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ASM Epsilon 2000 Epitaxial deposition system for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used ASM Epsilon 2000 Epitaxial deposition system.
Please click on the "Get Quote" button at the end of the Epsilon 2000 description, if you'd like to get a quotation, photos and specifications of this Epitaxial deposition system, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This ASM Epsilon 2000 Epitaxial deposition system is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


ASM Epsilon 2000 Equipment Details

SDI ID: 106164
Manufacturer: ASM
Model: Epsilon 2000
Description: Epitaxial deposition system
Version: 200 mm
Vintage: 01.06.2006
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

-Still installed in fab
-Was running until June 2022
-Can be inspected by appointment in the fab
Software version = 7.25.03
 Ethernet Card
 RP Chamber
 Old Style H2/HCL Detection
 Vacuum Load Locks
 Back-up Pilot Gas Option
 Upgraded USB interface Controller for Downloading/Uploading Software
 Recipes and Tool Configuration
 Bottom Feed Connection
 Left Panel Access
 Upgraded Bump Cassettes
 Gas Box STEC MFC's are Main N2/H2 MFC = 150 SLM
 Shaft purge = 5 SLM
 N Main DOP MFC = 20 SLM
 N DOP Dilution MFC = 200 SCCM
 N DOP Injector MFC = 200 SCCM
 P Main DOP MFC =20 SLM
 P DOP Dilution MFC = 200 SCCM
 P DOP Injector MFC = 200 SCCM
 DCS MFC = 500 SCCM
 HCL Main MFC = 20 SLM
 HCL Etch MFC 3 SLM
 W/O SMIF Interface


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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