 | 1.20 | 0.33 | 1.71 | 0.17 | -0.96 |

| 27 | -10.60 | -0.00 | -0.29 | 1.30 | -0.58 | 1.01 | -0.24 | -1.56 |

| 28 | -8.48 | -0.00 | 0.29 | 1.60 | -0.62 | 0.45 | -0.61 | -1.17 |

| 29 | -6.36 | -0.00 | -0.26 | 1.95 | -0.46 | 0.59 | -0.24 | -0.32 |

| 30 | -4.24 | -0.00 | -0.71 | 0.64 | -0.39 | 0.72 | -0.27 | 0.32 |

| 31 | -2.12 | -0.00 | -0.56 | -0.34 | -0.43 | 0.82 | -0.30 | 1.16 |

| 32 | -0.00 | -0.00 | -0.22 | -0.78 | -0.36 | 1.18 | -0.40 | 1.34 |

| 33 | 2.12 | -0.00 | -0.36 | -0.75 | -0.17 | 1.05 | -0.17 | 1.24 |

| 34 | 4.24 | -0.00 | -0.37 | 0.75 | -0.19 | 0.89 | -0.08 | 0.62 |

| 35 | 6.36 | -0.00 | -0.18 | 1.67 | -0.30 | 0.51 | -0.25 | 0.07 |

| 36 | 8.48 | -0.00 | -0.42 | 1.50 | -0.45 | 0.60 | -0.00 | -0.94 |

| 37 | 10.60 | -0.00 | -0.53 | 0.87 | -0.67 | -0.48 | -0.00 | -1.37 |

| 38 | 12.72 | -0.00 | -0.19 | 0.35 | -0.45 | -0.80 | -0.46 | -1.05 |

| 39 | -12.72 | -1.80 | -0.57 | 0.43 | 0.56 | 1.13 | 0.52 | -0.97 |

| 40 | -10.60 | -1.80 | -0.82 | 0.68 | 0.22 | 1.77 | 0.12 | -1.40 |

| 41 | -8.48 | -1.80 | -0.14 | 1.00 | 0.77 | 0.17 | 0.20 | -1.25 |

| 42 | -6.36 | -1.80 | 0.27 | 1.25 | 1.04 | 0.47 | -0.14 | -0.39 |

| 43 | -4.24 | -1.80 | -0.86 | -0.11 | 0.89 | 0.78 | 0.06 | 0.34 |

| 44 | -2.12 | -1.80 | -1.06 | -0.92 | 0.31 | 0.85 | 0.30 | 1.01 |

| 45 | -0.00 | -1.80 | -0.90 | -1.26 | -0.61 | 1.03 | -0.18 | 1.58 |

| 46 | 2.12 | -1.80 | -0.93 | -1.28 | -0.59 | 0.68 | 0.50 | 1.13 |

| 47 | 4.24 | -1.80 | -1.34 | -0.42 | -1.74 | 1.03 | 0.14 | 0.47 |

| 48 | 6.36 | -1.80 | -0.33 | 0.71 | -2.05 | 0.70 | 0.34 | -0.01 |

| 49 | 8.48 | -1.80 | -0.26 | 0.91 | -1.36 | 0.89 | 0.34 | -0.66 |

| 50 | 10.60 | -1.80 | -0.25 | 0.66 | -1.09 | -0.08 | 0.35 | -1.41 |

| 51 | 12.72 | -1.80 | -0.15 | 0.20 | -1.56 | -0.81 | 0.15 | -0.71 |

| 52 | -12.72 | -3.60 | 0.03 | 0.38 | 0.83 | 1.62 | 0.43 | -0.60 |

| 53 | -10.60 | -3.60 | -0.88 | 0.06 | 1.27 | 1.38 | 0.39 | -1.21 |

| 54 | -8.48 | -3.60 | -0.55 | 0.30 | 1.64 | 0.49 | 0.17 | -1.13 |

| 55 | -6.36 | -3.60 | 0.80 | -0.07 | 1.96 | 0.25 | 0.14 | -0.27 |

| 56 | -4.24 | -3.60 | 0.05 | -1.30 | 1.93 | 0.64 | -0.21 | 0.35 |

| 57 | -2.12 | -3.60 | -0.53 | -1.91 | 1.32 | 0.54 | -0.11 | 0.37 |

| 58 | -0.00 | -3.60 | -0.53 | -2.50 | -0.14 | 0.90 | 0.33 | 0.83 |

| 59 | 2.12 | -3.60 | -0.82 | -2.12 | -1.92 | 0.59 | 0.21 | 0.60 |

| 60 | 4.24 | -3.60 | -0.51 | -1.22 | -2.53 | 1.08 | -0.02 | 0.28 |

| 61 | 6.36 | -3.60 | 0.47 | -0.30 | -2.96 | 0.56 | 0.25 | -0.29 |

| 62 | 8.48 | -3.60 | 0.25 | -0.09 | -2.25 | 0.54 | 0.24 | -0.78 |

| 63 | 10.60 | -3.60 | -0.31 | 0.06 | -1.17 | -0.41 | 0.76 | -1.15 |

| 64 | 12.72 | -3.60 | 0.81 | -0.46 | -1.37 | -0.27 | 0.70 | -0.13 |

+----+--------+-------+-------+-------+-------+-------+-------+-------+

 

 

+----+--------+-------+-------+-------+------+-------+-------+-------+

| | X | Y | Z26 | Z27 | Z28 | Z29 | Z30 | Z31 |

| | [mm] | [mm] | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] |

+====+========+=======+=======+=======+======+=======+=======+=======+

| 0 | -12.72 | 3.60 | -0.28 | -0.89 | 1.44 | -0.19 | 1.38 | -1.18 |

| 1 | -10.60 | 3.60 | -0.45 | -0.17 | 1.33 | 0.62 | 0.53 | -0.26 |

| 2 | -8.48 | 3.60 | 0.20 | 0.79 | 1.78 | 0.71 | 0.02 | 0.11 |

| 3 | -6.36 | 3.60 | -0.12 | -0.19 | 2.16 | 0.79 | 0.31 | 0.12 |

| 4 | -4.24 | 3.60 | 0.05 | -0.65 | 1.94 | 0.31 | 0.33 | -0.25 |

| 5 | -2.12 | 3.60 | 0.18 | -0.54 | 2.14 | -0.03 | 0.54 | -0.28 |

| 6 | -0.00 | 3.60 | -0.00 | -0.41 | 2.04 | 0.04 | 0.40 | -0.37 |

| 7 | 2.12 | 3.60 | 0.09 | -0.35 | 1.97 | 0.52 | 0.03 | -0.25 |

| 8 | 4.24 | 3.60 | 0.32 | -0.29 | 2.13 | 0.21 | 0.03 | 0.05 |

| 9 | 6.36 | 3.60 | 0.27 | -0.29 | 2.13 | -0.16 | 0.15 | 0.19 |

| 10 | 8.48 | 3.60 | 0.30 | 0.57 | 2.11 | -0.74 | 0.55 | -0.15 |

| 11 | 10.60 | 3.60 | 0.35 | 0.21 | 1.15 | -0.33 | -0.31 | -0.03 |

| 12 | 12.72 | 3.60 | -0.03 | -0.34 | 0.93 | 0.25 | -0.91 | -1.12 |

| 13 | -12.72 | 1.80 | 0.27 | -0.98 | 0.94 | 0.34 | 1.29 | -0.62 |

| 14 | -10.60 | 1.80 | -0.52 | -0.31 | 0.64 | 0.36 | 0.88 | -0.18 |

| 15 | -8.48 | 1.80 | -0.13 | 0.14 | 0.64 | 0.70 | -0.10 | -0.19 |

| 16 | -6.36 | 1.80 | 0.57 | -0.11 | 1.53 | 0.25 | -0.21 | 0.20 |

| 17 | -4.24 | 1.80 | 0.58 | -0.67 | 1.41 | -0.08 | -0.25 | 0.09 |

| 18 | -2.12 | 1.80 | 0.47 | -0.80 | 1.72 | -0.04 | 0.16 | -0.17 |

| 19 | -0.00 | 1.80 | 0.08 | -0.59 | 1.48 | -0.07 | -0.13 | -0.05 |

| 20 | 2.12 | 1.80 | -0.17 | -0.61 | 1.76 | 0.13 | -0.19 | -0.13 |

| 21 | 4.24 | 1.80 | -0.45 | -0.47 | 1.51 | 0.12 | 0.25 | 0.47 |

| 22 | 6.36 | 1.80 | -0.49 | -0.28 | 1.45 | 0.14 | 0.13 | 0.64 |

| 23 | 8.48 | 1.80 | 0.22 | 0.26 | 0.72 | -0.26 | 1.01 | 0.51 |

| 24 | 10.60 | 1.80 | 0.36 | 0.32 | 0.70 | -0.37 | 0.01 | -0.10 |

| 25 | 12.72 | 1.80 | -0.25 | -0.26 | 0.74 | 0.46 | -0.76 | -0.41 |

| 26 | -12.72 | -0.00 | 0.84 | -0.69 | 1.55 | 0.18 | 1.25 | 0.15 |

| 27 | -10.60 | -0.00 | -0.43 | -0.67 | 0.70 | 0.01 | 0.63 | -0.36 |

| 28 | -8.48 | -0.00 | -0.31 | -0.38 | 0.56 | 0.26 | -0.32 | 0.02 |

| 29 | -6.36 | -0.00 | 0.29 | 0.05 | 1.37 | -0.13 | -0.12 | 0.38 |

| 30 | -4.24 | -0.00 | 0.74 | -0.03 | 1.37 | -0.19 | -0.26 | 0.14 |

| 31 | -2.12 | -0.00 | 0.70 | -0.60 | 1.69 | -0.02 | 0.32 | 0.27 |

| 32 | -0.00 | -0.00 | 0.02 | -0.21 | 1.71 | -0.09 | -0.16 | 0.17 |

| 33 | 2.12 | -0.00 | -0.25 | -0.17 | 1.71 | -0.02 | -0.41 | 0.01 |

| 34 | 4.24 | -0.00 | -0.47 | -0.30 | 1.75 | -0.32 | 0.35 | 0.22 |

| 35 | 6.36 | -0.00 | -0.83 | 0.22 | 1.51 | 0.15 | 0.13 | 0.20 |

| 36 | 8.48 | -0.00 | -0.09 | 0.41 | 0.28 | 0.51 | 0.29 | 0.34 |

| 37 | 10.60 | -0.00 | 0.41 | -0.39 | 0.78 | 0.24 | 0.11 | 0.34 |

| 38 | 12.72 | -0.00 | -0.07 | -0.11 | 1.59 | 0.46 | -0.62 | -0.26 |

| 39 | -12.72 | -1.80 | 0.53 | -0.06 | 1.52 | 0.29 | 1.03 | 0.59 |

| 40 | -10.60 | -1.80 | -0.58 | -0.93 | 1.14 | -0.33 | 0.26 | -0.37 |

| 41 | -8.48 | -1.80 | -0.67 | -0.55 | 1.03 | -0.67 | -0.41 | -0.60 |

| 42 | -6.36 | -1.80 | -0.16 | 0.56 | 1.76 | -0.21 | -0.35 | -0.52 |

| 43 | -4.24 | -1.80 | 0.66 | 0.40 | 1.66 | -0.00 | 0.08 | -0.64 |

| 44 | -2.12 | -1.80 | 0.67 | -0.04 | 2.06 | 0.20 | -0.29 | -0.20 |

| 45 | -0.00 | -1.80 | 0.11 | -0.02 | 2.00 | -0.09 | 0.06 | -0.44 |

| 46 | 2.12 | -1.80 | -0.06 | 0.25 | 2.29 | -0.17 | -0.12 | 0.13 |

| 47 | 4.24 | -1.80 | -0.33 | 0.32 | 2.00 | -0.11 | 0.15 | -0.42 |

| 48 | 6.36 | -1.80 | -0.47 | 0.64 | 1.78 | 0.35 | 0.32 | -0.33 |

| 49 | 8.48 | -1.80 | 0.17 | 0.14 | 1.08 | 0.84 | 0.46 | -0.08 |

| 50 | 10.60 | -1.80 | 0.49 | 0.15 | 1.08 | 0.42 | -0.84 | 0.01 |

| 51 | 12.72 | -1.80 | -0.07 | 0.28 | 1.10 | 0.09 | -0.59 | 0.42 |

| 52 | -12.72 | -3.60 | -0.35 | -0.46 | 1.35 | 0.76 | 0.60 | 1.00 |

| 53 | -10.60 | -3.60 | -0.60 | -0.76 | 1.43 | 0.08 | 0.60 | -0.34 |

| 54 | -8.48 | -3.60 | -0.34 | -0.33 | 1.92 | -1.27 | -0.43 | -0.81 |

| 55 | -6.36 | -3.60 | -0.30 | 0.85 | 1.96 | -0.90 | 0.14 | -0.88 |

| 56 | -4.24 | -3.60 | -0.03 | 0.17 | 2.03 | -0.13 | 0.10 | -0.66 |

| 57 | -2.12 | -3.60 | 0.51 | 0.16 | 2.33 | 0.30 | 0.20 | -0.55 |

| 58 | -0.00 | -3.60 | -0.10 | -0.03 | 2.48 | 0.04 | 0.08 | -0.08 |

| 59 | 2.12 | -3.60 | -0.01 | 0.39 | 2.30 | -0.04 | -0.36 | -0.29 |

| 60 | 4.24 | -3.60 | 0.35 | 0.15 | 2.48 | 0.36 | -0.06 | -0.16 |

| 61 | 6.36 | -3.60 | 0.38 | 0.19 | 2.14 | 0.89 | -0.13 | -0.26 |

| 62 | 8.48 | -3.60 | 0.03 | -0.47 | 1.72 | 0.65 | 0.04 | -0.28 |

| 63 | 10.60 | -3.60 | 0.35 | 0.41 | 1.46 | 0.74 | -0.85 | -0.03 |

| 64 | 12.72 | -3.60 | 0.64 | 0.48 | 1.27 | -0.61 | -1.05 | 0.59 |

+----+--------+-------+-------+-------+------+-------+-------+-------+

 

 

+----+--------+-------+-------+-------+-------+-------+-------+------+

| | X | Y | Z32 | Z33 | Z34 | Z35 | Z36 | Z37 |

| | [mm] | [mm] | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] |

+====+========+=======+=======+=======+=======+=======+=======+======+

| 0 | -12.72 | 3.60 | 0.64 | -0.02 | 1.12 | -0.14 | 0.22 | 1.58 |

| 1 | -10.60 | 3.60 | -0.55 | 0.21 | 1.51 | -0.17 | -0.16 | 1.44 |

| 2 | -8.48 | 3.60 | -0.24 | 0.63 | 0.92 | 0.35 | -0.96 | 1.40 |

| 3 | -6.36 | 3.60 | -0.46 | 0.45 | 0.27 | -0.11 | -0.61 | 1.55 |

| 4 | -4.24 | 3.60 | -0.33 | 0.39 | 0.06 | 0.22 | -0.23 | 1.71 |

| 5 | -2.12 | 3.60 | 0.05 | 0.41 | 0.06 | 0.33 | 0.10 | 1.58 |

| 6 | -0.00 | 3.60 | 0.21 | -0.03 | 0.37 | 0.28 | 0.31 | 1.90 |

| 7 | 2.12 | 3.60 | 0.24 | -0.59 | 0.89 | 0.41 | 0.10 | 1.76 |

| 8 | 4.24 | 3.60 | 0.15 | -0.17 | 0.54 | 0.40 | -0.04 | 1.30 |

| 9 | 6.36 | 3.60 | -0.12 | -0.51 | 0.22 | 0.47 | -0.24 | 1.61 |

| 10 | 8.48 | 3.60 | -0.30 | -0.59 | -0.27 | 0.19 | -0.22 | 1.91 |

| 11 | 10.60 | 3.60 | -0.09 | -0.68 | -0.66 | -0.18 | -0.03 | 1.67 |

| 12 | 12.72 | 3.60 | -0.08 | 0.11 | -0.48 | -0.03 | 0.72 | 1.91 |

| 13 | -12.72 | 1.80 | -0.16 | -0.14 | 1.00 | 0.14 | -0.11 | 1.48 |

| 14 | -10.60 | 1.80 | -0.63 | -0.05 | 1.69 | 0.15 | -0.45 | 1.74 |

| 15 | -8.48 | 1.80 | -0.25 | 0.17 | 1.33 | 0.09 | -0.76 | 1.88 |

| 16 | -6.36 | 1.80 | -0.07 | 0.06 | 0.19 | 0.25 | -0.26 | 1.48 |

| 17 | -4.24 | 1.80 | -0.13 | 0.38 | 0.39 | -0.01 | 0.01 | 1.68 |

| 18 | -2.12 | 1.80 | -0.04 | -0.15 | -0.27 | 0.37 | 0.43 | 2.23 |

| 19 | -0.00 | 1.80 | -0.12 | 0.05 | 0.47 | 0.35 | 0.62 | 2.23 |

| 20 | 2.12 | 1.80 | 0.41 | -0.01 | 0.95 | 0.50 | 0.44 | 1.99 |

| 21 | 4.24 | 1.80 | 0.03 | -0.20 | 0.48 | -0.03 | 0.28 | 1.76 |

| 22 | 6.36 | 1.80 | 0.34 | -0.32 | 0.68 | -0.21 | 0.05 | 1.84 |

| 23 | 8.48 | 1.80 | 0.02 | -0.52 | -0.52 | -0.01 | -0.22 | 1.83 |

| 24 | 10.60 | 1.80 | 0.03 | -0.26 | -0.34 | 0.17 | -0.18 | 2.06 |

| 25 | 12.72 | 1.80 | 0.10 | -0.13 | -0.53 | 0.31 | 0.46 | 1.91 |

| 26 | -12.72 | -0.00 | 0.49 | -0.61 | 1.64 | -0.07 | -0.15 | 1.36 |

| 27 | -10.60 | -0.00 | 0.05 | 0.18 | 1.17 | -0.11 | -0.74 | 1.79 |

| 28 | -8.48 | -0.00 | -0.02 | -0.09 | 1.29 | -0.10 | -0.89 | 1.82 |

| 29 | -6.36 | -0.00 | -0.18 | -0.14 | 0.27 | -0.17 | -0.68 | 1.72 |

| 30 | -4.24 | -0.00 | 0.02 | -0.28 | 0.13 | -0.27 | -0.03 | 1.73 |

| 31 | -2.12 | -0.00 | 0.51 | -0.45 | 0.00 | -0.28 | 0.27 | 2.12 |

| 32 | -0.00 | -0.00 | 0.92 | 0.13 | 0.27 | -0.48 | 0.56 | 2.83 |

| 33 | 2.12 | -0.00 | 0.63 | -0.05 | 1.17 | -0.15 | 0.17 | 1.90 |

| 34 | 4.24 | -0.00 | 0.33 | 0.09 | 0.57 | -0.47 | 0.43 | 1.91 |

| 35 | 6.36 | -0.00 | 0.45 | 0.13 | 0.42 | -0.44 | -0.60 | 1.54 |

| 36 | 8.48 | -0.00 | 0.07 | -0.26 | -0.35 | -0.38 | -0.69 | 1.72 |

| 37 | 10.60 | -0.00 | 0.28 | -0.12 | -0.61 | -0.47 | -0.63 | 2.03 |

| 38 | 12.72 | -0.00 | 0.69 | -0.09 | -0.97 | -0.26 | 0.28 | 1.91 |

| 39 | -12.72 | -1.80 | 0.18 | -0.56 | 1.53 | 0.02 | -0.15 | 1.73 |

| 40 | -10.60 | -1.80 | 0.23 | -0.27 | 1.14 | -0.21 | -0.67 | 1.91 |

| 41 | -8.48 | -1.80 | -0.07 | -0.60 | 1.11 | -0.08 | -1.09 | 1.55 |

| 42 | -6.36 | -1.80 | 0.16 | -0.61 | 0.18 | 0.03 | -0.56 | 1.56 |

| 43 | -4.24 | -1.80 | 0.09 | -0.70 | 0.37 | -0.16 | -0.17 | 1.55 |

| 44 | -2.12 | -1.80 | 0.05 | -0.34 | 0.03 | -0.64 | 0.14 | 1.79 |

| 45 | -0.00 | -1.80 | 0.14 | -0.34 | 0.36 | -0.40 | 0.47 | 2.19 |

| 46 | 2.12 | -1.80 | 0.09 | -0.06 | 1.09 | -0.36 | 0.53 | 1.98 |

| 47 | 4.24 | -1.80 | -0.11 | 0.46 | 0.47 | -0.07 | 0.11 | 1.75 |

| 48 | 6.36 | -1.80 | 0.31 | 0.36 | 0.68 | -0.27 | -0.29 | 1.46 |

| 49 | 8.48 | -1.80 | -0.05 | 0.46 | -0.32 | 0.05 | -0.47 | 1.65 |

| 50 | 10.60 | -1.80 | 0.06 | 0.26 | -0.68 | 0.07 | -0.33 | 2.02 |

| 51 | 12.72 | -1.80 | 0.91 | 0.03 | -0.90 | 0.25 | 0.51 | 1.92 |

| 52 | -12.72 | -3.60 | -0.43 | -0.14 | 1.35 | 0.27 | 0.23 | 1.65 |

| 53 | -10.60 | -3.60 | -0.23 | -1.07 | 1.65 | 0.75 | -0.53 | 1.57 |

| 54 | -8.48 | -3.60 | -0.04 | -1.04 | 0.85 | 0.48 | -0.69 | 1.91 |

| 55 | -6.36 | -3.60 | -0.19 | -0.91 | 0.50 | 0.14 | -0.70 | 1.57 |

| 56 | -4.24 | -3.60 | 0.10 | -0.53 | 0.21 | 0.20 | -0.14 | 1.47 |

| 57 | -2.12 | -3.60 | 0.32 | -0.91 | 0.28 | -0.06 | 0.12 | 1.76 |

| 58 | -0.00 | -3.60 | 0.67 | -0.28 | 0.43 | -0.26 | 0.20 | 1.88 |

| 59 | 2.12 | -3.60 | 0.59 | 0.28 | 0.97 | -0.30 | 0.36 | 1.64 |

| 60 | 4.24 | -3.60 | 0.15 | 0.21 | 0.47 | 0.20 | 0.26 | 1.61 |

| 61 | 6.36 | -3.60 | 0.14 | 0.70 | 0.51 | 0.62 | -0.28 | 1.76 |

| 62 | 8.48 | -3.60 | 0.04 | 0.86 | -0.34 | 0.39 | -0.45 | 1.52 |

| 63 | 10.60 | -3.60 | -0.53 | 0.61 | -0.87 | 0.43 | 0.23 | 1.44 |

| 64 | 12.72 | -3.60 | 0.72 | 0.46 | -0.63 | -0.02 | 0.69 | 1.71 |

+----+--------+-------+-------+-------+-------+-------+-------+------+

 

 

Operator:ASML Machine:6xxx Release:4.1.0 Date:04/01/2016 Time:13:30

 

Report Filename : LUPI.27

Report Path : TM/Illumination/Performance/LUPI.log/

Machine Type : 1250D

 

Testname : ILIAS Pupil Measurement

Start Time : Mon, 04 Jan 2016 13:25:59 273037us +0800

Stop Time : Mon, 04 Jan 2016 13:30:26 094390us +0800

Execution Time : 00:04:26

Test Run Result : OK

Test Status : Test is Finished

Results Validation : In Limits

Measurement Quality : OK

Comment :

 

 

 

+----------------------+------------+-----------+----------+----------------+

| Step | Start Time | Stop Time | Status | Execution Time |

+======================+============+===========+==========+================+

| Initialize Drivers | 13:25:59 | 13:26:09 | Finished | 00:00:09 |

| Prepare Machine | 13:26:09 | 13:27:48 | Finished | 00:01:38 |

| Perform Measurements | 13:27:48 | 13:29:51 | Finished | 00:02:03 |

| Perform Analysis | 13:29:51 | 13:30:25 | Finished | 00:00:33 |

+----------------------+------------+-----------+----------+----------------+

 

Scenario Inputs

 

Selected Scenario : ATP-1

Verification Set : Final Verification

Overrule Inputs : No

Manual Scenario Selected : No

 

 

Measurement input values

 

Measurement mode : Static

Image size : 256 x 256

Pupil Shape

Illumination mode : Annular

NA : 0.850

DOE ID : 15

Sigma

inner : 0.690

outer : 0.930

Polarization mode : Unpolarized

Start beam

Beam Mode : Automatic

Beam Positioning

Position x : -3.000 [mm]

Position y : 0.000 [mm]

Pointing x : 0.450 [mRad]

Pointing y : 0.000 [mRad]

Beam Window

Beam position control window : 300 [um]

Beam pointing control window : 50 [uRad]

Measurement sequence : 5x1 Auto reticle

Perform measurement : Yes

Perform analysis : Yes

Raw data file : service_data/LU/LUPI/LUPI_RAW_m6xxx.355

Save avg pupil as picture file : No

sigma correction : Yes

Pupil Qualification Method : Automatic Pupil Qualification

Pupil Numbers Method : Center of Gravity Method

 

 

verification_type : Final Verification

Average Sigma Outer

minimum : 0.000

maximum : 1.000

Average Sigma Inner

minimum : 0.000

maximum : 1.000

Sigma Outer Range

minimum : 0.000

maximum : 1.000

Sigma Inner Range

minimum : 0.000

maximum : 1.000

Deviation Sigma Outer (set - get)

minimum : -1.000

maximum : 1.000

Deviation Sigma Inner (set - get)

minimum : -1.000

maximum : 1.000

Average Sigma variation

minimum : 0.000

maximum : 0.012

Show Ellipticity : No

Average Range Sigma Inner Range

minimum : 0.000

maximum : 1.000

Average Range Sigma Outer Range

minimum : 0.000

maximum : 1.000

Average Ellipticity

minimum : -3.000e+00 [%]

maximum : 3.000 [%]

Minimum Ellipticity

minimum : 0.000e+00 [%]

maximum : 100.000 [%]

Maximum Ellipticity

minimum : 0.000e+00 [%]

maximum : 100.000 [%]

Ellipticity Range

minimum : 0.000e+00 [%]

maximum : 100.000 [%]

Average Ellipticity (45 deg)

minimum : -1.000e+02 [%]

maximum : 100.000 [%]

Minimum Ellipticity (45 deg)

minimum : 0.000e+00 [%]

maximum : 100.000 [%]

Maximum Ellipticity (45 deg)

minimum : 0.000e+00 [%]

maximum : 100.000 [%]

Ellipticity Range (45 deg)

minimum : 0.000e+00 [%]

maximum : 100.000 [%]

Show COG : No

COG X field variation

minimum : 0.0000

maximum : 1.0000

COG Y field variation

minimum : 0.0000

maximum : 1.0000

Balance type : None

Average Balance

minimum : 0.000e+00 [%]

maximum : 100.000 [%]

Balance Range

minimum : 0.000e+00 [%]

maximum : 100.000 [%]

Balance Minimum

minimum : 0.000e+00 [%]

maximum : 100.000 [%]

Balance Maximum

minimum : 0.000e+00 [%]

maximum : 100.000 [%]

 

Avg Pole Width

+---+---------+---------+

| | minimum | maximum |

| | [deg] | [deg] |

+===+=========+=========+

| 0 | 0.0 | 180.0 |

| 1 | 0.0 | 180.0 |

| 2 | 0.0 | 180.0 |

| 3 | 0.0 | 180.0 |

+---+---------+---------+

 

Avg Pole Width variation

+---+---------+---------+

| | minimum | maximum |

| | [deg] | [deg] |

+===+=========+=========+

| 0 | 0.0 | 180.0 |

| 1 | 0.0 | 180.0 |

| 2 | 0.0 | 180.0 |

| 3 | 0.0 | 180.0 |

+---+---------+---------+

 

 

Measurement Result values

 

Picture file :

Pupil data to analyse

Test_identifier : LUPI

Time of measurement : Mon, 04 Jan 2016 13:29:49 098907us +0800

mach_info

Machine number : 6xxx

Machine type : 1250D

Machine architecture : XT Machine Architecture

Machine specification : pep-D Specification

Lightsource type : Cymer Laser: XLA 165

Illuminator type : 120

Software release : 4.1.0.c

Lens number : 0122xxxx

 

DOE data

+----+--------+-------------------+----------------+------------------+

| | DOE ID | Illumination mode | DOE Table name | DOE File version |

+====+========+===================+================+==================+

| 0 | 2 | Quasar | cQuad20 | 2.0.1 |

| 1 | 15 | Conventional | conventional | 2.0.1 |

| 2 | 14 | Quasar | cQuad 60 | 2.0.1 |

| 3 | 18 | Quasar | Dipole40 Y | 2.0.1 |

| 4 | 15 | Annular | annular | 2.0.1 |

| 5 | 0 | Conventional | | |

| 6 | 0 | Conventional | | |

| 7 | 0 | Conventional | | |

| 8 | 0 | Conventional | | |

| 9 | 0 | Conventional | | |

| 10 | 0 | Conventional | | |

| 11 | 0 | Conventional | | |

| 12 | 0 | Conventional | | |

| 13 | 0 | Conventional | | |

| 14 | 0 | Conventional | | |

| 15 | 0 | Conventional | | |

| 16 | 0 | Conventional | | |

+----+--------+-------------------+----------------+------------------+

 

mach_settings

Pupil shape

Illumination mode : Annular

NA : 0.850

DOE ID : 15

Sigma

inner : 0.690

outer : 0.930

DOE Table name : annular

DOE File version : 2.0.1

Actual beam position and pointing

Beam Mode : Automatic

Beam Positioning

Position x : -2.741 [mm]

Position y : -0.171 [mm]

Pointing x : 0.472 [mRad]

Pointing y : 0.000 [mRad]

Beam Window

Beam position control window : 300 [um]

Beam pointing control window : 50 [uRad]

VAT Compensation : No

Uniformity Improvement Package mode : UIP mode on

Actual Pupicom setting

Mode : Automatic

Angle : 0.8 [deg]

Actual Unicom setting

Mode : Automatic

Position : 47.145 [mm]

Reticle information

Reticle ID : 45563154P009

Reticle chrome y-offset (WS coordinates) : 0.901 [mm]

Chrome offset direction : Positive direction

Number of pinholes : 5

ILIAS sensor type on chuck1 : None

ILIAS sensor type on chuck 2 : Multiple scan grid

Sensor used for measurement : ILIAS on chuck 2

mode : Static

Values all pinholes

 

Average Pupil Values

+--------------------------+---------+---------+--------+---------+

| | Minimum | Maximum | Range | Average |

+==========================+=========+=========+========+=========+

| Sigma Inner [10%] | 0.6689 | 0.6756 | 0.0067 | 0.6727 |

| Sigma Outer [90%] | 0.9375 | 0.9403 | 0.0028 | 0.9393 |

| Ellipticity [%] | -1.598 | 1.385 | 2.983 | -0.252 |

| Ellipticity (45 Deg) [%] | -0.801 | 0.464 | 1.266 | -0.144 |

| Quadrant balance [%] | 0.250 | 2.928 | 2.679 | 1.417 |

| cQuadrant balance [%] | 0.949 | 2.961 | 2.012 | 1.733 |

| Balance X [%] | 0.219 | 2.528 | 2.309 | 1.201 |

| Balance Y [%] | 0.031 | 0.289 | 0.258 | 0.120 |

+--------------------------+---------+---------+--------+---------+

 

Average Pole Information

Pole 1

Pole 2

Pole 3

Pole 4

Pole 5

Pole 6

Pole 7

Pole 8

 

Pole group info

Group 1

Group 2

Group 3

Inter Group

Max. value

 

Values per pinhole

+----+-------------------------------------------+-------------------+

| | Pinhole position (Waferstage coordinates) | Pupil values |

| +-------------+-------------+---------------+-------------------+

| | Position X | Position Y | Slit y-offset | Sigma inner [10%] |

| | [mm] | [mm] | [mm] | |

+====+=============+=============+===============+===================+

| 0 | -12.72 | -11.00 | 0.00 | 0.6691 |

| 1 | -6.36 | -11.00 | 0.00 | 0.6756 |

| 2 | 0.00 | -11.00 | 0.00 | 0.6756 |

| 3 | 6.36 | -11.00 | 0.00 | 0.6746 |

| 4 | 12.72 | -11.00 | 0.00 | 0.6689 |

| 5 | 0.00 | 0.00 | 0.00 | 0.0000 |

| 6 | 0.00 | 0.00 | 0.00 | 0.0000 |

| 7 | 0.00 | 0.00 | 0.00 | 0.0000 |

| 8 | 0.00 | 0.00 | 0.00 | 0.0000 |

| 9 | 0.00 | 0.00 | 0.00 | 0.0000 |

| 10 | 0.00 | 0.00 | 0.00 | 0.0000 |

| 11 | 0.00 | 0.00 | 0.00 | 0.0000 |

| 12 | 0.00 | 0.00 | 0.00 | 0.0000 |

| 13 | 0.00 | 0.00 | 0.00 | 0.0000 |

| 14 | 0.00 | 0.00 | 0.00 | 0.0000 |

| 15 | 0.00 | 0.00 | 0.00 | 0.0000 |

| 16 | 0.00 | 0.00 | 0.00 | 0.0000 |

| 17 | 0.00 | 0.00 | 0.00 | 0.0000 |

| 18 | 0.00 | 0.00 | 0.00 | 0.0000 |

| 19 | 0.00 | 0.00 | 0.00 | 0.0000 |

+----+-------------+-------------+---------------+-------------------+

+----+---------------------------------------------------------------------------+

| | Pupil values |

| +-------------------+-------------+----------------------+------------------+

| | Sigma outer [90%] | Ellipticity | Ellipticity (45 Deg) | Quadrant balance |

| | | [%] | [%] | [%] |

+====+===================+=============+======================+==================+

| 0 | 0.9393 | 1.4 | -0.8 | 2.9 |

| 1 | 0.9399 | -0.7 | -0.3 | 0.6 |

| 2 | 0.9403 | -1.6 | -0.1 | 0.7 |

| 3 | 0.9394 | -1.5 | -0.0 | 0.2 |

| 4 | 0.9375 | 1.1 | 0.5 | 2.6 |

| 5 | 0.0000 | 0.0 | 0.0 | 0.0 |

| 6 | 0.0000 | 0.0 | 0.0 | 0.0 |

| 7 | 0.0000 | 0.0 | 0.0 | 0.0 |

| 8 | 0.0000 | 0.0 | 0.0 | 0.0 |

| 9 | 0.0000 | 0.0 | 0.0 | 0.0 |

| 10 | 0.0000 | 0.0 | 0.0 | 0.0 |

| 11 | 0.0000 | 0.0 | 0.0 | 0.0 |

| 12 | 0.0000 | 0.0 | 0.0 | 0.0 |

| 13 | 0.0000 | 0.0 | 0.0 | 0.0 |

| 14 | 0.0000 | 0.0 | 0.0 | 0.0 |

| 15 | 0.0000 | 0.0 | 0.0 | 0.0 |

| 16 | 0.0000 | 0.0 | 0.0 | 0.0 |

| 17 | 0.0000 | 0.0 | 0.0 | 0.0 |

| 18 | 0.0000 | 0.0 | 0.0 | 0.0 |

| 19 | 0.0000 | 0.0 | 0.0 | 0.0 |

+----+-------------------+-------------+----------------------+------------------+

+----+----------------------------------------------------------+------------------+

| | Pupil values | COG |

| +-------------------+-----------+-----------+--------------+---------+--------+

| | cQuadrant balance | Balance X | Balance Y | Nr. of poles | cog X | cog Y |

| | [%] | [%] | [%] | | [-] | [-] |

+====+===================+===========+===========+==============+=========+========+

| 0 | 3.0 | 2.5 | 0.1 | 0 | -0.0295 | 0.0062 |

| 1 | 1.0 | 0.5 | 0.1 | 0 | -0.0017 | 0.0023 |

| 2 | 1.0 | 0.4 | 0.3 | 0 | 0.0014 | 0.0037 |

| 3 | 0.9 | 0.2 | 0.0 | 0 | 0.0036 | 0.0031 |

| 4 | 2.7 | 2.3 | 0.1 | 0 | 0.0230 | 0.0067 |

| 5 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 |

| 6 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 |

| 7 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 |

| 8 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 |

| 9 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 |

| 10 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 |

| 11 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 |

| 12 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 |

| 13 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 |

| 14 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 |

| 15 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 |

| 16 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 |

| 17 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 |

| 18 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 |

| 19 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 |

+----+-------------------+-----------+-----------+--------------+---------+--------+

+----+-----------+----------+

| | | |

| | | |

| | Nr pulses | Dose |

| | | [mJ] |

+====+===========+==========+

| 0 | 68 | 29584.74 |

| 1 | 69 | 29836.71 |

| 2 | 66 | 28325.13 |

| 3 | 65 | 28088.92 |

| 4 | 65 | 28332.11 |

| 5 | 0 | 0.00 |

| 6 | 0 | 0.00 |

| 7 | 0 | 0.00 |

| 8 | 0 | 0.00 |

| 9 | 0 | 0.00 |

| 10 | 0 | 0.00 |

| 11 | 0 | 0.00 |

| 12 | 0 | 0.00 |

| 13 | 0 | 0.00 |

| 14 | 0 | 0.00 |

| 15 | 0 | 0.00 |

| 16 | 0 | 0.00 |

| 17 | 0 | 0.00 |

| 18 | 0 | 0.00 |

| 19 | 0 | 0.00 |

+----+-----------+----------+

 

Pole pos. and orientation per pinhole

 

pole_orient_matrix

+----+--------+--------+--------+--------+--------+--------+--------+--------+

| | Pole 1 | Pole 2 | Pole 3 | Pole 4 | Pole 5 | Pole 6 | Pole 7 | Pole 8 |

+====+========+========+========+========+========+========+========+========+

| 0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 1 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 2 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 3 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 4 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 5 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 6 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 7 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 8 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 9 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 10 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 11 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 12 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 13 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 14 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 15 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 16 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 17 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 18 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 19 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 20 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 21 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 22 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 23 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 24 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 25 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 26 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

+----+--------+--------+--------+--------+--------+--------+--------+--------+

 

pole_width_matrix

+----+--------+--------+--------+--------+--------+--------+--------+--------+

| | Pole 1 | Pole 2 | Pole 3 | Pole 4 | Pole 5 | Pole 6 | Pole 7 | Pole 8 |

+====+========+========+========+========+========+========+========+========+

| 0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 1 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 2 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 3 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 4 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 5 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 6 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 7 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 8 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 9 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 10 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 11 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 12 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 13 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 14 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 15 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 16 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 17 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 18 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 19 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 20 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 21 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 22 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 23 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 24 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 25 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

| 26 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 |

+----+--------+--------+--------+--------+--------+--------+--------+--------+

 

Verification Results

+-------------------------+---------+---------+----------+-----------+

| | Minimum | Maximum | Measured | In Limits |

+=========================+=========+=========+==========+===========+

| Sigma Inner | 0.000 | 1.000 | 0.673 | Ok |

| Sigma Outer | 0.000 | 1.000 | 0.939 | Ok |

| Sigma Variation | 0.000 | 0.012 | 0.007 | Ok |

| Range Sigma Inner | 0.000 | 1.000 | 0.007 | Ok |

| Range Sigma Outer | 0.000 | 1.000 | 0.003 | Ok |

| Average Ellipticity [%] | -3.000 | 3.000 | -0.252 | Ok |

+-------------------------+---------+---------+----------+-----------+

 

sigma correction

pupil_shape

Illumination mode : Conventional

NA : 0.000

DOE ID : 0

Sigma

inner : 0.000

outer : 0.000

offset

inner : 0.000

outer : 0.000

 

 

Operator:ASML Machine:6xxx Release:4.1.0 Date:13/01/2016 Time:17:46

 

Report Filename : LUSL.99

Report Path : TM/Projection/StrayLightMonitoring/LUSL.log/

Machine Type : 1250D

 

File name of logfile(s) : service_data/LU/LUSL/LUSL.0352.log

 

Testname : Uniformity Stray Light Measurement

Start Time : Wed, 13 Jan 2016 17:45:44 039008us +0800

Stop Time : Wed, 13 Jan 2016 17:46:49 102252us +0800

Execution Time : 00:01:05

Test Run Result : Finished

Test Status : Test is Finished

Results Validation : In Limits

Measurement Quality : OK

Comment : Scheduled execution (m-action)

 

 

 

+----------------------+------------+-----------+----------+----------------+

| Step | Start Time | Stop Time | Status | Execution Time |

+======================+============+===========+==========+================+

| Initialize drivers | 17:45:44 | 17:45:46 | Finished | 00:00:02 |

| Prepare machine | 17:45:46 | 17:46:12 | Finished | 00:00:25 |

| Perform measurements | 17:46:12 | 17:46:48 | Finished | 00:00:36 |

| Calculate results | 17:46:48 | 17:46:49 | Finished | 00:00:00 |

+----------------------+------------+-----------+----------+----------------+

 

Scenario Inputs

 

Selected Scenario : Monitoring

Verification Set : Single Verification

Overrule Inputs : No

Manual Scenario Selected : No

 

 

Input parameters

 

pupil_shape

Illumination mode : Annular

NA : 0.850

DOE ID : 15

Sigma

inner : 0.690

outer : 0.930

Image Field Size X : 26.00 [mm]

Image Field Size Y : 26.00 [mm]

Steps in X : 11

Steps in Y : 1

No. of Pulses : 200

Pulse Frequency : 4000

Attenuator Transmission : 100 [%]

spot_sensor : Non-Leading

Reticle used : No

REMA settings

Rema use : Spot

disable_BBS : No

Unicom

Mode : Automatic

Position : 47.153 [mm]

Use Nominal Pulse Frequency : Yes

 

 

Verification data

 

verification_type : Single Verification

 

 

Results

 

Machine information

Machine Type : 1250D

Lens number : 0122xxxx

UNICOM position : 47.15 [mm]

Stray light results

Maximum

Stray Light Value : 0.530 [%]

X position : 2.588 [mm]

Y position : 0.000 [mm]

At (0,0)

Stray Light Value : 0.516 [%]

X position : -0.000 [mm]

Y position : 0.000 [mm]

Max. Centre-to-edge

Stray Light Value : 0.252 [%]

X position : -12.939 [mm]

Y position : 0.000 [mm]

Slit Average

Stray Light Value : 0.445 [%]

Y position : 0.000 [mm]

Result with UNICOM at centre position

UNICOM centre position : 35.1 [mm]

Stray Light at (0,0)

Stray Light Value : 0.571 [%]

X position : 0.000 [mm]

Y position : 0.000 [mm]

 

Stray light results per point on the line y=0

+----+-------------------+------------+------------+

| | Stray Light Value | X position | Y position |

| | [%] | [mm] | [mm] |

+====+===================+============+============+

| 0 | 0.264 | -12.939 | 0.000 |

| 1 | 0.434 | -10.351 | 0.000 |

| 2 | 0.455 | -7.763 | 0.000 |

| 3 | 0.484 | -5.175 | 0.000 |

| 4 | 0.506 | -2.588 | 0.000 |

| 5 | 0.516 | -0.000 | 0.000 |

| 6 | 0.530 | 2.588 | 0.000 |

| 7 | 0.514 | 5.175 | 0.000 |

| 8 | 0.465 | 7.763 | 0.000 |

| 9 | 0.430 | 10.351 | 0.000 |

| 10 | 0.293 | 12.939 | 0.000 |

| 11 | 0.000 | 0.000 | 0.000 |

| 12 | 0.000 | 0.000 | 0.000 |

| 13 | 0.000 | 0.000 | 0.000 |

| 14 | 0.000 | 0.000 | 0.000 |

| 15 | 0.000 | 0.000 | 0.000 |

| 16 | 0.000 | 0.000 | 0.000 |

| 17 | 0.000 | 0.000 | 0.000 |

| 18 | 0.000 | 0.000 | 0.000 |

| 19 | 0.000 | 0.000 | 0.000 |

| 20 | 0.000 | 0.000 | 0.000 |

| 21 | 0.000 | 0.000 | 0.000 |

| 22 | 0.000 | 0.000 | 0.000 |

| 23 | 0.000 | 0.000 | 0.000 |

| 24 | 0.000 | 0.000 | 0.000 |

| 25 | 0.000 | 0.000 | 0.000 |

| 26 | 0.000 | 0.000 | 0.000 |

| 27 | 0.000 | 0.000 | 0.000 |

| 28 | 0.000 | 0.000 | 0.000 |

| 29 | 0.000 | 0.000 | 0.000 |

| 30 | 0.000 | 0.000 | 0.000 |

| 31 | 0.000 | 0.000 | 0.000 |

| 32 | 0.000 | 0.000 | 0.000 |

| 33 | 0.000 | 0.000 | 0.000 |

| 34 | 0.000 | 0.000 | 0.000 |

| 35 | 0.000 | 0.000 | 0.000 |

| 36 | 0.000 | 0.000 | 0.000 |

| 37 | 0.000 | 0.000 | 0.000 |

| 38 | 0.000 | 0.000 | 0.000 |

| 39 | 0.000 | 0.000 | 0.000 |

| 40 | 0.000 | 0.000 | 0.000 |

| 41 | 0.000 | 0.000 | 0.000 |

| 42 | 0.000 | 0.000 | 0.000 |

| 43 | 0.000 | 0.000 | 0.000 |

| 44 | 0.000 | 0.000 | 0.000 |

| 45 | 0.000 | 0.000 | 0.000 |

| 46 | 0.000 | 0.000 | 0.000 |

| 47 | 0.000 | 0.000 | 0.000 |

| 48 | 0.000 | 0.000 | 0.000 |

| 49 | 0.000 | 0.000 | 0.000 |

| 50 | 0.000 | 0.000 | 0.000 |

+----+-------------------+------------+------------+

 

 

Operator:ASML Machine:6xxx Release:4.1.0 Date:12/01/2016 Time:20:12

 

Report Filename : LUSU.65

Report Path : TM/Illumination/Performance/LUSU.log/

Machine Type : 1250D

 

File name of logfile(s) : service_data/LU/LUSU/LUSU.1637.log

 

Testname : Slit Uniformity

Start Time : Tue, 12 Jan 2016 20:10:33 598505us +0800

Stop Time : Tue, 12 Jan 2016 20:12:51 657772us +0800

Execution Time : 00:02:18

Test Run Result : OK

Test Status : Test is Finished

Results Validation : In Limits

Measurement Quality : OK

Comment :

 

 

 

+---------------------+------------+-----------+----------+----------------+

| Step | Start Time | Stop Time | Status | Execution Time |

+=====================+============+===========+==========+================+

| Initialize Drivers | 20:10:33 | 20:10:33 | Finished | 00:00:00 |

| Prepare Machine | 20:10:33 | 20:10:53 | Finished | 00:00:19 |

| Perform Measurement | 20:10:53 | 20:12:47 | Finished | 00:01:54 |

| Generate Results | 20:12:47 | 20:12:50 | Finished | 00:00:03 |

+---------------------+------------+-----------+----------+----------------+

 

Scenario Inputs

 

Selected Scenario : m-action

Verification Set : Single Verification

Overrule Inputs : No

Manual Scenario Selected : No

 

 

Measurement mode : Stepping

Slit Uniformity X Size : 26.000 [mm]

Slit Uniformity Y Size : 11.000 [mm]

Field Uniformity X Size : 26.000 [mm]

Field Uniformity Y Size : 7.000 [mm]

Field Shift X : 0.000 [mm]

Field Shift Y : 0.000 [mm]

Steps in X Direction : 11

Steps in Y Direction : 51

Number of pulses : 100

Number of pre-expose pulses : 0

Attenuator transmission laser : 1.00

Pulse frequency : 4000

Use the nominal pulse frequency as pulse frequency : Yes

Pupil shape

Illumination mode : Annular

NA : 0.850

DOE ID : 15

Sigma

inner : 0.690

outer : 0.930

Polarization mode : Unpolarized

Spot sensor : Leading

REMA window

REMA window X centre : 0.00000 [m]

REMA window Y centre : 0.00000 [m]

REMA window X size : 0.00000 [m]

REMA window Y size : 0.00000 [m]

REMA set_ps

Rema use : Spot

disable_BBS : No

Unicom

Mode : Automatic

Position : 47.152 [mm]

Pupicom

Mode : Automatic

Angle : 0.8 [deg]

Beam

Beam Mode : Automatic

Beam Positioning

Position x : -3.000 [mm]

Position y : 0.000 [mm]

Pointing x : 0.450 [mRad]

Pointing y : 0.000 [mRad]

Beam Window

Beam position control window : 300 [um]

Beam pointing control window : 50 [uRad]

UIP on : Yes

 

 

type : Single Verification

 

slit_uniformity_limits

minimum : 0.00 [%]

maximum : 20.00 [%]

 

average spot sensor light intensity limits

minimum : 0.00 [mW/cm^2]

maximum : 10000.00 [mW/cm^2]

 

av_ss_light_int_1_bp_limits

minimum : 0.00 [mW/cm^2]

maximum : 10000.00 [mW/cm^2]

 

av_point_ratio_limits

minimum : 0.00 [%]

maximum : 10.00 [%]

 

tilt_x_limits

minimum : -20.00 [%]

maximum : 20.00 [%]

 

tilt_y_limits

minimum : -20.00 [%]

maximum : 20.00 [%]

 

field_uniformity_limits

minimum : 0.00 [%]

maximum : 20.00 [%]

 

slit_uni_tilt_x_limits

minimum : 0.00 [%]

maximum : 20.00 [%]

 

slit_uni_sym_limits

minimum : 0.00 [%]

maximum : 20.00 [%]

 

slit_uni_tilt_x_sym_limits

minimum : 0.00 [%]

maximum : 20.00 [%]

 

symmetrical_error_limits

minimum : -20.00 [%]

maximum : 20.00 [%]

 

unicom_position_limits

minimum : 0.0 [mm]

maximum : 100.0 [mm]

 

pupicom_position_limits

minimum : -60.0 [deg]

maximum : 60.0 [deg]

 

beam_pos_x_limits

minimum : -10.000 [mm]

maximum : 10.000 [mm]

 

beam_pos_y_limits

minimum : -10.000 [mm]

maximum : 10.000 [mm]

 

beam_poi_x_limits

minimum : -5.000 [mrad]

maximum : 5.000 [mrad]

 

beam_poi_y_limits

minimum : -5.000 [mrad]

maximum : 5.000 [mrad]

 

 

Main Results

Slit Uniformity : 0.93 [%]

Tilt X : -0.12 [%]

Symmetrical Error : 0.69 [%]

UNICOM correctable : 0.42 [%]

Selected Chuck : Spot sensor WS chuck 1

Corrected Slit Uniformities

Slit Uniformity if corrected for Tilt X : 0.90 [%]

Slit Uniformity if corrected for Symmetrical Error : 0.35 [%]

Slit Uniformity if corrected for Tilt X and Symmetrical Error : 0.36 [%]

Slit Uniformity if corrected for UNICOM : 0.51 [%]

Slit Uniformity if corrected for UNICOM and Tilt X : 0.56 [%]

Light Source Properties

Number of Laser Pulses emitted since installation [*10^6] : 31030

Illumination Properties

DOE data file name : annular

DOE data file version : 2.0.1

Beam Position and Pointing

Beam position X : -2.68 [mm]

Beam position Y : 0.08 [mm]

Beam pointing X : 0.446 [mrad]

Beam pointing Y : 0.012 [mrad]

Beam data valid : Yes

Beam drift during measurement

Beam position X : -0.74 [mm]

Beam position Y : -0.08 [mm]

Beam pointing X : -0.001 [mrad]

Beam pointing Y : -0.013 [mrad]

Beam drift during measurement valid : Yes

Field Uniformity Results

Field Uniformity : 2.46 [%]

Tilt Y : -1.02 [%]

Field Value Statistics

Average Spot Sensor Light Intensity : 1826.93 [mW/cm2]

Standard Deviation of the Spot Sensor Light Intensity : 25.17 [mW/cm2]

Average Energy Sensor Light Intensity : 1790.55 [mW/cm2]

Standard Deviation of the Energy Sensor Light Intensity : 13.58 [mW/cm2]

Average Point Ratio : 1.0203

Standard Deviation of the Point Ratio : 0.0115

Corrected Intensities

Average Spot Sensor Light Intensity Corrected to 1 external BP : 2003.15 [mW/cm2]

Intensity constants

ATP Intensity Specification : 2000 [mW/cm2]

Number of Bending Points : 3

Greyfilter Coefficients

Comment : Calculated

a0 : -0.00000e+00

a2 : -7.71078e-02 [1/mm2]

a4 : 1.93402e-03 [1/mm4]

a6 : -1.81279e-05 [1/mm6]

a8 : 5.27786e-08 [1/mm8]

 

Slit Profile

+----+--------+---------------+----------------------+---------+----------+

| | X | Average Ratio | Ratio per run (0..4) | (5..14) | (15..24) |

| | [mm] | [%] | [%] | [%] | [%] |

+====+========+===============+======================+=========+==========+

| 0 | -12.94 | 80.350 | | | |

| 1 | -10.35 | 79.461 | | | |

| 2 | -7.77 | 79.189 | | | |

| 3 | -5.18 | 79.439 | | | |

| 4 | -2.59 | 79.269 | | | |

| 5 | 0.00 | 79.166 | | | |

| 6 | 2.59 | 78.864 | | | |

| 7 | 5.18 | 78.915 | | | |

| 8 | 7.77 | 79.151 | | | |

| 9 | 10.35 | 79.952 | | | |

| 10 | 12.94 | 80.066 | | | |

+----+--------+---------------+----------------------+---------+----------+

 

 

 

Verification Results

+-------------------------------------------+--------------------+-----------+----------+

| | limits | | |

| +---------+----------+ | |

| | minimum | maximum | In Limits | Measured |

+===========================================+=========+==========+===========+==========+

| Slit uniformity [%] | 0.00 | 20.00 | OK | 0.93 |

| Avg SS light intensity [mW/cm^2] | 0.00 | 10000.00 | OK | 1826.93 |

| Avg SS light intensity corr 1BP [mW/cm^2] | 0.00 | 10000.00 | OK | 2003.15 |

| Average point ratio [%] | 0.00 | 10.00 | OK | 1.02 |

| Tilt X [%] | -20.00 | 20.00 | OK | -0.12 |

| Tilt Y [%] | -20.00 | 20.00 | OK | -1.02 |

| Field uniformity [%] | 0.00 | 20.00 | OK | 2.46 |

| Slit uniformity tilt X [%] | 0.00 | 20.00 | OK | 0.90 |

| Slit uniformity symmetrical [%] | 0.00 | 20.00 | OK | 0.35 |

| Slit uniformity tilt X & symmetrical [%] | 0.00 | 20.00 | OK | 0.36 |

| Symmetrical error [%] | -20.00 | 20.00 | OK | 0.69 |

| Unicom position [mm] | 0.0 | 100.0 | OK | 47.2 |

| Pupicom position [deg] | -60.0 | 60.0 | OK | 0.0 |

| Beam position X [mm] | -10.000 | 10.000 | OK | -2.685 |

| Beam position Y [mm] | -10.000 | 10.000 | OK | 0.084 |

| Beam pointing X [mrad] | -5.000 | 5.000 | OK | 0.446 |

| Beam pointing Y [mrad] | -5.000 | 5.000 | OK | 0.012 |

+-------------------------------------------+---------+----------+-----------+----------+

 


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